/

Hz 15.4 155 (6.5) 1 200 VAC 50/60 Hz 56 (2.3) 9.4 50 (2.1) 3/8 11 110 VAC [115 VAC] 50/60 Hz 73 (3.0) 10.5 55 (2.3) 1/2 3 MPa 15 12 90 (3.8) 92 (3.8) 220 VAC [230 VAC] 50/60 Hz 3/4 15.2 135 (5.6) 140 (5.8) 17 24 VDC 1 3-port 23 (1.0) 6 26 (1.1) 7.5 3/8 12 VDC 49 (2.0) 10.1 7.6 45 (1.9) 1/2 7 MPa 12.8 10 78 (3.3) 65 (2.7) 3/4 11.5 102 (4.3) 84 (3.5) 15.4 1 Bracket Electrical entry T: Conduit

VZ5000

) [Current mA] Note) DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Inrush Refer to pages 3-3-60 to 3-3-65 for manifold use.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(P, A, B port) 3-Rc(PT)1/4, 1/8 3-Rc(PT)1/4, 1/8 (P, A, B port) 25.5 41 47.6 54 60 [66.5] 57.1 20 57.1 12 20 11.5 11.5 12 10 10 22 22 63 22 22 63 18 18 (R1, R2 port) 2-Rc(PT)1/4 (R1, R2 port) 2-Rc(PT)1/4 [ ] for AC Other dimensions are the same as the grommet style

Modular/F.R.L. Units Series AC

Example) AC30-F03DE1-KSTV-136NR Body size Description Symbol 10 20 25 30 40 50 55 60 Metric thread (M5) Rc NPT G Nil Thread type N Note 1) F Note 2) + M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 Port size + Nil C D a Without auto drain Float type auto drain (N.C.) Float type auto drain (N.O.)

SMC Pneumatic Clean Series

S + Stroke FX FZ Relief port 20, 25 F T H ZZ + Stroke Z + Stroke Standard port 20 to 32 FY 45 4-FD Relief port (32, 40) 40 (mm) FX 66 52 40 40 34 B 10.7 7.5 7.5 7.5 DL FT 22 17 17 13 B1 FD F AL FZ G H1 H2 E C2 K I HC H FY D B2 A MM Bore size 0 41 32 32 26 20-0.033 40 32 25 20 60 60 60 4 4 4 16 13 13 13 7 7 7 5 24 46.5 37.5 33.5 28 21 19.5 19.5 15.5 24 22 22 18 14 12 10 8 47.3 37 37 30 10

2–4

-30 -35 -40 -45 -50 -75 -100 CDQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CDQMB12-5 -10 -15 -20 -25 -30 CDQMB16-5 -10 -15 -20 -25 -30 CDQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB32-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 40 45 50

90

flow (Port exhaust) Vacuum pressure 60 40 Suction flow (Silencer exhaust) Air consumption 20 Port exhaust Silencer exhaust 0 0 10 20 30 40 50 60 Suction flow [L/min (ANR)] ZK212 Flow-rate Characteristics Exhaust Characteristics 0 10 20 30 40 50 60 70 80 90 100 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Supply pressure [MPa] 100 Suction flow (Port exhaust) Vacuum pressure

Table of Contents

Function Coil voltage AC Symbol Specifications DC (1.0 W) (1) Light/Surge voltage suppressor Standard type Nil 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC (2) (1.5 W) (0.5 W) H High pressure type Nil E Yes None (2) Low wattage type Y For power consumption of AC type, refer to page 2-4-10. Except double (latching).

Precautions 1

(n 2) 2 D-C7 D-C80 15 + 45 10 15 50 50 + 45 (n 2) (n = 2, 4, 6...) D-H7 D-H7W D-H7NF (n 2) 2 15 + 45 10 15 60 60 + 45 (n 2) (n = 2, 4, 6...) D-C73C D-C80C D-H7C (n 2) 2 15 + 50 10 15 65 65 + 50 (n 2) (n = 2, 4, 6...) (n 2) 2 D-B5/B64 D-G5NTL 15 + 50 75 + 55 (n 2) 10 15 75 (n = 2, 4, 6...) (n 2) 2 20 + 50 D-B59W 75 + 55 (n 2) 15 20 75 (n = 2, 4, 6...)

Single Axis Electric Actuator Series LJ1H

8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting

KJ

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

VZ3000

(W) [Current mA] DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Note) Inrush Apparent power (VA) [Current mA] AC 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200 VAC: 17.5/50 Hz, 15/60 Hz Refer to pages 3-3-24 to 3-3-27 for manifold use.

C95Series

Part S humber ore size (mm) .B fA TL TU Te TX TE TO TFl OTT TS TH TF 'z TD~HO MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 a9 12j.o10 MB-S04 40 52 80 60 10 60 63 97 17 9 17 12 45 60 93 16 "'0 .010 50 65 60 60 10 92 75 \09 17 9 17 12 45 60 105 16 _g om Mounting plate (Double clevis) MB-S06 63 75 100 70 15 110 90 130 20 11 22 14 60 BO 105 20 ...0 a64 .20 ~,084 80 95 100 70 \5 \30 110 150

CV/MVGQ

CV Standard Stroke MVGQ Bore size (mm) Standard stroke CC 10 15, 30, 45, 60 16 15, 30, 45, 60 RB Made to Order Specifications (For details, refer to page 10-21-1.)

Secondary Batteries

, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50,7 5, 100, 125, 150 *90and 91-series MXQ6 products do not have shock absorbers.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

9 8 8 7 9 8 8 7 7 10 9 8 8 7 10 9 8 8 7 10 9 8 8 7 10 9 8 8 7 10 9 8 8 7 Without shims 600.05 With shims 60 Without shims 600.05 With shims 60 Without shims 600.05 With shims 60 Without shims 900.05 With shims 90 Without shims 900.05 With shims 90 Without shims 900.05 With shims 90 Without shims 600.05 With shims 60 Without shims 600.05 With shims 60 Without shims 600.05 With shims 60 Without

CQM

-35 -40 -45 -50 CDQMB32-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 40 45 50 55 60 65 70 75 80 85 110 135 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 M3 x 30 x 35 x 40 x 45 x 50 x 55 M3 x 30 x 35 x 40 x 45 x 50 x 55 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75

53

Facility water temperature 32C 12 Cooling capacity [kW] 10 8 Facility water temperature 40C 6 4 2 0 5 10 15 20 25 30 35 40 Circulating fluid temperature [C] Pump Capacity HRSH090--20/400.6 60 Circulating fluid pressure [MPa] 0.5 50 Outlet Pump head [m] 0.4 40 0.3 Usable flow rate range 30 0.2 20 Return port 0.1 10 0 0 20 10 40 30 50 60 70 Circulating fluid flow rate [L/min] 0 140 Thermo-chiller

PFxx-OMA1007

74.7 EXA1-40 240.4 51 64.4 4.6 71 35.5 75.6 -145No.PF-OMA1007-B EXA1-60-SA-# Refer to separate operation manuals for other AMS components. -146No.PF-OMA1007-B Accessories Seal cap (10 pcs.)

Rotary Table/

B B When D-F8 is used Size: 10 to 200 B A Reed switch Solid state switch Size 10 20 30 50 70 100 200 Rotation A B Actuation range A B Rotation range m Actuation range Rotation range m 36 50 66 68 78 91 115 10 190 90 10 90 40 54 60 72 82 95 19 21 27 31 37 41 48 61 17 23 27 33 37 44 57 190 80 10 80 10 10 65 10 190 65 10 10 50 190 50 10 190 45 10 45 Operating range at proper mounting position