Air Slide Table

20 MXQ8A-5-15Zm-X2192 25 4 54 28 3 65 40 52.5 32.5 78.5 110 120 230 10 MXQ8A-10-10Zm-X2192 5 30 MXQ8A-5-25Zm-X2192 26 6 52 23 27 4 85 40 63 42 88.5 130 140 270 10 MXQ8A-10-20Zm-X2192 15 MXQ8A-15-15Zm-X2192 5 MXQ8A-5-35Zm-X2192 32 6 40 31 31 4 70 55 52.5 52.5 104.5 130 140 280 10 MXQ8A-10-30Zm-X2192 15 MXQ8A-15-25Zm-X2192 20 MXQ8A-20-20Zm-X2192 5 40 15 8 MXQ8A-5-45Zm-X2192 46 6 59 29 29 4

Electric Actuator/Slider Type

CN7 150 CN1 Motor capacity Hole position Mounting dimensions Mounting hole A B C D V5 (100 W) qw 5 5 5 5 V7 (200 W) qw 5 5 5 V8 (400 W) we 5 5 5 5 CN8 CN2 The mounting hole position varies depending on the motor capacity. w 40 4 -# type LECYU2-V Connector name Description CN1 I/O signal connector CN2 Encoder connector CN3 Note) Digital operator connector CN6A MECHATROLINK-3communication

NCQ8

/8 3-3/8 3-5/8 4-1/8 4-5/8 5-1/8 5-5/8 #6-32UNC2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3-1/8 3-3/8 3-5/8 3-7/8 4-3/8 4-7/8 5-3/8 5-7/8 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-7/8 3-1/8 3-3/8 3-5/8 4-1/8 4-5/8 5-1/8 5-5/8 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-7/8 3-1/8 3-3/8 3-5/8 4-1/8 4-5/8 5-1/8 5-5/8 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3-1/8 3-3/8 3-5/8 3-7/8 4-3/8 4-7/8 5-3/

SX

SX 000-50-2ANote : SX3000 (Metric size) C4: With One-touch fitting for 4 C6: With One-touch fitting for 6 X5000 (Metric size) C4: With One-touch fitting for 4 C6: With One-touch fitting for 6 C8: With One-touch fitting for 8 (Gasket u supplied as an accessory.) 3 5 3 5 3 5 3 5 3 5 3 5 For 45(N)F (D-sub connector) (Inch size) N3: With One-touch fitting for 5/32" N7: With One-touch fitting

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Note 5) [ ]: Denotes normal position.

LEC-OM07605CN

PF_ _ ]) .45 5 1 5. 5 (MR Confignrator2) 5.1 * * : **: 5 2 5. 5.1.1 ([Pr.

HRX-OM-Q026

Display and Setting of Various Functions . 5-1 5.1 List of Functions . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main Display . 5-7 5.3.1 Main display . 5-7 5.3.2 Items on the main display . 5-7 5.4 Alarm Menu . 5-8 5.4.1 Alarm menu . 5-8 5.4.2 Items shown on the alarm menu display . 5-8 5.5 Check Monitor Menu . 5-9 5.5.1 Check monitor menu . 5-9

HRX-OM-S004

Display and setting of various functions . 5-1 5.1 List of function . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main Display . 5-7 5.3.1 Main Display . 5-7 5.3.2 Items on the main display . 5-7 5.4 Alarm Menu . 5-8 5.4.1 Alarm menu . 5-8 5.4.2 Items shown on the alarm menu display . 5-8 5.5 Check monitor menu . 5-9 5.5.1 Check monitor menu . 5-9 5.5.2

0.4

)5 1 (P) 3(R2) VQZ r r e q w e q w SQ VFS VFR VQ7 VQ2300 VQ2400 VQ2301 VQ2401 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r VQ2500 VQ2501 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQ2A01 VQ2B01 4(A) 2(B) 2(B) 4(A) r 5(R1) 1(P) 3(R2) 5(R1) 1(P) 3(R2) VQ2C01 2(B) 4(A) 5(R1) 1(P) 3(R2) Component Parts Component

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Rated voltage A, B port size DC specifications AC specifications (50/60Hz) M5 01 C4 C6 N3 N7 M5 x 0.8 1/8 (10SYJ7000 only) One-touch fitting for 4 One-touch fitting for 6 5 6 1 2 3 4 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] One-touch fitting for 5/32" One-touch fitting for 1/4 Body ported 5 Y M5 5 1 23 SYJ 10 43 5 2 5 Y SYJ 10 Base mounted Thread type Series Electrical

Table of Contents

Vacuum pressure Suction flow rate 13-5-5 6 Series ZH Box Type (Built-in silencer): ZHB -S L One-touch connection Applicable tubing diameter B Model A 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 63 6 23 18 12.8 29 5 50 63 6 23 18 12.8 29 5 50 78 8 27.5 23 13.7 35 7 61 78 8 27.5 23 13.7 35 7 61 B C D E F G H ZH05BS-06-06 ZH05BL-06-06 ZH07BS

LX

LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12

HRX-OM-X037

Display and Setting of Various Functions . 5-1 5.1 Basic Operation . 5-1 5.1.1 Touch panel . 5-1 5.1.2 Basic operating instructions. 5-2 5.2 Flow Chart of the Operation Screen . 5-4 5.2.1 Flow Chart of the Operation Screen . 5-4 5.3 List of Functions . 5-7 5.4 Description of the Screen . 5-8 5.4.1 Home screen . 5-8 Menu key . 5-9 Display and setting of date and time . 5-9 Operating condition

VFR

Option Refer to page 3-5-8.

Free Mount Cylinder

5 5 1 pc. 10 5 10 2 pcs.

Made to Order

5 6 6 6 6 6 9 18 17 22 22 26 26 34 41 6 7 9 8.5 11 11 14 16 5 6 6 6 6 6 8 9 5 5 5 5 5 5 6 6 20 25 32 40 50 63 80 100 120 119.5 139.5 139.5 160.5 160.5 190.5 200.5 0 0 15.5 9 16.5 11.5 8 10.5 24.5 24 34 27.5 37.5 32.5 35 35.5 57 56 70 63.5 78.5 73.5 84 74.5 80 93 110 118 146 160 199 236 87.5 87.5 103.5 103.5 119.5 119.5 141.5 161.5 MGPL, MGPA (Ball bushing bearing) A, E, HT Dimensions (mm)

HRX-OM-W002

4.3 Adjustment of bypass valve . 4-6 4.4 Check items after starting . 4-6 Chapter 5 Display and Setting of Various Functions . 5-1 5.1 List of Functions . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.3 List of parameters . 5-6 5.3.1 Main Menu . 5-6 5.3.2 Alarm display menu . 5-6 5.3.3 Notice for maintenance Menu . 5-6 5.3.4 Monitor Menu . 5-7 5.3.5 Standard setting menu . 5-8 5.3.6

HRX-OM-X084

4.2.4 Cautions for re-start . 4-5 4.3 Adjustment of bypass valve . 4-6 4.4 Check items after starting . 4-6 Chapter 5 Display and Setting of Various Functions . 5-1 5.1 List of Functions . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.3 List of parameters . 5-6 5.3.1 Main Menu . 5-6 5.3.2 Alarm display menu . 5-6 5.3.3 Notice for maintenance Menu . 5-6 5.3.4 Monitor Menu . 5-7 5.3.5

HRX-OM-Y098

mode [MODE] . 5-12 RUN/STOP display . 5-13 Run/stop operation . 5-13 5.4.2 Menu . 5-14 5.4.3 Status screen . 5-15 5.4.4 Information screen . 5-17 Alarm reset . 5-18 HRL Series HRX-OM-Y098 Contents Alarm name .5-18 Alarm log record.5-19 Display of alarm/maintenance reminder .5-20 5.4.5 Check operation time screen and maintenance reminder .5-21 Setting the usage time of DI filter.5-23 Setting

HRX-OM-W032

Display and Setting of Various Functions . 5-1 5.1 List of Functions . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main Display . 5-7 5.3.1 Main display . 5-7 5.3.2 Items on the main display . 5-7 5.4 Alarm Menu . 5-8 5.4.1 Alarm menu . 5-8 5.4.2 Items shown on the alarm menu display . 5-8 5.5 Check Monitor Menu . 5-9 5.5.1 Check monitor menu . 5-9