Stations: 01 Station, Port Size: w/ø1/4" One-touch Fitting, SI Unit: EtherCAT, End Plate: 2 [Power Supply w/M12 Connector (Max. supplied Current 2 A)], SI Unit Common: + COM (or None in the Case of w/o SI Unit), I/O Unit Stations: None, Option 1: w/o DIN Rail, w/Bracket, DIN Rail Length: None, Option 2: w/Name Plate

Function: 1 (Normally Closed), Piping: 4 (Base Mounted), Body Option: Individual EXH, Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: WO (M8 Connector - Without Connector Cable), Surge Suppressor: U (Surge Suppressor w/Light Non-polar), Manual Override: Non-locking Push Style, Port Size: 01 (Base Mounted w/Sub-plate 1/8), Thread: N (NPT), Bracket: None, CE-Compliant: Q (CE-Compliant

Body Size: 2 (1/8, 1/4), Type: 2 (Elbow), Control Type: 0 (Meter-out), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: 01 (1/8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 04 (ø4), Sealant: without Sealant, Push lock: A (Push-lock)

EXxx-OMU0020CN

Valve diagnostics 1 . 5-4 Valve diagnostics 1 Bit 0 Valve 0, 1 diagnostics 01() 1 Valve 2, 3 diagnostics 01() 2 Valve 4, 5 diagnostics 01() 3 Valve 6, 7 diagnostics 01() 4 Valve 8, 9 diagnostics 01() 5 Valve 10, 11 diagnostics 01() 6 Valve 12, 13 diagnostics 01() 7 Valve 14, 15 diagnostics 01() 5.1.1.4.

PSxx-OMG0005CN

2030 10 1% * -7No.PS-OMG0005CN-E 0 01 28 C2 PSE56 0 (01MPa) (1) C2 1 (0-101kPa) 3 (-100100kPa) *PSE200 4 (0500KPa) (15V) 01 R1/8(M5) 28 (420mA) 02 R1/4(M5) C01 Rc1/8 N01 NPT1/8(M5) N02 NPT1/4(M5) A2 URJ1/4 B2 TSJ1/4 ZS-28-C 1 Rc1/4 ZS-31-X175 1 NPT1/4 ZS-31-X186 1 Rc1/8 ZS-31-X188 1 NPT1/8 ZS-31-X189 1 15[V]F.S.=514[V] (1F.S.40.010.04[V]) F.S. ( 25[]ON-OFF (1K 1M A/D 5V A/D

AS-FG

Note1) Metric size Inch size 02 2 23 3.2 Note 2) 01 1/8" 03 5/32" 07 1/4" 04 4 06 6 Note 1) For selecting applicable tubing O.D., refer to the Model on page 667. The color of the release button is white (metric, inch). Note 2) Use 1/8" tube.

Size: 20, Backflow Function: K (Backflow Function), Thread: Rc, Port Size: 01 (1/8), Accessory: None, Specifications: 3 (0.008 to 0.6 MPa Setting)

Size: 20, Backflow Function: None, Thread: Rc, Port Size: 01 (1/8), Accessory: BE (B+E), Specifications: 1 (0.005 to 0.2 MPa Setting)

Size: 20, Backflow Function: None, Thread: Rc, Port Size: 01 (1/8), Accessory: EH (E+H), Specifications: 3 (0.008 to 0.6 MPa Setting)

Size: 20, Backflow Function: K (Backflow Function), Thread: Rc, Port Size: 01 (1/8), Accessory: E (Square Embedded Pressure Gauge w/Limit Indicator)

Size: 20, Backflow Function: None, Thread: Rc, Port Size: 01 (1/8), Accessory: H (Set Nut for Panel Mount), Specifications: 3Y (3+Y)

Size: 20, Backflow Function: None, Thread: Rc, Port Size: 01 (1/8), Accessory: BE (B+E), Specifications: 3 (0.008 to 0.6 MPa Setting)

Size: 20, Backflow Function: K (Backflow Function), Thread: F (G), Port Size: 01 (1/8), Accessory: BE (B+E), Specifications: 1R (1 + R)

Size: 20, Backflow Function: K (Backflow Function), Thread: F (G), Port Size: 01 (1/8), Accessory: B (Bracket), Specifications: Y (Upward Facing Knob)

Size: 20, Backflow Function: K (Backflow Function), Thread: Rc, Port Size: 01 (1/8), Accessory: None, Specifications: 1 (0.005 to 0.2 MPa Setting)

Size: 20, Backflow Function: None, Thread: Rc, Port Size: 01 (1/8), Accessory: BE (B+E), Specifications: 3 (0.008 to 0.6 MPa Setting)

Size: 20, Backflow Function: None, Thread: Rc, Port Size: 01 (1/8), Accessory: BE (B+E), Specifications: 1 (0.005 to 0.2 MPa Setting)

Size: 20, Backflow Function: K (Backflow Function), Thread: Rc, Port Size: 01 (1/8), Accessory: EH (E+H), Specifications: Y (Upward Facing Knob)

Size: 20, Backflow Function: None, Thread: Rc, Port Size: 01 (1/8), Accessory: BE4 (B+E4), Specifications: 3 (0.008 to 0.6 MPa Setting)

Size: 20, Backflow Function: K (Backflow Function), Thread: Rc, Port Size: 01 (1/8), Accessory: E4 (PNP Output, Electrical Entry: Wiring Top Entry)