LX

) 20 20 5.1 5.1 2.6 2.6 0.6 0.6 0.1 0.1 30 30 3.4 3.4 1.7 1.7 0.4 0.4 0.1 0.1 For transfer load of 3kg For transfer load of 1kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10.1 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 20 20 5.1 5.1 2.6 2.6 0.6 0.6 0.1 0.1 30 30 3.4 3.4 1.7 1.7 0.4 0.4 0.1 0.1

Plug-in Unit

Refer to manifold ordering. 23 24 21 22 19 20 17 18 Terminal no. 28AWG 15 16 6 13 14 Red 11 12 9 10 7 8 26 2 25 1 30 (20P) 37.5 (26P) Connector terminal number 5 6 3 4 1 2 Triangle mark indicator position <26P> <20P> (15.6) Polarity Terminal no. Polarity Terminal no. () L SOL. A SOL. A (+) () (+) 1 1 Station 1 Station 1 SOL. B SOL. B (+) () () (+) 2 2 SOL. A SOL.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Flow rate characteristics of 2 3 (B R2) declines about 30% of 4 5 (A R1). Note 2) Based on JIS B 8375-1981. (Values with a supply pressure of 0.5 MPa and light/surge voltage suppressor. Values fluctuate depending on the pressure and air quality.

Series AS-FM/AS-M/ASD-FM

Type 2 3 Elbow Universal Applicable tube outside diameter Metric size Inch size 3.2 4 6 8 10 01 03 05 07 09 11 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 23 04 06 08 10 Control system 0 1 Meter-out Meter-in Use a 1/8" tube.

PA3000/5000/PAX1000

Air consumption 200l/min ANR) 30 Air consumption 100l/min (ANR) Air consumption 50l/min (ANR) 20 20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

SL5200

40 V15 V3 L 1 H V2 2 4 10 30 40 -30 in.Hg to 15 psig -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig -30 in.Hg to 200 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 3000 psig 0 to 4000 psig -0.1 to 0.1 MPa -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa -0.1 to 1.4 MPa 0 to 1.5 MPa 0 to 3 MPa 0 to 7 MPa 0 to 21 MPa 0 to 28 MPa 00

Angular Air Gripper Series MHC2/MHCA2/MHCM2

MHC2, MHCA2, MHCM2 F L F MHC2-6D/MHCA2-6D MHC2-6S/MHCA2-6S MHCM2-7S Pressure 0.6MPa 4 4 2 Pressure 0.6MPa 0.5 Pressure 0.6MPa Gripping force N Gripping force N Gripping force N 3 3 0.4 0.5 0.5 1 2 2 0.3 0.4 0.4 0.2 1 1 0.3 0 30 20 10 0 30 20 10 0 30 20 10 Gripping point L mm Gripping point L mm Gripping point L mm 2 Series MHC2/MHCA2/MHCM2 Confirmation of inertial moment of attachment Step

Power Clamp Cylinder

A B C CKZT50-A045B 30 to 105 30 to 120 CKZ50-42 3680N-R D E F CKZT63-A045S 30 to 105 30 to 120 63 CKZT63-A045B CKZT63-A015S 30 to 90 30 to 120 CKZT80-A045S CKZT63-A015B 30 to 90 30 to 105 63 80 CKZ63-42 3680N-R A B C CKZT80-A045B 30 to 105 30 to 105 CKZ63-42 3680N-R D E F For mounting bolt, a hexagon socket head cap screw and a spring washer No. 2 are recommended. 30 to 105 CKZT80-A015S

Precision Cylinder Series MTS

7.5 6 Rod cross section 7 6 2-M5 x 0.8 (port size) 28 0.2 16.5 15 M6 x 1.0 4.5 4-4.5 through 2 x 4-7.5, counter bore depth 4.5 (opposite side also) 22 0.2 4-M5 x 0.8 Effective length 8 6.5H7 +0.015 0 13h7 0 0.018 30 0.2 30 0.2 40 38 31 32 57.5 109 + Stroke 21 130 + Stroke 22 0.2 4-M5 x 0.8, effective length 8 28 0.2 22 Rod end male threads 0 0.018 13h7 Width across flats 11 M8 x 1.25 M8

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

ZHPmmmH-mmS 14.28 44.1 3/8-16UNC depth 11 EXH.

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

Description Lead wire color Note 1 L+ Brown 18 to 30 VDC 1: Brown 4: Black 2 DO White Switch output 2 M12 3 L Blue 0 V 4 C/Q Black Communication data (IO-Link)/ Switch output 1 (SIO) 11 2: White 3: Blue ISE7m/7mG Series Function Details Display examples of the main and sub (set value) screens of each mode.

PSxx-OMM0006CN

) -51No.PS-OMM0006CN-E , (1015 ) <> 5 UnLLoC 5 5 (30) 5 000 (30) 51/ 1 -52No.PS-OMM0006CN-E ZSE40A(F)/ISE40A ( ) No.1 ON ON OFF Yes No.2 No ON OFF No.1 OFF No.3 No.4 No.5 () No.6 No.7 -53No.PS-OMM0006CN-E No.8 Yes No No.9 No.9 No.10 No.11 No.12 No.13 No.14 No.15 No.16 No.17 No.18 No.19 -54No.PS-OMM0006CN-E No.

VCW

, 3/8 VCW31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 59 46 57 60 54.5 48.5 101 57 68 104 1/2 22 45 90 41 11 17 36 22.5 23 M5 8 26 64.5 48 62.5 62 60 50.5 103 62.5 70 107 1/4, 3/8 VCW41 30 50 94 41 13.5 17 36 25 23 M5 8 26 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 70 48 68 62 65.5 50.5 103 68 70 119 3/4 17-2-55 8 Series VCW Dimensions (N.O.)

AC Servo Motor Driver (Pulse input type)

Driver Servo amplifier 24VDC (Note 4, 12) Controller (Note 7) Positioning module CN1 QD75D (Note 7) 21 DICOM CN1 (Note 2) Trouble (Note 6) 20 46 DICOM 48 ALM RA1 14 13 Zero speed detection CLEARCOM DOCOM 23 ZSP CLEAR CR 41 RA2 (Note 12) Limiting torque RDYCOM 12 25 TLC RA3 READY 11 RD PP PG NP NG 49 10 11 35 In-position 24 INP 15 16 RA4 PULSE F PULSE F 10m max. 17 PULSE R PULSE R 18 36 4

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

(Nil) Cylinder stroke (mm) Model Lubrication Action Effective cushioning stroke (mm) Bore size (mm) 20 25 32 40 20 25 32 40 Standard stroke (mm) Auto switch mounting Cushion Port size Model 10-REC20 10-REC25 10-REC32 10-REC40 11-REC20 11-REC25 11-REC32 11-REC40 Relief type Vacuum suction type 150 to 700 45 1/8 200 to 1000 150 to 1000 60 50 Double acting Single rod Air cushion (Both sides)

LEJ-OM004xx

Crean class Amount of Type Speed recommended vacuum (mm/s) ISO 14644-1 Fed.Std.209D aspiration 6 1000 10 5 100 20 4 10 30 6 1000 50 5 100 60 4 10 70 6 1000 20 5 100 30 4 10 50 6 1000 30 5 100 70 4 10 90 600 11-LEJS40 1200 600 *Please aspirate it from the port on both sides when aspirating 50/min(ANR). Please select "D" about the type. 11-LEJS63 1200 * Based on SMC test condition.

ZL3-OM00801

2 PBT 5 22 12 POM 8 13 3 O HNBR/NBR 16 No.ZL3-OM00801-A 7.2 1 (/) ZL3/ZL6 ZL3-JSY3140-5LZ -a 1 3) 2) DC24V 1) 300mm 300mm * *0.150.18Nm 2) D: E: 1 1 1 1 3) 1 1 2 X12 ZL3/ZL6 SY100-30-4A-6 1 2) / 1) 2) 300 4 DC24V 6 600 10 1000 15 1500 20 2000 25 2500 30 3000 50 5000 ZL3/ZL6 SY100-30-A *x2 17 No.ZL3-OM00801-A ZL3/ZL6 ZS-39-5G ZL3-LW1-N-A 1 1) N NPN P PNP 2

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

parts 16 Mounting and Installation 17 Wiring 17 Setting and Adjustment 18 LED Display 22 Specification 25 Specifications 25 Dimensions 26 End Plate Model Indication and How to Order 27 Summary of Product parts 28 Mounting and Installation 30 Wiring 30 Specification 32 Specifications 32 Dimensions 33 IO-Link Master Unit Model Indication and How to Order 40 Summary of Product parts 40 Mounting

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

30 30 30 30 30 45 55 68 58 67 73 21 26 32 23.5 28 34.5 46 55 66 59 71 82 34.5 40 46.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) N NB P S XA XL Y WL WM ZZ M MA MB MC MM 40 50 63 44 50 56 74 83 89 1/4 1/4 1/4 168 183 204 12 16 16 6 6 6 9.5 12.5 15 42 42 52 16 16 16 4 5 5 12 15 15 M6 x 1.0 M8 x 1.25 M8 x 1.25 10 14 14 to 1000 to 1000 to 1000 208 228 254 39 42 52 9 Non-rotating Double

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Air consumption 200l/min ANR) 30 Air consumption 100l/min (ANR) Air consumption 50l/min (ANR) 20 20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min 1m = 3.28ft 1l/min = 0.035SCFM Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.