CNG Applicable bore size (mm) B1 C D d H1 Applicable snap ring Applicable snap ring t m Part no.
C Rc(PT)P Rear cylinder port Width across flats Rc(PT)P Front cylinder port Width across flats B1 MM W GR GR D C E GL1 GL W T 16 Effective thread length MB 4-J 16 GF 4-J V Q VA H1 N K F GE BN A H S + Stroke ZZ + Stroke With rod boot e 9 l 13 h f ZZ + Stroke (mm) Effective thread length (mm) Width across flats Stroke range (mm) Bore size (mm) D F B A B1 H1 BP GL B2 BN GC GL1 C GA GB GD Ee11
VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.
Hysteresis H1 Sub Size Acc ess Default (dec) Content Description index [byte] 1 2 R/W 0x0032 Vacuum confirmation hysteresis (H1) of CH0 Set vacuum confirmation hysteresis (H1) for each CH. Refer to Section 5.
E (H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions A B C D E F H1 G H2 J K L M N P Model Body material LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m M5 x 0.8 30 33 54.5 10 10 75 76.5 22 22 27 Rc 1/8, 1/4, NPT 1/8, 1/4 (SUS) Stainless steel 36 47 81 13
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 16 [17] S + Stroke Z + Stroke Mounting hole Rod End Nut H1 B1 Bore size (mm) 10 16 7 3.2 8 4 [ ]: Denotes the values of AC.
Dimensions/20 to 40 Basic/CM2YB Width across flats B2 2-P (Port size) (Rc, NPT, G) 2-NN H1 H2 G G Width across flats B1 I 2-Eh8 D MM AL A F F NA 1.5 1.5 N N K H S + Stroke ZZ + Stroke Boss-cut ZZ + Stroke (mm) A AL B1 B2 D E F G H H1 H2 I K MM N NA NN P S ZZ Bore size (mm) 20 25 32 40 0 0.033 0 0.033 0 0.033 0 0.039 18 15.5 13 26 8 13 8 41 5 8 28 5 M8 x 1.25 15 24 M20 x 1.5 1/8 62 116 20
ON (+)ON 1 OFF ()ON OFF DC(+)DC(-) 2 ON 80 mA 3 () DC(+)DC(-) NPN PNP ( ) 4 OFF () ( ) 5 () DIN 6 -24No.PS-OMF0005CN-E No. 7 / ( 8 () ) -25No.PS-OMF0005CN-E ISA2-G1 ISA2-G5 ISA2-H1 ISA2-H5 0.010.25 mm 0.030.50 mm (5 m) 30200 kPa 50200 kPa 1.5 20 50 kPa 5 10 L/min (ANR) 100 kPa 8 15 200 kPa 12 22 DC1224 V10 (p-p)10() 15 mA NPN PNP NPN PNP 1 1 1 80 mA 30 V(
H1 D 0 E0.05 I C R0.4 Width across flats B1 8 x J Width across flats NA Width across flats KA TZ ZZ + Stroke Z + Stroke With air cushion 2 x P (Rc, NPT, G) GA WA GB WB W 10 Cushion valve, Width across flats WH With rod boot 8 8 h + l IJ e JH JW f l ZZ + l + Stroke Z + l + Stroke (mm) Bore size Stroke range Rc, NPT port G port A AL B1 C CD CZ D E F H H1 I J K KA L MM NA Standard Long stroke
AL A K F N N 71 LL S + Stroke H ZZ + Stroke ZZ + l + Stroke h + l Bore size (mm) Stroke range (mm) 40 50 63 80 100 A AL B B1 C D E F H1 I K KA LL MM N Q S J Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 30 35 35 40 40 84 90 98 116 126 The minimum stroke of the one with rod boot is
AS-FM AS-D AS-T ASP ASN AQ Dimensions ASV Universal type AK Applicable tubing O.D. d VCHC Applicable tubing O.D. d Weight (g) T H1 H2 D1 D2 D3 L1 L2 L3 L4 L5 (1) A (2) M1 Max. Min. Max. Min.
VFS1320-D/DZ/Y/YZ VFS1420-D/DZ/Y/YZ VFS1520-D/DZ/Y/YZ Lead wire O.D.
1.75 10 26 RZQ Bore size (mm) M MM N P S WA ZZ 40 11 M14 x 1.5 27 1/4 84 18.5 146 50 11 M18 x 1.5 30 3/8 90 18.5 159 63 14 M18 x 1.5 31 3/8 98 23 170 80 17 M22 x 1.5 37 1/2 116 28.5 204 100 17 M26 x 1.5 40 1/2 126 28.5 215 Axial Foot: CA2YL G 2 x P G 2 x P MM H1 AL A H MM H1 AL A H G G 2 x Cushion valve K 2 x Cushion valve K 4 x J B1 4 x J B1 F F 4 x LD 4 x LD D D E E B C B C LY LH LY LH
Note 2) For details of the applicable tubing sizes, refer to page 945. 901 LQ1 Series Dimensions Space saving union tee reducing: LQ1T-S-R B side M2 B side M2 H2 2 x B M1 M1 H1 (E2) 2 x B H2 (L2) L2 M1 M3 M3 F F A side C side A side C side 1/4 1/4 1/4 (E1) (E3) G (E3) H1 H3 H3 G H1 L1 L3 L3 (L1) Class 2 to 5 Type T1 Type T2 Class 2 to 5 M2 B side B side M2 H2 (E2) H1 M1 2 x B 2 x B H2 (L2
Effective area mm2 L1 H1 Width across flats Min. bore size M H2 Width across flats 14 Body size Mass g Model L2 Applicable hose KK3P-50N 5/8 14 21.4 4.5 12.7 36.1 13.7 1/8 -60N 6/9 5.4 18.3 38.8 18.4 17 39.9 16.5 H1 H2 -65N 6.5/10 21.9 35.9 5.9 KK4P-50N 14 43.9 13.7 17 5/8 34.7 12.7 4.5 -60N 6/9 48.4 5.4 18.3 17 46.7 16.5 1/4 -65N 6.5/10 5.9 21.9 45.1 25.2 -80N 8/12 34.4 53.2 7.4 47.6 L2
ISO Interface Solenoid Valve/SIZEq Metal Seal SeriesVS7-6 Single solenoid (FG-S) Double solenoid (FG-D) Reverse pressure (YZ-S) Reverse pressure (YZ-D) 2 position 3 position SV SY VS7-6-FPG-D Closed centre (FHG-D) Exhaust centre (FJG-D) Double pilot check (FPG-D) Pressure centre (FLG-D) SYJ SX VS7-6-FHG-D Option VK Standard Specifications 5 to 60 oC 0.1 to 1.0MPa Air/lnert gas Fluid Operating
(Values at the initial period) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position pressure center (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 3-10-7 Series VQ7-6 DIN Terminal Type 2 position single : VQ7-6-FG-S single (Reverse pressure): VQ7-6-YZ-S 120.5 120.5 68.5 52 68.5 Mounting hole 2-6.5 50 50 42.5 42.5 25 25 13 (A port) 13 (B port) Manual override (R1, R2) 2-3/8 P R2 R1 A B 14 11 50 62 12 9 62
32 32 41 BC 38 45 45 52 BN 80 90 90 BZ 57.5 69 69 76 C1 30 37 37 D 8 10 12 14 E 20 F 13 13 13 16 FD 7 7 7 7 FT 4 4 4 5 FX 60 60 60 66 FY 36 FZ 75 75 75 82 GA GB 8 8 8 11 BP 1/8 1/8 1/8 1/8 BQ 1/8 1/8 1/8 1/8 MGQ 0 0.033 20 25 32 40 73.5 0 0.033 0 0.033 0 0.033 83.5 26 26 MGG 83.5 100.5 47.3 90.5 32 MGC (mm) MGF GC 8 9 9 8 GD 55 GK 3.5 4 4 4 GL 6 9 9 11 GQ 4 7 7 8 b 4 7 7 7 H 41 45 45 50 H1
Applicable bore size (mm) D B1 C d H1 (mm) Part no.
Symbol Temp. range Heater 5 to 60C (41 to 140F) Nil None H0 None High temp. type 5 to 150C (41 to 302F) H1 With heater for 80C (176F) H2 With heater for 100C (212F) H3 With heater for 120C (248F) Option specifications/Combination table Option specifications Symbol Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 Indicator A Without heater H0 High temp. type With heater for 80C (176F) H1 With