IDX-OM-O004C

3.1 m 3/min 50Hz 2.9 2) 60Hz 3.2 MPa 0.7 35 32 10 () AC100V(50Hz) AC100,110V(60Hz) 3) AC200V(50Hz) AC200,220V(60Hz) 3) (50/60Hz) W 420/480 (50/60Hz) A 4.3/4.6 3.4/3.1 4 ) A 10 R134a(HFC) () Rc1 kg 46 1 2 () kW 15 1(ANR)[2065%] 2[32] 3() 430mA 6 1 6. 6.2 IDF15E1 mm 603 41 54 300 16 C R 1 C R 1 87 578 [AC200V] [AC200V] 396 0.8m (10, (:10, :0.8m) 43 15 270 13 4x 380 101

IDX-OM-W026

FM FM THP THP THS MC1 MC1 MC1 MC1 MC2 MC2 PRS1 PRS1 P P TDR PRS2 THR PRR TDR PRS2 THR PRR P P M M IDF Series 13-6 13 3 IDX-OM-W026 13 T CM PRS OLR FM PRS1 PRR MC PRS2 TB MC1 ILS GFCI MC2 THR MOV C01 CM THS TDR C11 FM THP OLP2 OLP2 IDF Series 13-6 13 4 IDX-OM-W026 14 14 14-1 / IDF Series 14-1 A2021/5 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

IDX-OM-M050

Description Maintenance/Service Work Description Date 7-1 Service Record 7 1 IDF100150F Revision Rev GNovember,2020 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020 SMC Corporation All Rights Reserved

IDX-OM-U021

IDF-FL219 (IDF100F,125F ) 1 IDF-FL220 (IDF150F ) 1 ADH-E400 V 1 -(2) 1 1 ) 1 2 ) Y92S-36/CR2477/ () 1 B 20,000 (6 ) 1 B 20,000 (6 ) 1 A 20,000 (6 ) 1 A 20,000 (6 ) 1 A 20,000 (6 ) 2 (IDF150F3) A 20,000 (6 ) 1 A 20,000 (6 ) 1 A 20,000 (6 ) 12 /JEMA 300 A B IDF100150F 6-6 6 8 IDX-OM-U021 7 7 7-1 / IDF100150F 7-1 7 1 B2020 11 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

IDX-OM-M051

Description Maintenance/Service Work Description Date 7.1 Service Record 7 1 IDF100F~150F-W Revision Rev CSeptember,2021 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020 SMC Corporation All Rights

IDX-OM-Z004

IDX-OM-Z004 6 6.5 Y Y ,, IDF100F150F-W 6 7 IDX-OM-Z004 6 6.6 () (1) ADH-E400 V 1 -(2) 1 1 ) 1 2 ) Y92S-36/CR2477/ () 1 B 20,000 (6 ) 1 B 20,000 (6 ) 1 B 20,000 (6 ) 1 B 20,000 (6 ) 1 A 20,000 (6 ) 1 A 20,000 (6 ) 1 A 20,000 (6 ) 1 A 20,000 (6 ) 12 /JEMA 300 A B IDF100F150F-W 6 8 IDX-OM-Z004 7 7 7.1 / 7-1 IDF100150F-W 7 1 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

IDX-OM-X011

Description Contents of check Date IDF60/70/80/90 Series 11.1 Inspection record 11-1 Revision Rev ANobember,2020 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020 SMC Corporation All Rights Reserved

IDX-OM-Y002

Description Contents of check Date IDF60/70/80/90 Series 11.1 Inspection record 11-1 Revision Rev AApr,2023 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2023 SMC Corporation All Rights Reserved

IDX-OM-P023E

The capacity regulating valve opens when the compressed air has been cooled sufficiently, and prevents condensed water from being frozen by excessive cooling. 6 4 Revision Rev AApr,2023 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation

IDX-OM-P026E

The capacity regulating valve opens when the compressed air has been cooled sufficiently, and prevents condensed water from being frozen by excessive cooling. 6 4 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Tel: +81 3 5207 8249 Fax: +81 3 5298 5362 URL: http://www.smcworld.com Specifications are subject to change without prior notice and any obligation the part

IDX-OM-W014

(Ex.) 1. 2. 3. 4. 14-2 IDU3E/4E/6E-23-V IDF-S0198 1.6MPa AC230V10% (50Hz) ON 0.5 OFF 30 14-1 IDU Series 141 IDX-OM-W014 14 V 14-3 1) 2) 3) 4) ON OFF 4 6 2 3 8 4 2 1 10 0.5 5 0.5 ON:SEC OFF:MIN 14-4 1-1 IDU Series 14-3 142 IDX-OM-W014 15 15 15-1 / IDU Series 15-1 15-1 C2021/11 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298

IDX-OM-W023

(Ex.) 1. 2. 3. 4. 14-2 IDU8E/11E/15E1-23-V IDF-S0198 1.6MPa AC230V10% (50Hz) ON 0.5sec OFF 30 IDU Series 141 IDX-OM-W023 14 V 14-3 1) 2) 3) 4) ON OFF 4 6 2 3 8 4 2 1 10 0.5 5 0.5 ON:SEC OFF:MIN 14-4 1-1 IDU Series 142 IDX-OM-W023 15 15 15-1 / IDU Series 15-1 A2020/1 B2021/5 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Tel: +81 3 5207

IDX-OM-W029

3. 4. 12-2 IDU22E/37E-23-V IDU55E/75E-23-V IDF-S0198 IDF-S0302 1.6MPa AC230V10% (50Hz) ON 0.5sec 2.0sec OFF 30 IDU Series 121 IDX-OM-W029 12 V 12-3 1) 2) 3) 4) ON OFF 4 6 2 3 2 1 8 4 10 0.5 5 ON:SEC OFF:MIN 0.5 12-4 V 6-4 6-3 T 11-6 11-3 IDU Series 122 IDX-OM-W029 13 13 13-1 / IDU Series 13-1 13-1 B2022 9 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

IDX-OM-U010

Description Contents of check Date IDFC60/70/80/90 Series 13.1 Inspection record 13-1 Revision Rev HApr,2023 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2023 SMC Corporation All Rights Reserved

IDX-OM-W095

230V50Hz BU BR YE OR G/Y / IDFC60/70/80/90 Series 11-4 IDX-OM-W095 V 12 V V 12.1 0 () 12.2 ( 10m) (12mm) IDF-S0534 1.6MPa ON 0.510 OFF 0.55 IDFC60/70/80/90 Series 12-1 IDX-OM-W095 V 12.3 TEST TEST OFF ON OFF ON 6 4 3 2 2 1 8 4 0.5 10 5 0.5 min s IDFC60/70/80/90 Series 12-2 IDX-OM-W095 13 13.1 / IDFC60/70/80/90 Series 13-1 A: 2023/4 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

IDX-OM-V020

Description Contents of check Date IDFA60/70/80/90 Series 14.1 Inspection record 14-1 Revision Rev FOct,2019 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved

IDX-OM-W053

(Ex.) 1. 2. 3. 4. 15 1 15 V 15-2 ON0.5 OFF30 IDF-S0405 1.6MPa ON 0.5 OFF 30 6-3 14-3 15-3 1) 2) 3) 4) ON OFF 4 6 2 3 2 1 8 4 10 0.5 5 ON:SEC OFF:MIN 0.5 15 2 16 16 16-1 / 16 1 A2021/5 B2022/1 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without

IDX-OM-W031

Description Maintenance/Service Work Description Date IDFA Series 13-1 Service Record 13 1 Revision Revision ANov.2019 Revision BMay.2021 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation

IDX-OM-W032

IDX-OM-W032 12 V 12-2 Drain tube (O.D. 10m) (10) IDFA22E,37E,55E,75E-23-V IDF-S0198 1.6MPa AC230V10% (50Hz) ON 0.5sec OFF 30sec IDFA Series 12-2 122 IDX-OM-W032 12 V 12-3 1) 2) 3) 4) ON OFF 4 6 2 3 2 1 8 4 0.5 0.5 5 ON:SEC OFF:MIN 12-4 R 6-4 6-3 T 11-6 11-3 IDFA Series 12-3 123 IDX-OM-W032 13 13 13-1 / IDFA Series 13-1 13-1 D:2021/11 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

IDX-OM-N030

Description Maintenance/Service Work Description Date 7.1 Service Record 7 1 IDFA100F 150F Revision Rev HNovember,2020 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020 SMC Corporation All Rights