ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

D5080 72 36 5 20 10 45 16 16 11 11 95 90 50 100 D5100 89 41 5 25 10 55 20 20 11 12 115 110 60 * Supplied with 4 mounting screws, clevis pin, and clevis pin bracket.

0.55

How to Order Manifold Common exhaust Individual exhaust (VF1000 only) VV5F 1 1 04 30 VV5F1 3 04 31 Series Thread type Stations Thread type 1 3 5 VF1000 VF3000 VF5000 Stations 02 Nil Rc 02 Nil 2 stations Rc 00F 00N 00T G 2 stations 00F 00N 00T G xx Manifold model NPT xx 20 20 stations NPT 20 NPTF P, R port size VF1000 VF3000 VF5000 Symbol 20 stations NPTF > 1/8 1/4 3/8 1/2 Up to 10 stations

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 0.05 0.05 0.06 0.04 Table displacement mm Table displacement mm Table displacement mm 0.04 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 40 Load N 0 10 20 30 50 Load N 0 10 20 30 40 Load N 40 10 10 10 L = 100mm L = 100mm L = 100mm MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

G RS H A Bore size (mm) 12, 16 20, 25 Standard stroke (mm) 5, 10, 15, 20, 25, 30 RZQ 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 MI W S Replacement Parts: Seal Kit Theoretical Output CEP1 OUT IN Unit: N Bore size (mm) Kit no.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

standard of 20 with 5 to 10 mm strokes and 25 with a 5 mm stroke.

LG1H

High rigidity direct acting guide LG1H 10 20 10 20 Horizontal With coupling 158 Non-standard motor 10 20 10 20 With coupling 168 Options Page 178 Construction 179 Mounting 181 Non-standard Motor Mounting 182 Deflection Data 183 Part Number Designations 100 LG1 21 H F 2 G X10 1 P A Frame material Aluminium alloy Stainless steel Nil W X10 Non-standard motor Frame material Guide type

CJP

Symbol A A' Bore size (mm) NN MM K J H GB GA E D C CD B CK Q R 6 10 15 +0.040 0 3 M3 x 0.5 8 6 17 11 6 10.5 3 16.5 14 4 9 7 7 M10 x 1.0 0 0.5 17 +0.065 0 5 M4 x 0.7 8 7 20 17 6 13 5 20 15 6.5 12 8 10 M12 x 1.0 0 0.5 22 +0.065 0 6 M5 x 0.8 8 9 24 18.5 6 15.5 6 24.5 20 8 14 10 12 M14 x 1.0 Symbol Z S 5 st 10 st 15 st 20 st 30 st ZZ Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15

CJP

, 15, 20 5, 10, 15, 20, (25), 30 10 Flange style 5, 10, 15, 20, (25), 30 15 Foot style 5 mm spacer is installed in the 30 mm stroke cylinder.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

] L5 [mm] L5 [mm] 600 600 600 m Wall L5 Y 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 5 10 15 20 25 30 35 0 10 20 30 40 50 60 70 Work load [kg] Work load [kg] Work load [kg] 7 Model

Electric Rotary Table

sides (mm) Max. gripping force (N) Stroke/both sides (mm) Size Stroke/both sides (mm) Size Size Size Basic Compact 4 6 10 14 22 30 Basic Compact 4 6 10 14 Basic Compact 4 6 8 12 10 16 20 25 32 40 10 16 20 25 10 20 32 40 10 20 32 40 5.5 22 90 130 6 8 6 8 7 28 120 180 16 (32) 24 (48) 32 (64) 40 (80) 3.5 17 14 14 28 28 40 40 130 210 Note) ( ): Long stroke Features 11 Controller/Driver Controller

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

pulses) 10[V] 10[V] 10[pulse] 10[pulse] 0 0 10[pulse] 10[pulse] -10[V] -10[V] CW direction CW direction CCW direction CCW direction A Feedback position (Note 1,2) ( 10V/1 Mpulses) B Feedback position (Note 1,2) ( 10V/10 Mpulses) 10[V] 10[V] 1M[pulse] 10M[pulse] 0 0 1M[pulse] 10M[pulse] -10[V] -10[V] CW direction CW direction CCW direction C Feedback position (Note 1,2) ( 10V/100 Mpulses)

Electric Actuator Miniature Rod Type Miniature Slide table Type

) Actuator specification Horizontal Compact 10 to 200 20 to 350 Note4) Speed [mm/s] Note3) Note6) Vertical Basic 10 to 150 20 to 300 Note4) 10 to 150 20 to 300 Note4) Compact 10 to 150 20 to 300 Note4) Pushing speed [mm/s] Note5) 10 20 10 20 Acceleration / Deceleration [mm/ s2] 3000 Backlash [mm] 0.2 or less Positioning repeatability [mm] +/0.05 Lost motion [mm] Note7) 0.2 or less Impact

240

10 6 0.01 0.1 0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Overhang L (mm) Graph b b Load Eccentricity 100 mm Graph , Load Eccentricity 100 mm Graph 1 Load Eccentricity 100 mm 1 10 10 Mass m (kg) Mass m (kg) Mass m (kg) 1 20 16 20 16 20 16 10 6 0.1 1 10 0.1 10 6 6 0.01 0 20 40 60 80 100 0.01 0.1 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

12 16 0.1 5 10 20 30 40 50 100 200 0.01 5 10 20 30 MXW Overhang L (mm) Overhang L (mm) Maximum Speed: Up to 400 (mm/s) Graph (5) Graph (2) Maximum Speed: Up to 300 (mm/s) MXJ 0.3 50 40 30 20 MXP 0.2 10 MXY 0.1 2 3 4 5 Mass W (kg) Mass W (kg) 40 32 MTS 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 20 8 0.02 16 12 0.01 0.1 5 10 20 30 5 10 20 30 40 50 100 200 Overhang L (mm) Overhang L (mm) Graph (3)

Industrial Filters

0.5, 1, 5, 10 20, 50, 75, 100 EH EB ES Plating fluids, General acids, Alkali fluids, Industrial water, Cooling water Polypropylene 0.5, 1, 5, 10 20, 50, 75, 100 EHM P.41 General acids, High-temperature fluids EHK Glass fiber 1, 5, 10, 20 Paper P.42 Cotton, Phenol impregnated, (Epoxy adhesion) 5, 10, 20 Hydraulic oil, Lubricating oil, Fuel oil EP Micromesh Stainless steel 304 (Epoxy adhesion

Step Motor Controller

LE CP 1 (14.2) (13.5) Connector C Actuator side (Terminal no.) 1 2 Cable length (L) 1 3 5 8 A B C (14) (18) A1 B1 8 1.5 m 3 m 5 m 8 m (17.7) (17.7) 5 6 1 2 Connector A A6 B6 Connector D 10 m L (11) (30.7) (14.7) 5 6 15 m (10) 20 m Controller side Produced upon receipt of order 8 10 15 20 LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) (Terminal no.) (14.2) (13.5

Rotary Actuated Air Gripper MHR2, MDHR2/MHR3, MDHR3

MHR2-10/MDHR2-10 MHR2-20/MDHR2-20 50 60 Overhang distance H (mm) Overhang distance H (mm) Overhang distance H (mm) Overhang distance H (mm) 50 40 Pressure Pressure Pressure 40 External grip 30 0.2 MPa 0.2 MPa 30 0.3 MPa 0.3 MPa 0.4 MPa 20 0.4 MPa 20 0.5 MPa 0.5 MPa 0.6 MPa 10 0.6 MPa 10 0 10 20 30 40 50 0 10 20 30 40 50 60 Gripping point L (mm) Gripping point L (mm) MHR2-15/MDHR2-15 MHR2-

JIS Standard Hydraulic Cylinder

10 27 19 11 43 35 1/2 46 142 14 45 17 18 115 35 18 108 60 52 55 25 to 1400 63 30 20 M12 x 1.5 90 165 63 10 27 19 14 43 35 1/2 52 148 18 50 19 20 132 41 19 106 71 65 55 25 to 1500 80 35 20 1/4 stroke M16 x 1.5 110 190 80 11 22 22 16 44 44 3/4 65 166 18 60 24 24 155 45 20 124 74 65 80 25 to 1800 100 39 15 M18 x 1.5 135 230 102 11 22 22 18 44 44 3/4 75 172 22 71 27 28 190 53 22 122 85 80 100

Compact Manifold Regulator Series ARM5

IN Fitting Type Inch size Metric size ARP Common supply block (S) Common supply block with pressure switch (P) Fitting type Fitting type Straight 6 8 10 8 6 10 Elbow Straight 1/4 5/16 3/8 5/16 1/4 3/8 Elbow Symbol Symbol IR 5 56 01 02 03 13 14 15 51 52 53 63 64 65 5 56 IRV 0.6 0.2 0.4 MPa 20 24 SMC 24 20 0.5 0.1 0.3 VEX1 SRH 32.5 SRP 4.

Compact Cylinder with Air Cushion

A A1 E1 L1 MM U1 NZ L 0.2 0.4 +0.058 0 +0.058 0 +0.4 +0.2 +0.058 0 8 IY-G02 8 20 I-G02 34 8.5 16 25 M8 x 1.25 10.3 11.5 8.5 16 25 M8 x 1.25 10.3 11.5 16 21 Y-G02 8 8 20 34 0.2 0.4 +0.058 0 +0.4 +0.2 10 IY-G03 10 25 I-G03 20 M10 x 1.25 20 M10 x 1.25 41 10.5 30 12.8 14 10.5 30 12.8 14 20 25.6 Y-G03 10 10 25 41 +0.5 +0.3 0.3 0.5 +0.058 0 +0.070 0 +0.070 0 +0.058 0 10 IY-G04 18 32, 40 I-G04 M14