30

M12 x 1.5 M12 x 1.75 M14 x 1.5 M16 x 1.5 M16 x 2 M18 x 1.5 H 5 5 6 6 6 7 7 7 8 10 10 11 B C 15 15 19.6 19.6 19.6 21.9 21.9 21.9 25.4 27.7 27.7 31.2 JC20-8-100 JC20-8-125 JC32-10-100 JC30-10-125 JC25-10-150 JC40-12-125 JC40-12-150 JC40-12-175 JC40-14-150 JC50-16-150 JC63-16-200 JC63-18-150 DA00207 DA00169 DA00141 DA00142 DA00140 DA00145 DA00146 DA00143 DA00148 DA00151 DA00150 DA00153 13 13

Rotary Table

Order made parts [g] Size 10 20 30 50 With interchangeable table and interchangeable plate 70 160 120 220 With interchangeable table 30 60 80 130 With interchangeable plate 40 100 40 90 Effective torque 10 50 8 Torque (Nm) 6 30 4 20 2 10 0 0.2 0.4 0.6 0.8 1 Oprating pressure (MPa) -22- Internal construction and parts MSQ10 to 50* 16 10 5 9 15 20 3 23 19 18 6 14 8 7 2 21 1 24 13 22 12 11 17

MLU

CD-MU02 Z 142.5 159 171 205.5 LX RR 8.5 10 11 16 LD LU 11 14 15 20 LC 16 18 20 28 Z LB 27 31 36 46 LB 27 31 36 46 LX RR 8 10 10 16 LA 35.5 41 47 62 ZZ 151 169 182 221.5 L 52.5 59 67 81 LA 35 41 46 62 LD LU 13 14 17 23 ZZ L 52.5 59 67 81 Model MLU25 MLU32 MLU40 MLU50 Model MLU25 MLU32 MLU40 MLU50 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 The L, Z and ZZ dimensions are reference dimensions when

MTS

18 (33) 0 (15) 12 D-M9, D-M9V 10 (17) 0 0 28 33 (45) 18 28 (35) 5 (17) D-F9W, D-F9WV 10 (17) 0 0 28 33 (45) 18 28 (35) 5 (17) D-A9, D-A9V 0 (15) 0 0 32 32 (47) 22 22 (37) 0 (15) 16 D-M9, D-M9V 10 (17) 0 0 32 37 (49) 22 32 (39) 5 (17) D-F9W, D-F9WV 10 (17) 0 0 32 37 (49) 22 32 (39) 5 (17) D-A9, D-A9V 0 (15) 0 0 38 38 (53) 26 26 (41) 0 (15) 20 D-M9, D-M9V 10 (17) 0 0 38 38 (55) 26 36 (43)

Table of Contents

Polarity Flat ribbon cable connector SOL.A SOL.B 20 18 () () (+) (+) 1 station 19 17 15 13 11 9 10 12 14 16 18 20 2 stations SOL.A SOL.B () () (+) (+) 16 14 Flat Ribbon Cable Connector Assembly (Option) SOL.A SOL.B 12 10 () () (+) (+) 3 stations Note Assembly part no.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

AS321FE AS331FE AS421FE AS431FE Model 8 10 6 8 10 12 12 10 6 8 10 Tubing O.D.

Vacuum Unit Ejector / Vacuum Pump System

) ZK2-RL1-A (18) Lock nut(10 pcs. per set) ZK2-LN1-A -36No.

Low Friction Cylinders Series MQ

size (mm) +0.4 +0.2 CW CX CZ L RR CX CT -0.1 -0.3 B + Stroke CW CZ L 10 -X 15 6.5 12 8 6 RR CL + Stroke 16 18 8 16 10 9 A + Stroke Individual -X 20 20 10 20 10 10 25 20 18 36 12 10 30 22 18 36 12 10 40 28 22 44 12 14 1179 Series MQQ Accessory Dimensions Rod end thread adapter Rod end nut d NN Rod MM D C C B H E F A B H Applicable bore size (mm) Applicable bore size (mm) Part no.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-12 16 4 32 6 18 6 35 8 20.5 8 39 10 Series SY3000 SY5000 SY7000 Part No. 22 10 43 12 SY3000-52-2A 24 12 45.5 14 SY5000-52-2A SY3000/5000 DIN rail dimensions and weight SY7000-52-2A VZ1000-11-1Blocking disk indication stickers Refer to L dimensions Enter a number from the DIN rail dimension table below in the .

VFS

Description Material Return spring Gasket Stainless steel NBR VFS5000-9 AXT627-10-1 AXT627-10-1 AXT627-18 AXT627-10-1 o !0 !1 Hexagon socket head screw Steel M5 x 50 M5 x 50 M5 x 50 !2 Detent assembly AXT510-9 Refer to How to Order Pilot Valve Assembly on page 3-8-86. Pilot valve assembly !

MLGP

MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking ID IE IF IG IH J K L 79.5 10 10 12 32.5 8.5 9 9 83 M5 M5 M6 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 9.5 10 9 24 30 34 6 7.5 9 18 21 24 32 3 20 25 32 20, 30, 40, 50, 75, 100, 125 150, 175, 200, 250, 300, 350 84 36.5

MLGP

MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking ID IE IF IG IH J K L 79.5 10 10 12 32.5 8.5 9 9 83 M5 M5 M6 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 9.5 10 9 24 30 34 6 7.5 9 18 21 24 32 3 20 25 32 20, 30, 40, 50, 75, 100, 125 150, 175, 200, 250, 300, 350 84 36.5

MK

/Flange Rod end width across flats 10 10 21 21 46 46 Data Part no.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Calle 18 69-05 Apart.

MK

C 8 8 8.5 8.5 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 X 50l M3 X 60l M3 X 50l M3 X 60l M5 X 75l M5 X 85l M5 X 75l M5 X 85l M5 X 85l M5 X 95l M5 X 75l M5 X 85l M6 X 95l M6 X 130l M8 X 100l M8 X 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50 PTo attach and detach

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

6.5 7.0 7.5 8.0 Parallel gripper 6.5 7.0 7.5 8.5 30 to 10 30 to 10 30 to 10 22.5 to 10 Angular gripper 180 opening/closing 88 to 5 54 to 6 58 to 5 41 to 5 30 to 4 Note) The operating range for grippers is measured when both ends are open.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Bore size (mm) Auto switch model L d L d L d L d D-A9, D-A9V 0 (15) 0 28 28 (43) 18 18 (33) 0 0 (15) 12 D-M9, D-M9V D-M9W, D-M9WV 10 (17) 0 28 33 (45) 18 28 (35) 0 5 (17) D-A9, D-A9V 0 (15) 0 32 32 (47) 22 22 (37) 0 0 (15) 16 D-M9, D-M9V D-M9W, D-M9WV 10 (17) 0 32 37 (49) 22 32 (39) 0 5 (17) D-A9, D-A9V 0 (15) 0 38 38 (53) 26 26 (41) 0 0 (15) 20 D-M9, D-M9V D-M9W, D-M9WV 30 (37) 0 38 38 (

Air Pilot Operated

Operator Buna N 10 Recssed Non-Lockihg OPeralor PB 0103 61 l Scrws' Pilot Covers (4) Hold Down Bolt (8.32 x 1 Y'!')

Air Pilot Operated Series NVSA

Operator Buna N 10 Recssed Non-Lockihg OPeralor PB 0103 61 l Scrws' Pilot Covers (4) Hold Down Bolt (8.32 x 1 Y'!')

Pin Clamp Cylinder Series CKQ/CLKQ

Lock Specifications Clamp Specifications Locking action Spring locking (Exhaust locking) Without shim With shim Clamp stroke 10 mm 0 0.5 Unlocking pressure 0.2 MPa or more 10 mm to 12 mm Lock starting pressure 1 pc.