IR20-OM00008

EXH 7. 1 4 -11- -12- Revision history A Sectional view filter deletion of P.5 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved

Precision Regulator

Leakage due to deterioration of rubber parts Consult SMC. 9 -13- -14- Revision history A Thread type deletion B Format change and content review C Sectional view filter deletion of P.5 D Name plate layout change E Content review 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change

VBA-OM-S001

VBA2: Tightening torque: 24 Nm (M10) VBA1: Mounting holes (Inside) (1) (4) (1) (4) URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3 5207 8249 Fax: +81 3 5298 5362 Specifications are subject to change without prior notice and any obligation the part of the manufacturer. (3) (2) (3) (2) Mounting base VBA1 VBA2 VBAT05A1VBAT10A12008

VBA-OM-P018

R1/4) VBA2 22~24Nm(R3/8) OUT O Rc1/4 O A B C D E F G H I J K L M O VBAT05A1 VBA10A VBA11A 150 374 370 307 163 160 100 200 Rc3/8 257 60 Rc1/4 20 VBA10A VBA11A 391 328 VBAT10A1 VBA20A VBA22A 170 522 454 417 367 170 180 120 312 Rc1/2 278 130 VBAT10A1-VBA2 IN OUT Rc3/8 39 VBA1 IN OUT IN IN OUT OUT VBAT10A 1 VBA2 VBA1 3NmM5 VBA1 VBA2 24NmM10 4-14-1 , Sotokanda, Chiyoda-ku, Tokyo 101

VBA-OM-S002

URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021,JAPAN Phone: +81 3 5207 8249 Fax: +81 3 5298 5362 Specifications are subject to change without prior notice and any obligation the part of the manufacturer. 2008 SMC Corporation All Rights Reserved 216 700 520 477 429.8 180 200 100 400 Rc1/2 Rc1/2 85 305 236 252 873 570 527 479.8 205 250 150 500 Rc1

VBA-OM-P019

VBA4 28~30Nm(R1/2) OUT O Rc1/4 O A B C D E F G H I J K L M O VBA20A VBA22A 481 444 394 Rc3/8 59 VBAT20A1 VBAT20A1 216 700 520 477 429.8 180 200 100 400 Rc1/2 305 236 Rc1/2 85 VBA42A VBA20A VBA22A 531 494 444 Rc3/8 59 IN OUT VBAT38A1 VBAT20A1 252 873 570 527 479.8 205 250 150 500 Rc3/4 355 250 Rc1/2 85 VBA42A IN IN OUT OUT VBA2,4 24NmM10 1 VBA4 4-14-1 , Sotokanda, Chiyoda-ku, Tokyo 101

VBA-OM-S008

VBA11A 150 337 370 307 163 160 100 200 Rc 3/8 257 60 278 130 regulator A B C D E F G H I J K L M URL http://www.smcworld.com Rc 1/4 20 Rc 1/2 39 IN port Rc3/8 Rc 3/8 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3 5207 8249 Fax: +81 3 5298 5362 170 180 120 312 2008 SMC Corporation All Rights Reserved Assembly dimensions OUT port (J) Maintenance 411 IN port (I) Akihabara

VBA-OM-S006

TSG R0003-2007 1.5MPa SUS304 0~75 oC 1/4 IN 3/8 O VBA1 1 SMC VBAT-V1 1 VBA11A 150 337 370 307 163 160 100 200 Rc3/8 257 60 A B C D E F G H I J K L M 278 130 39 Rc1/4 20 IN Rc3/8 Rc1/2 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer Rc3/8 OUT (J) 170 180 120 312 411 IN (I) 4-14-1 , Sotokanda, Chiyoda-ku, Tokyo 101

VBA-OM-S009

URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021,JAPAN Phone: +81 3 5207 8249 Fax: +81 3 5298 5362 Specifications are subject to change without prior notice and any obligation the part of the manufacturer. 2008 SMC Corporation All Rights Reserved 206 674 520 477 429.8 180 200 100 400 Rc1/2 Rc1/2 85 305 236 256 824 570 527 479.8 205 250 150 500 Rc1

VBA-OM-S007

2007 VBA2/VBA4 1.0MPa SUS304 0~75 oC 1/4 IN 1/2 1 SMC VBAT-V1 1 305 236 355 250 A B C D E F G H I J K L M 444 394 Rc3/8 59 494 444 Rc3/8 59 85 85 IN Rc1/2 Rc1/2 Rc3/4 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer Rc1/2 Rc1/2 180 200 100 400 205 250 150 500 Rc3/4 413 OUT (J) 4-14-1 , Sotokanda, Chiyoda-ku, Tokyo 101

Low Torque Metal Seal Type Rotary Joint Low Torque Metal Seal Type Rotary Joint Low Torque Metal Seal Type Rotary Joint Low Torque Metal Seal Type Rotary Joint MQR MQR MQR MQR Series Series Series Series

Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved

S Couplers

KKA3S-P01 KKA4S-P01 KKA6S-P01 Plug O-ring KKA7S-P01 KKA8S-P01 KKA9S-P01 14 Revision history A Safety Instructions added Selection: Warning No. 9 added Handling: Warning No.6 added B Mounting: Warning No.3 changed Changed notation of tightening method Handling: Warning No.5/8/9 added C -Fluid: N2 add 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298

KFx-OM00002

However, there does not exist stainless steel with absolute corrosion resistance; therefore, many types of stainless steel have been developed for improved corrosion resistance performance. 9 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior

KFx-OMY0077

However, there does not exist stainless steel with absolute corrosion resistance; therefore, many types of stainless steel have been developed for improved corrosion resistance performance. 9 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior

KFx-OMY0034

However, there does not exist stainless steel with absolute corrosion resistance; therefore, many types of stainless steel have been developed for improved corrosion resistance performance. 12 - Revision history A: Cleaning added 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com NOTE: Specifications are subject to change

DOC1019547

Description Material Note 1 Body A PBT 2 Body B PBT 3 Needle PBT 4 Indicator 5 Stopper Stainless-steel 6 Needle guide Brass Electroless nickel Plated 7 Disk seal HNBR 8 Stud Brass Electroless nickel Plated 9 O-ring NBR 10 O-ring NBR 11 O-ring NBR 12 O-ring 13 Seal NBR 14 Seal NBR 15 O-ring NBR Meter-in type only 13 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel

DOC1013369

Correction of errors 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

SPEED CONTROLLER STANDARD TYPE ELBOW TYPE (METAL BODY)

Specifications 5.Troubleshooting 7 - 6 Construction AS1400-M3 8 - S Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

DOC1001947

steel 3 Needle Stainless steel 4 Knob Stainless steel 5 Lock nut Stainless steel 6 C-ring Stainless steel 7 Seat ring Aluminum alloy 8 U-seal FKM 9 O-ring FKM 10 O-ring FKM 11 Seal FKM 12 Cassette Stainless steel 13 Gasket Stainless steel/FKM M5 type 14 Seal FKM G thread type 10 - Revision history A version: Size 1/4, 3/8 and 1/2 are added to the table. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

ASx-OMZ0085

Construction ASB Series 12 - ASB-D Series 13 - ASB-BD Series 14 - ASB-*H Series 15 - S Revision history A : Added the construction of ASB-BD series Corrected the component contents of ASB-D series B : Added the ASB-*H series 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change