Compact Guide Cylinder

H 12 42 29 7 6 80 89 18 25 4.5 5 26 58 16 46 33 7 6 88 98 22 32 5.5 5 30 64 20 53 37 8 8 102 112 24 38 5.5 6 36 83 25 53.5 37.5 9 7 114 126 30 40 6.6 6 42 93 32 59.5 37.5 10 12 138 154 34 50 9 9 48 112 40 66 44 10 12 146 162 40 60 9 9 54 120 50 72 44 12 16 178 198 46 65 11 10 64 148 63 77 49 12 16 192 212 58 75 11 10 78 162 80 96.5 56.5 16 24 238 262 54 90 13.5 16 91.5 202 100 116 66 19 31

10

mounting hole) 2 4 3 34 1 Dimensions of auto switch mounting groove (Enlarged view) 4 x M4 x 0.7 thread depth 8 (Mounting thread) +0.025 3H9 0 depth 3 +0.043 18H9 0 depth 1.5 4 M5 x 0.8 (Finger opening port) 4 x M5 x 0.8 (Piston rod and rack screw) Auto switch mounting groove (4 locations)1 M5 x 0.8 (Finger closing port) H 44 18.2 5.5 0.5 9 12.5 8 7 6 18 Width across flats 8 (4 locations) 15 31

SL5200

Vespel is a registered trademark of DuPont. 31 Regulator Pressure Gauges Guide For AP/SL/AZ series (Installed before shipment 1) / Order separately) Model Specifications Installation unit gauge port Pressurerange Unit Regulator Code 2) Part number 3) Lower mount Select compatible materials of construction for the gas Gas -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30

Copper-free Actuators

Dual rod cylinder Series CXS CXSM Standard 3.7-1 SCXSl Standard CXSL Slide unit double rod style Series CX2 Refer to the catalog sheet With adjusting bolt CX2l SCX2l With shock absorber 20-CX2l Slide unit with built-in shock absorber/Series CXWM (Slide bearing) With adjusting bolt 20-CXWM SCXWl 3.6-6 With end lock 20-CXWM Slide unit/Series CXWL (Ball bushing) Standard 20-CXWL SCXWl 3.6-31

CRQ2

S A 3H9 effective depth 2 3H9 effective depth 2 TD TB TC D (g6) DD (h9) Rotation A AU B BA BB BC BD BU H Size 42 (8.5) 29 8.5 17 53 (9.5) 31 9 26.4 6.7 10.6 2.2 16.7 23.1 18 20 12 14 5 6 10 15 90, 180 90, 180 W Q S US UW ab M TC TD TA Size Rotation 4.5 17 56 69 65 82 90 180 90 180 10 35 44 6 9 8 15.4 15.5 15 5.5 20 40 50 7 10 9 17.6 16 Dimension AU does not indicate the dimension when shipped

Check Valve Series AK 1

Model AKH03-U10/32 AKH03-N01S AKH07-U10/32 AKH07-N01S AKH07-N02S AKH09-N01S AKH09-N02S AKH09-N03S AKH11-N02S AKH11-N03S AKH11-N04S AKH13-N03S AKH13-N04S 8 11.11 10-32 UNF 1/8 10-32 UNF 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 3/8 1/2 24.3 24.6 25.8 26.9 31 31.7 21.2 20.6 22.7 22.9 25 27.7 36 35.5 48.3 40.7 41.2 54 46.5 5 10 10 11 18 16 24 43 47 40 79 87 85 Applicable tubing 5/32 2.8 12.7 2.8 6.5 6.5

Safety Speed Control Valve (SSC Valve) Series ASS 1

D L2 L3 L4 L5 L6 L7 L8 P d h T L1 Model Model ASS10 ASS100 ASS110 2 10 5 20 9 5 20 52 14 4 17 50 XT14-82-3-1 1 8 ASS30 ASS300 ASS310 3.2 12 6 30 12 6 26 73 23 5 16.5 63 XT14-105-5-1 1 4 3 8 , ASS500 ASS500 2.3 14 7 35 13 6 38 99 27 6 30.5 90 XT14-89-2-1 1 2 3 4 , ASS600 ASS600 3.2 14 7 65 14 6 46 116 31 6 26 112 XT14-85-2-1 3 4 1 , AS Meter-in Control Type Meter-out Control Type ASP Mounting

ARJ310

6 t Zinc chromated w Electroless nickel plated Black zinc chromated Accessory Accessory IN 2 Series ARJ310 Dimensions ARJ310-01 ARJ310F-01 Approx. 31 Approx. 56 Approx. 56 Approx. 35 32 22 M12 x 1 Panel fitting dimensions 12.5/Panel thickness: 4 or less Approx. 27 19 2 2 -5.5 Approx. 57.2 8.5 Approx. 82.5 15 Applicable tube O.D. 4, 6, 5/32, 1/4 Port size Rc, NPT 1/8 2 2 1 1 Pressure gauge

AKH/AKB Series

Connection thread NPT H Effective area (mm) Weight g A L M Model (Width across flats) Applicable tubing AKH03-U10/32 AKH03-N01S AKH07-U10/32 AKH07-N01S AKH07-N02S AKH09-N01S AKH09-N02S AKH09-N03S AKH11-N02S AKH11-N03S AKH11-N04S AKH13-N03S AKH13-N04S 8 11.11 10-32 UNF 1/8 10-32 UNF 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 3/8 1/2 24.3 24.6 25.8 26.9 31 31.7 21.2 20.6 22.7 22.9 25 27.7 36 35.5 48.3

CC

.: 0.5MPa Operating oil: Additive turbine oil Class 1 (ISO VG32) Oil piping length:1m MK/MK2 Flow control valve Flow control valve Throttle valve Throttle valve Stop valve RSQ/RSG CCVS10, 11, 12, 13 CCVS20, 21, 22, 23 CCVS02 RSH CE1 CE2 ML2B ML1C REA REC CCVS30, 31, 32, 33 CCVL20, 21, 22, 23 CCVL02 RHC MTS CC CCVL10, 11, 12, 13 eWithin the reciprocating movement of the actuator, if only the

SRP

SUS316L 1 Body SUS316 2 Valve guide PPS 3 Spacer Bonnet PPS 4 Knob PBT 5 Electroless nickel plated Set nut ZDC 6 Valve spring SUS316 7 Main valve Ceramics 8 Valve seat PTFE 9 O-ring Fluoro rubber 10 Diaphragm Fluoro rubber 11 Gasket Fluoro rubber 12 Pressure regulator spring Steel wire 13 Pressure regulator screw assembly 14 Dimensions 30.5 Bracket 40 SMC P K U C S O H L 36 51 31 30 Panel

MHL2

B +0.025 0 3H9 Depth 3 24.5 (Body mounting hole) 6.45 5 4 5 4-M4 X 0.7 Thread depth 8 (Mounting thread) +0.025 0 3H9 Depth 3 18H9 Depth 1.5 +0.043 0 Dimensions of auto switch mounting groove (Enlarged view) M5 X 0.8 (Finger opening port) Auto switch mounting groove (4 locations) 4-M5 X 0.8 44 (Piston rod and rack screw) 5.5 H M5 X 0.8 18.2 (Finger closing port) 12.4 0.5 9 8 8.4 16.8 15 31

SRP

SUS316L 1 Body SUS316 2 Valve guide PPS 3 Spacer Bonnet PPS 4 Knob PBT 5 Electroless nickel plated Set nut ZDC 6 Valve spring SUS316 7 Main valve Ceramics 8 Valve seat PTFE 9 O-ring Fluoro rubber 10 Diaphragm Fluoro rubber 11 Gasket Fluoro rubber 12 Pressure regulator spring Steel wire 13 Pressure regulator screw assembly 14 Dimensions 30.5 Bracket 40 SMC P K U C S O H L 36 51 31 30 Panel

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

Cap AXT103-4 XT021-12 XT103-5 XT010-20 XT010-21 XT041-1 Resin Resin Bushing Spring Rubber plug for wire Round head combination screw Plug for cover r t y u i o Gasket XT013-31-2 NBR NXT030-8 !

VZA2000

VVZ2000-31A-31 pc. Base mounted 2 position double 2 position single Sub-plate Assembly Part No.: VZA2000-S-01 Thread type Mounting bolt and gasket are not included.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SQ1531 33 or less 0.14 0.20 0.59 0.19 0.21 0.79 25 or less Rubber seal 100 Dual 3 port valve A B C SQ1 31 33 or less 25 or less 0.15 0.28 0.59 0.15 0.28 0.59 Rubber seal 95 Note 1) Values for the cylinder port size of C6.

Table of Contents

Series SV2000 for EX120 Dedicated Output Serial Wiring. 6 7 8 10 10 10 10 10 10 10 11 11 11 11 11 11 12 12 13 13 13 15 16 16 17 19 20 21 21 23 23 24 24 24 24 24 25 26 27 27 30 30 31 32 33 34 35 36 37 37 39 40 40 41 42 44 45 45 50 50 51 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

TM

Cut the groove for separation with side cutters. 15-6-31 1 Related Products: Multi-holder Series TMA Can be used to secure the KE series exhaust valve with One-touch fitting. One-touch fitting can also be secured. Union tee: KQT, Elbow: KQL, Straight: KQH Depending on the number of holders required, they can be separated as desired.

Series: 3 (JSY3000), Type: 10S (Side-Ported, Serial Interface, EX250), SI Unit: TC [AS-Interface (Negative Common); 1 Common Type; 8 in/8 out, 31 Slave Modes], Input Block Stations: None, Input Block Type: w/o Input Block, Valve Stations: 4 Stations, P,E Port, SUP/EXH Assembly: C (Internal Pilot, Built-in Silencer; U Side, 2 to 10 Stations), A,B Port Size: C6 (ø6 One-touch Fitting)

Series: 3 (JSY3000), Type: 10S (Side-Ported, Serial Interface, EX250), SI Unit: TC [AS-Interface (Negative Common); 1 Common Type; 8 in/8 out, 31 Slave Modes], Input Block Stations: 1 Station, Input Block Type: C (PNP Sensor Input, M8, 4 Inputs), Valve Stations: 4 Stations, P,E Port, SUP/EXH Assembly: C (Internal Pilot, Built-in Silencer; U Side, 2 to 10 Stations), A,B Port Size: C6 (ø6 One-touch