Rated Control Flow Range: 50 (0.5 to 50 L/min), Port Size: C6 (6mm), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: M (SI units only)

ms) (2)Weight (g) 1 4/2 (P A/B)4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

(ms) (2)Weight (g) 1 4/2 (P A/B)4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?

Rated Control Flow Range: 50 (0.5 to 50 L/min), Port Size: C6 (6mm), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: R (Bracket (mounting position: Side)

Rated Control Flow Range: 25 (0.2 to 25 L/min), Port Size: C6 (6mm), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: Q (M12-M12 lead wire with connector (3 m/5 core))

Block: X (X Pilot Air Control Block, at station 1), A,B Port Size: C6 (ø6 One-touch Fitting, Pitch: 9mm with or w/out pressure sensor)

Rated Control Flow Range: 10 (0.1 to 10 L/min), Port Size: C6 (6mm), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: S (Bracket (mounting position: Stream side)), Operation Manual/Calibration Certificate

Rated Control Flow Range: 25 (0.2 to 25 L/min), Port Size: C6 (6mm), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: R (Bracket (mounting position: Side)

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

How to Order VFN212 02 N 5 F D Z CE marking NAMUR Interface Nil Q CE marked product Voltage Thread type 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC, 50/60 Hz Nil Rc (PT) F G (PF) N NPT Electrical entry Solenoid G Grommet E Grommet terminal T Conduit terminal D DIN terminal Nil Single solenoid D Double solenoid Manual

Bag Filter

Pressure gauge Note 1) FGF 1 X82 B 20 Z 050 1 element included (For coarse filtration) 3/5 elements included (Produced upon receipt of order.) Z X82 FGF 050 Option Note 1) Note 1) Without pressure gauge/Without option: is not required to enter. Example) FGFS1A-20-Z050B-X82, FGFS3B-40-Z050X82 Element/Element-Fixing Component Part No.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

<"S" option is not available since surge voltage is automatically suppressed by the converter.> Grommet, L and M type plug connector With light( Z) (~) Z N R Coil (~) 40 Operations Guide 6 Series SYJ3000 Connector Ass'y with Protective Cover Flat Cable Manifold Connector ass'y with protective cover enhances dust protection.

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

control equipment Filter, Pressure control equipment Air preparation equipment (Pitch) P=10.5 11.5 5 5 10 11.6 3 1 3 1 21.5 <30.9> 27[34] 25 + + + + + L2 3 (For mounting) 2-3.5 (1, 3 port) M5 x 0.8 1 G: Approx. 300 H: Approx. 600 32.4[34.6] L1 <34.6> (Lead wire length) (Light/surge voltage suppressor) (Station n) (Station 1) 2 2 13 7.7 (Pitch) P=10.5 10.5 (2 port) M5 x 0.8 L plug connector

ZCUK

Material NBR Silicon rubber Urethane rubber Fluoro rubber Conductive NBR (2 to 16 only) Conductive silicon rubber (2 to 16 only) N S U F GN GS Material N S U F GN NBR Silicon rubber Urethane rubber Fluoro rubber Conductive NBR (2 to 16 only) Conductive silicon rubber (2 to 16 only) Pad type Flat Flat with ribs Deep Bellows (Except -X11) U C D B Table (1) Pad Dia./Pad Type Dia.

Free-Mounting Cylinder with Air Cushion Series CU

2 Carbon steel 9 Steel ball 1 Magnetic material 10 Magnet A F D9 type (2) 11 Auto switch 1 NBR 12 Piston gasket 2 NBR 13 Piston seal 1 NBR 14 Rod seal 1 NBR 15 Gasket 3 Free-Mounting Cylinder with Air Cushion Series CU Dimensions 2-cushion needle 2-port 2-P through Q R E GB GA 4-NN MM D CB CA C K J JA E H A' A 2-P through KA B 4-T counterbore Width across flats L S + Stroke Z + Stroke (

Series CM2X-Z 10- ø20, ø25, ø32, ø40 Low Speed Cylinder 11- Double Acting, Single Rod

Bore size (mm) Port thread type Rc NPT Nil TN TF Number of auto switches 2 pcs. 1 pc. n pcs.

KJ

Red 1 4 1 8 3 16 3 8 1 2 07 1 4 1 4 3 8 Nil VMG 09 5 16 11 3 8 1 2 13 1 2 Same dia. rod Same dia. tubing 1 8 tubing tubing 5 32 tubing 3 16 tubing 1 4 tubing 5 16 tubing 3 8 tubing 1 2 Model Male connector Straight Different dia. straight H Hexagon socket head male connector S F Female union Male elbow Elbow Plug-in elbow Reducer elbow 45 male elbow L K V VS VF LF VD VT Z ZD ZT W Universal

AC Servo Motor Driver (SSCNET Type)

1) (Note 1) 31 Overspeed 32 Overcurrent Alarms 33 Overvoltage 34 Receive error 1 (Note 2) 35 Command frequency error 36 Receive error 2 37 Parameter error 45 Main circuit device overheat (Note 1) (Note 1) (Note 1) 46 Servo motor overheat (Note 1) (Note 1) (Note 1) 47 Cooling fan error 50 Overload 1 (Note 1) (Note 1) (Note 1) 51 Overload 2 (Note 1) (Note 1) (Note 1) 52 Error excessive 8A USB

LEH_C

No. 1 1 1 1 I/O (1 ) 1 1 (USB ) 1 -2.

Process Valve

2.5 2.6 1 4 1 5.7 5.8 32 Symbol Valve type Type 4.1 4.2 1 2 1 N.C.

PFxx-OMS0001CN

PFMC 7 7 A*8 8 501 5~500L/min 2 102 10~1000L/min 202 20~2000L/min *7 Rc N NPT R F G*1 1ISO228 501 102 202 04 1/2 *7 06 3/4 OUT1 OU2 *5 A NPN NPN M SI*6 B PNP PNP 5 C NPN (1~5V) SI D NPN (4~20mA) 6:L/min:L E*2 PNP (1~5V) F*2 PNP (4~20mA) 1 G*2 NPN *3 M8(3m)*4 H*2 PNP *3 2 3 N M8 *4 / ZS-40-A M8 3 m ZS-42-A PFMC7501/7102 (M352 ) ZS-42-B PFMC7202 (M352 ) -10No.PF-OMS0001CN-A M8 1