SMC Corporation of America
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assembly DIN rail VZ5000-51A-1U e VFN For D side, set with w VZ5000-52A-2D r VZ5000-52A-1U For U side End block assembly t VZ5000-52A-1D For D side End block assembly y VZ5000-52A-2U End block assembly For U side, set with e u VZ5000-51A-1M Without D-sub connector, For indicated location P/R port with One-touch fitting for 10 SUP/EXH block assembly i To add a manifold block assembly, add

VQ7 C4 C6 VZ3000-50A-1Manifold block assembly q (a) Bolt (Both sides) EVS For D side, With D-sub connector and P/R port with One-touch fitting for 8 SUP/EXH block assembly VZ3000-51A-1D w D side For U side, With D-sub connector and P/R port with One-touch fitting for 8 For D side, set with w VFN SUP/EXH block assembly VZ3000-51A-1U e DIN rail End block assembly VZ3000-52A-2D r VZ3000-52A-

(C) IDF 1D 30 35 40 50 25 IDF 2D to 240D 30 35 40 45 50 Outlet air press. dew point (C) Ambient temp.

type) VQZ 163 (Plug-in type) 115.5 (Plug lead type) 12.5 25 VQD 73 A SUP stop valve spacer is mounted on a manifold block, making it possible to individually shut off supply air to each valve. 1 (P) P U S H 4(A) 26.4 LOCK FREE 2(B) Rc 3/8 5(R1) 3(R2) Circuit diagram Plug-in type Plug lead type Release valve spacer: For D side mounting 149 (Plug-in type) 101.5 (Plug lead type) VVQ4000-24A-1D

assembly DIN rail VZ5000-51A-1U e VFN For D side, set with w VZ5000-52A-2D r VZ5000-52A-1U For U side End block assembly t VZ5000-52A-1D For D side End block assembly y VZ5000-52A-2U End block assembly For U side, set with e u VZ5000-51A-1M Without D-sub connector, For indicated location P/R port with One-touch fitting for 10 SUP/EXH block assembly i To add a manifold block assembly, add

VQ7 C4 C6 VZ3000-50A-1Manifold block assembly q (a) Bolt (Both sides) EVS For D side, With D-sub connector and P/R port with One-touch fitting for 8 SUP/EXH block assembly VZ3000-51A-1D w D side For U side, With D-sub connector and P/R port with One-touch fitting for 8 For D side, set with w VFN SUP/EXH block assembly VZ3000-51A-1U e DIN rail End block assembly VZ3000-52A-2D r VZ3000-52A-

LOCK FREE 2(B) 5(R1) 3(R2) Circuit diagram Plug-in type Plug lead type Release valve spacer: For D side mounting 179 (Plug-in type) 133 (Plug lead type) VVQ5000-24A-1D (Plug-in type) VVQ5000-24A-5D (Plug lead type) 16 32 A VQ51 (single) valve can be used as an air release valve by combining it with a release valve spacer.

) WWw(n+1D) Unit No.9 RWr(n+1E) WWw(n+1E) Channel diagnosis RWr(n+1F) WWw(n+1F) n: Start address -44No.EX-OMW1003-A Word area (2) Input register Slave -> Master Output register Master -> Slave Corresponding Unit No.

LOCK FREE 2(B) 5(R1) 3(R2) Circuit diagram Plug-in type Plug lead type Release valve spacer: For D side mounting 179 (Plug-in type) 133 (Plug lead type) VVQ5000-24A-1D (Plug-in type) VVQ5000-24A-5D (Plug lead type) 16 32 A VQ51 (single) valve can be used as an air release valve by combining it with a release valve spacer.

(Manifold base) (2 position single) (2 position double) (Blanking plate) VV5FS1-20-061-01 VFS1120-1D-01 VFS1220-1D-01 VVFS1000-10A-1 1 3 2 1 3-8-14 15 5 Port Pilot Operated Solenoid Valve Metal Seal, Body Ported Series VFS1000 Pilot individual exhaust: VV5FS1-201-01 Type 20 Manifold Station Grommet: G P = 24 Manual override VK VZ U side D side VF VFR Blanking plate 4-5.2 mounting

PB49]4(_ _ _ 1) _ _ x x 5.4 00h _ x _ _ 0:-40dB 1:-14dB 2:-8dB 3:-4dB 0h x _ _ _ 0h 5.4 [Hz] [Hz] 00 10 562 01 11 529 02 4500 12 500 03 3000 13 473 04 2250 14 450 05 1800 15 428 06 1500 16 409 07 1285 17 391 08 1125 18 375 09 1000 19 360 0A 900 1A 346 0B 818 1B 333 0C 750 1C 321 0D 692 1D 310 0E 642 1E 300 0F 600 1F 290 PB18 LPF 3141 100 [rad/s] 18000 [Pr. PB23] [Pr.

spacer VVQ5000-P-1Individual EXH spacer VVQ5000-R-1EXH blocking plate VVQ5000-16A-2 03 04 03 04 Throttle valve spacer VVQ5000-20A-1 SUP stop valve spacer VVQ5000-37A-1 SUP blocking plate VVQ5000-16A-1 Double check spacer with residual pressure release valve VVQ5000-25A-1 PUSH LOCK Direct exhaust with silencer box [-S ] For exhaust cleaner mounting [-C ] Release valve spacer VVQ5000-24A-1D

Blanking plate assembly VVQ4000-10A-1 Individual SUP spacer VVQ4000-P-1Individual EXH spacer VVQ4000-R-102 03 02 03 Throttle valve spacer VVQ4000-20A-1 SUP stop valve spacer VVQ4000-37A-1 SUP/EXH block plate VVQ4000-16A Interface regulator ARBQ4000-00-1 A B P < EXH blocking plate > < SUP blocking plate > For exhaust cleaner mounting [-C ](1) Release valve spacer VVQ4000-24A-1D (1, 2) Double

P U S H 4(A) 26.4 FREE LOCK 1(P) 2(B) VQZ SQ VFS 3(R2) 5(R1) Circuit diagram VFR Plug-in type Plug lead type VQ7 Release valve spacer: For D side mounting VVQ4000-24A-1D (Plug-in type) VVQ4000-24A-5D (Plug lead type) 149 (Plug-in type) 101.5 (Plug lead type) 59 Combination of VQ41ll (Single) and release valve spacer can be used as air release valve.

spacer VVQ5000-P-1Individual EXH spacer VVQ5000-R-1EXH blocking plate VVQ5000-16A-2 03 04 03 04 Throttle valve spacer VVQ5000-20A-1 SUP stop valve spacer VVQ5000-37A-1 SUP blocking plate VVQ5000-16A-1 Double check spacer with residual pressure release valve VVQ5000-25A-1 PUSH LOCK Direct exhaust with silencer box [-S ] For exhaust cleaner mounting [-C ] Release valve spacer VVQ5000-24A-1D

special thread) Electrical option Bracket interchangeable with old type (Shipped together) 1, 4 1 2, 3 Symbol Low concentration ozone resistant, Deionized water (Seal material: FKM) Electrical option (Special voltage) Special thread Oil-free VDW XD Nil A B C Z D E F G H J K L M N P (Standard) G1/8 NPT1/8 M6 Specification Special voltage Symbol Electrical entry Voltage 1A 1B 1C 1U 1D

(Manifold base) (2 position single) (2 position double) (Blanking plate) VV5FS1-20-061-01 VFS1120-1D-01 VFS1220-1D-01 VVFS1000-10A-1 1 3 2 1 The asterisk denotes the symbol for assembly.

location, P/R port with One-touch fitting for 6 VZ1000-3A-1D r VZ1000-3A-1U t SUP/EXH block assembly VZ1000-2A-1M y Note) Block pin (2 pcs.) is attached for q, e, t, y.

Other option Electrical option (Low concentration ozone resistant and applicable to deionized water/Oil-free/Port thread) Electrical options (Special voltage, with light) Specification Symbol Electrical entry Voltage Low concentration ozone resistant and applicable Symbol to deionized water (Seal material: FKM) Port thread Oil-free 1A 1B 1C 1U 1D 48 VAC Grommet 220 VAC 240 VAC A B C D E F

Data / System Diag. 60A0:01 Under lower limit value Diag. 60A0:1D SI unit -69No.EX-OMO0027-A Module Output Data (Device specific object) Table.