3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted

0 Steel wire NBR Steel wire NBR XT010-20 XT010-21 XT041-1 4-16-6 Series VS3135/3145 Dimensions VS3135/3145 V100 SY SYJ VK VZ VT 3-Port size VP 4-Q Mounting hole 3-Q Mounting hole VG VP S070 VQ VS3135 VKF VQZ VZ Q Terminal dimensions Port size Rc VS A Model B C D E F G H J K L M N P R S T U VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 VFN 1 4, 3 8, 1 2 64 64 65 70 1 136 35 9 64 54 19

Time Delay Valve

Dimensions 4 EXH port 1/8 Input signal port( PIL ) R port Supply pressure exhaust port 2 x 1/8 Output port 2( A ) Supply port on the other side 1( P ) 2 x M6 x 1 thread depth 8 (Panel mounting screw) Panel mounted Bracket mounted 2 x 6.5 hole (Mounting screw M6 x 1 x 12) Handle side 4 x M6 screw 4 x 7 hole on the bracket side Bracket plate thickness t = 2 Panel plate thickness t = 3 or less

AMPSeries

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

Exhaust Cleaner for Clean Rooms AMP Series

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

VER2000/4000

VS7-8-FG-D-3M 1 pc. (Third station of manifold where 1 piece of VS7-8-FG-D-3M is added to the basic unit of VER2000-A and VS7-8-FG-S-3N.) Dimensions IC PVQ VEF VEP DXT334-X72-04R-04U VER Mounting section (For M8) L side VEA VY2 VBA VBAT U side D side AP100 1 2 2 x Rc Exhaust port R side Rc 1/2 supply port (L side) 2 x Rc 1/2, Output port 709

3/5 Port Solenoid Valve

Mounting Warning 1. Operation Manual (this document) In the case of diodes, the residual voltage is approximately 1 V. 4.

Wedge Cam Operation Slide Guide Series MHK2 Air Gripper/2-Finger Type ø12, ø16, ø20, ø25

6 q r !1 !0 !2 Normally closed Closed condition !4 !3 Component Parts Material Note Description Material Note No. No.

CC

1 1 G High cylinder operation speed.

ZPT/ZPX

EPR 40 50 63 80 100 125 40 161 1 0 +1 +10 39 160 2 0 +1 +19 89 158 3 0 +2 +37 56 156 6 0 +2 +61 55 396 12 1 +4 +121 155 347 22 3 +7 +228 121 345 120 580 118 531 116 529 How to Order A14 HB N 40 ZPX Vacuum entry/Mounting thread diameter Pad diameter (mm) 40 40 40, 50 63, 80 100, 125 50 50 A14 M14 x 1 63 63 A16 M16 x 1.5 80 80 B8 M 8 x 1.25 100 100 B10 M10 x 1.5 125 125 B12 M12

VFN2000N

Hole Pilot EXH. 110.6 18.2 22.2 22.2 3-1/4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Pilot EXH. 2 x 6 M.T.G. Hole 3 1 5 22.2 22.2 3-1/4 111.5 3 1 5 15.7 2 4 40.3 2 4 JIS Symbol JIS Symbol 2 4 2 4 3 1 5 5 1 3 Cylinder ports are NAMUR hole pattern.

Base Mounted How to Order Manifold VQC1000 Series Plug-in Unit

VQ 4/5 IP67 compliant SD60 SD6Q SD6N SD6V SD6F SD6ZE SD6EA SD6D Without SI unit DeviceNet PROFIBUS DP CC-Link PROFINET EtherNet/IP (1 port) EtherNet/IP (2 port) EtherCAT Note 2) SI unit: EX500 1 to 4 stations (8) SDTC VQC 1/2 VQC 1/2 SD0 Without SI unit 32 outputs Note 1) 1 to 12 stations (24) EX500 Gateway Decentralized System 2 (128 points) EtherNet/IP 1 to 12 stations (24) Note 2) SDA3

SI unit for EtherNet/IP TM

Status Condition 0 No supply voltage SP Status of solenoid power supply 1 Supply voltage OK 0 Short circuit DI Status of sensor power supply 1 Normal Output area mapping Output data MSB LSB MSB LSB Offset (word) 15 8 7 0 0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 1 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 -28No.EX-OMK0004-B Output No. assignment Combinations of output data and valve

VFR6000 Series

Piping Lubrication 1. Lubrication 1.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

guide assembly Guide rod Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy #3 #4 #5 #6 #7 #8 #9 $0 $1 $2 $3 $4 $5 q w e r t y u i o !

VND

-25A VND50D-32A VND50D-32F VND60D-40A VND60D-40F VND70D-50A VND70D-50F 1 8 1 4 26 28 31 120 130 240 380 7 0.3 3 8 15 0.6 1 2 3 4 20 0.9 1.4 2.3 5.5 3.6 7.2 5.7 10.8 25 1 VC 1 4 1 440 32 32 1 2 1 VDW 920 40 40 2 VQ 1500 50 50 Note) The companion flange is JIS B 2210 10K (standard) or its equivalent.

Information

8 words/8 words) Up to 42 (when 1 station is occupied by 1 driver), Up to 32 (when 2 stations are occupied by 1 driver), when there are only remote device stations.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

guide assembly Guide rod Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy #3 #4 #5 #6 #7 #8 #9 $0 $1 $2 $3 $4 $5 q w e r t y u i o !

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

guide assembly Guide rod Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy #3 #4 #5 #6 #7 #8 #9 $0 $1 $2 $3 $4 $5 q w e r t y u i o !

Compact Slide Series MXH

0 @0 @0 y @1 !6 w q !9 t !8 !0 i !1 r !4 @2 u o !3 @4 e !5 !1 r u @2 @3 !3 @4 e !2 MXH16/20 (16, 20) @0 y @1 !7 w q!9 t !8 i !0 !1 r u @2 @3 !3 @4 e !2 Component Parts Component Parts Description Material Note Note Description Material No.

AR425 to 935

VY1 How to Order G PPA Internal pilot operated relieving type regulator AR 25 4 BG R 02 Option Nil Flow direction: Right Left AL None Regulator R Body size Accessory 4 6 8 9 1 2 1 Symbol Description Applicable model Port size 1 Nil 1 4 02 03 04 06 10 12 14 20 2 1 With bracket AR45 to 65 AR25 AR35 B 8 3 2 G46-10-02 G46-2-02 Gauge 1 2 3 4 G Regulating pressure range Pressure gauges are shipped