EXxx-OMY0006CN

SW3 SW3 CM()SM() Table 10-29 SW3 Bit 1 Bit 2 OFF OFF SM (Safety mode) ON OFF OFF ON ON ON CM (Commissioning mode) SW3 DIP SMGSDML(Step7/TIA)/FDCML(PCWorx)Safe digital I/O (SM)CMSafe digital I/O (CM) 8.1.1 GSD CM1byte CM CM Table10-30, 10-31, 10-32 SM CM IO Table 10-30 COMNG_MODE I/O Byte 0 CN0-3 Zone M,Zone1-3 Byte 0 of COMNG_MODE Table 10-31 COMNG_MODE Bit 0 0 Zone M

AR Series Modular Type Regulator

AW-A Optional specifications Model AR10-A AR20-A AR25-A AR30-A AR40-A AR40-06-A Bracket assembly Note 1) AR12P-270AS AR22P-270AS AR27P-270AS AR32P-270AS AR42P-270AS AR42P-270AS Set nut AR12P-260S AR22P-260S AR22P-260S AR32P-260S AR42P-260S AR42P-260S AC-B AF-A Note 2) Round type Standard G27-10-R1 G36-10-l01 G46-10-l01 0.02 to 0.2 MPa setting G27-10-R1 Note 3) G36-4-l01 G46-4-l01 Pressure

PFxx-OMO0004CN

(1 ) PFMB7--HDC(+) OUT1 OUT2 (PFMB7--B-) -24No.PF-OMO0004CN-E [] 3 OFF, [] 2 [3 ] [] (57 ) (26 ) (28 ) 30() 3 -25No.PF-OMO0004CN-E OU1OUT2 {3 ] [3 ] 3 [P_1]ON [H_1]OFF [L/min] ON OFF PFMB7201 [P_1] OUT1 100 L/min [H_1] OUT1 10 L/min 100 L/min [P_2] OUT2 10 L/min [H_2] OUT2 OUT1OUT2 [F 1]OUT1(31)[F 2]OUT2(39) -26No.PF-OMO0004CN-E <> 1 [P_1][n_1] [] OUT1OUT2[P_2][n_2] [F 1]OUT1

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(For details, refer to catalog on page 22.) 17 Series SYJ500 Construction c f a e b d c f a e b d N.C. N.O.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

mm/s Piston speed mm/s Piston speed mm/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Nm Moment Nm Moment Nm 4 4 4 CX CY1F15 3 3 3 DCY1F10 2 2 2 -X CY1F15 CY1F15 20CY1F10 CY1F10 1 1 1 Data 0.5 0.5 0.5 500 100 300 50 500 100 300 50 500 100 300 50 Piston speed mm/s Piston speed mm/s Piston speed mm/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass

VEX1

Model VEX55 04 06 10 Description VEX5710 12 VEX5914 20 Bracket (With bolt and washer) G46-10-01 VEX7-32A VEX5-32A VEX9-32A Pressure gauge 5.1-27 How to Order How to Order Pilot valve 1 06 2 E Z 5 1 B VEX5 SF4 20 B Bracket Option Electrical entry Economy valve Coil rated voltage G Pressure gauge (Ex.)

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

2 Port for Oil Dimensions (mm) (N.C.) 1in = 25.4mm Grommet: G Conduit: C Approx. 300 V D Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port

Low Differential Pressure Sensor

DC() IN (1 to 5 V) Analog output or auto shift input Gray 2 DC(-) Blue 1 20 2 m 20 With bracket A 30 20 46 4.2 10 15 40 31.5 26.5 1.6 7.2 22 35 41 A View ZS-28-B Bracket With panel mount adapter With panel mount adapter + Front protective cover 42.4 34.5 24 7 34.5 24 11 Panel thickness 0.5 to 6 ZS-27-D Panel mount adapter + Front protective cover 8.75 ZS-27-C Panel mount adapter 6 Series

Digital Flow Switches Series PF2A

Note 6) This product conforms to the CE mark. 4 Series PF2A Flow Characteristics (Pressure Loss) PF2A710, 510 PF2A750, 550 PF2A711, 511 3.0 1.0 10 2.5 0.8 8 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 2.0 6 0.6 1.5 0.4 4 1.0 0.2 2 0.5 5 2.5 7.5 0 100 10 25 50 75 0 5 10 15 20 25 30 40 35 45 50 0 1 10 Flow rate (l/min) Flow rate (l/min) Flow rate (l/min) PF2A751, 551 PF2A721

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without

Compact and Lightweight

B All Ports: One-touch Fitting Model D1 D2 D3 d1 d2 d3 M1 M2 M3 L1 L21 L3 L4 A B C E F G1 J1 K1 N1 P1 Q1 ZH05DA-06-06-06 10.4 10.4 10.4 6 6 6 13.3 13.3 13.3 51.8 34.9 19.4 18.4 11 14 6 3.2 5.5 20 17 4.2 3.2 28 9.6 ZH07DA-06-06-06 55 ZH10DA-06-06-08 13.2 8 14.2 61.7 ZH13DA-08-10-10 13.2 15.9 15.9 8 10 10 14.2 15.6 15.6 71.8 43.9 22.4 24.4 17 20 9 4.3 7.8 27 22 4.2 35 12 ZH15DA-08-10-10 83.6

RB/RBL/RBQ

type Series RBQC With bumper RHC MK(2) (mm) RS Q G Model Basic type With bumper Shock absorber h Hexagon nut G LL S B E 6 10 12 16 18 D M16 x 1.5 M20 x 1.5 M25 x 1.5 M30 x 1.5 M32 x 1.5 H 3.5 4 4 5 5 F C 22 27 32 41 41 MM K 4 7 8 8.5 13 RBQC1604 RBQC2007 RBQC2508 RBQC3009 RBQC3213 RBQ1604 RBQ2007 RBQ2508 RBQ3009 RBQ3213 14.2 18.2 23.2 28.2 30.2 14 18 23 28 30 7 9 10 12 13 31 44.5 52 61.5

Electric Actuators

to 30 5 phase 242 to 30 294 2 phase 228 to 80 5 phase 244 to 80 2 phase 284 230 to 100 LXSH5SB LXSH2SB LXSH5SA LXSH2SA LXSH5BC LXSH2BC LXSH5BD LXSH2BD LXSH5SB-B LXSH2SB-B LXSH5SA-B LXSH2SA-B LXSH5BC-B LXSH2BC-B LXSH5BD-B LXSH2BD-B 5 phase 272 to 200 2 phase 256 to 200 286 5 phase 270 to 100 2 phase 254 to 100 266 5 phase to 30 250 2 phase to 30 294 268 5 phase to 80 252 2 phase

PSxx-OMM0002CN

/4 n_1=B+(A-B)/4 A= H_1= (A-B)/2 H_1= (A-B)/2 B= OUT2P_1n_1H_1P_2n_2H_2 -33No.PS-OMM0002CN-F [F 9] 30 () <> [F 9] [Eco] [F9] 30 (ON ) ON -34No.PS-OMM0002CN-F [F10] <> [F10] [Pin] [F10] 000 40 -35No.PS-OMM0002CN-F [F98] <> [F98] [ALL] [on] 1 [oFF] [oFF] 2 [F98] 1 37 -36No.PS-OMM0002CN-F 1 2 OUT1 3 OUT1 4 OUT1 5 OUT1 6 7 OUT2 8 OUT2 -N-P 9 OUT2 10 OUT2

Process Pump

Class Symbol PAF341S 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 PAF541S PAF341S PAF541S tubing size (mm) tubing size (inch ) SMC SMC SMC 4 4 5 5 6 6 1 2 1 2 1 2 4 4 5 5 6 6 A B A B A B 1/2" x 3/8" 3/8" x 1/4" Panel mount union U P 3/4" x 5/8" Union 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC Note) Select the fitting after confirming the IN / OUT side fitting size and fitting type.

AC Servo Motor Driver (CC-Link Type)

Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

CEx-OMQ0011

P1 No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 59 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

AC Servo Motor Driver (MECHATROLINK-II type)

30 20 10 Parameter *1,*2 Para.

CEx-OMG0106

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60