3 Port Solenoid Valve/

M12 connector pin number Wiring specication y t r q e y t w w r w q e y e q t r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) 1(P) 1(P) X X 1(P) 21 Safety Standard ISO13849-1 Certied 3 Port Solenoid Valve/ Residual Pressure Release Valve with Detection

Fluoropolymer Piping Equipment

Connection threads Rc/NPT E E H L L M Min. port size W Y L, L H W M LQ3H11-F 4 1/8" 10 9 11 35 34 14 2.5 10 18.5 LQ3H12-F 3 2 LQ3H21-F 6 1/8" 17 16 16 40 39 20 4 14 18.5 LQ3H22-F 1/4" 45 44 21.5 LQ3H31-F 10 1/8" Y (E, E) 7.5 18.5 LQ3H32-F 8 6.4 LQ3H33-F 10 1/4" 55 52 7.5 21.5 LQ3H34-F 8 6.4 LQ3H35-F 10 3/8" 55.5 52.5 7.5 25 LQ3H36-F 8 6.4 LQ3H41-F 12 1/4" 24 22 24 55.5 53 29 9.5 22 21.5 LQ3H42

1

X416 1 2 1 1 1 1 1 Stroke adjusting unit Combination description Holder mounting bracket MY2H X168 Bore size Stroke Auto switch Suffix X417 1 1 1 1 2 1 1 L, H, LS, HS Nil W Z L H LZ HZ Nil W L H With X416 (1 pc.) on only one side With X416 (2 pcs.) (With each 1pc. for both sides) With X416 on one side, X417 on the other side (1 pc.)

HRX-OM-X037

Please refer to the Fig. 9-15, Fig. 9-16 for the Cooling capacity*1 W details.

SY

) Valve effective area Note 2) A/B to EA/EB 16.2 (0.9) C10: mm (Cv factor) Manifold base weight W (g) n: Number of stations W = 30n + 50 W = 37n + 63 W = 61n + 101 W = 79n + 127 W = 100n + 151 Note 1) For 10 stations or more (5 stations or more in case of SS5Y7), supply pressure to P port on both sides and exhaust from EA and EB ports on both sides.

Thermo-chiller

(English 1 pc./Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer 20A 1 pc., Barrel nipple 20A 1 pc., Drain pan for the pump 1 pc.

F

H O W T O O R D E R M I N I AT U R E F I T T I N G S P R O D U C T S E L E C T O R M P R O D U C T S E L E C T O R M A L E/M A L E N I P P L E: 1/8-1/8 H E X 1/4-1/4 H E X 3/8-3/8 H E X 1/2-1/2 H E X F L U S H TA P E R P L U G S: 18, 14, 38, 12, 34 P O R T S I Z E 3 M3 5 M5 01 18 3/4-3/4 H E X C O N F I G U R AT I O N See Product Selectors T U B E S I Z E ( W H E R E A P P L I C A B L E)

NCQ8

8" to 1" 1.38 1 1/4" to 2" 075 (3/4"), 106 (1-1/16") P-port H-thread C-depth 4 places Z Q 0.15-through hole J M2 bolt circle W M1 E I dia.

C85

1 w e !3 !

Stability of suction position,

1 !1 !2 !2 i i o o u u y y w w t t r r q q e e With buffer (Vacuum inlet: Vertical) With buffer (Vacuum inlet: Lateral) Component Parts No.

Environment

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

HRX-OM-M090

fluid and facility water . 8-7 Chapter 9 Documents . 9-1 9.1 Specifications List . 9-1 9.1.1 Product specification . 9-1 9.1.2 Refrigerant with GWP reference . 9-4 9.1.3 Communication specifications . 9-5 9.2 Outline dimensions . 9-6 9.3 Flow Chart . 9-7 9.3.1 HRS012-A-0 HRS018-A-0 HRS024-A-20 . 9-7 9.3.2 HRS012-W-0 HRS018-W-0 HRS024-W-20 . 9-7 9.4 Cooling capacity . 9-8 9.4.1 HRS012--10

High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 For XLF/XLG Symbol Changed part*2 Leakage [Pam3/s or less]*1 Internal External Nil None 1.3 x 1010 (FKM) 1.3 x 1010 (FKM) A w, e, r 1.3 x 108 1.3 x 108 B w, e 1.3 x 108 1.3 x 1010 (FKM) C r 1.3 x 1010 (FKM) 1.3 x 108 D w 1.3 x 108 1.3 x

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Contents No. q w e r t y u i o !0 !1 !2 !3 !

Integrated Controller

12 10 8 6 4 2 0 3000 mm/s2 3000 mm/s2 4 Work load: W [kg] Work load: W [kg] 3 2 5000 mm/s2 1 10 mm/s2 0 0 Speed: V [mm/s] 200 400 600 800 1000 1400 1200 0 Speed: V [mm/s] 200 400 600 800 1000 1200 EQFS40HA/Ball Screw Drive Horizontal/Lead 20 Vertical/Lead 20 70 5 4.5 4 3.5 3 2.5 2 1.5 1 0.5 0 3000 mm/s2 60 Work load: W [kg] Work load: W [kg] 50 40 3000 mm/s2 30 5000 mm/s2 20 10 10 mm/s2

IDX-OM-M051

V Timer type solenoid valve with auto drain IDF100F~150F-W 1.1 Part number of product 1 1 IDX-OM-M051 Air Dryer 1.

energy saving effect

Description Material Qty Note HRSE q Body PC, PP 1 w Element PP 1 e Extension piece Stainless steel 2 Conversion from NPT to Rc HRZ Replacement Element r Handle 1 When -H is selected HRZD HRS PF006 t Sealant tape PTFE 1 HRW e HECR Rc1 HEC NPT1 NPT1 HEB HED (256) e HEA Rc1 w IDH q (343) t r 183 HRSH Series u Wired Remote Controller When the wired remote controller is connected to the thermo-chiller

VFR

1, Connection bracket q, w, Gasket r, O-ring t, u Plug-in type VVFS3000-2A-1 End plate (U side) assembly VVFS3000-2A-2 !1 End plate (U) !1, Connection bracket q, w, Gasket r, O-ring t, u End plate (D) !2, Connection bracket q, w, Gasket e End plate (D) !2, Connection bracket q, w, Gasket e Non plug-in type Plug-in type Non plug-in type VVFS3000-3A-2 !

Vacuum Unit

3 q t i u w !5 With Pressure Switch for Vacuum with Energy Saving Function !7 !1 e o !0 r !2 With Pressure Sensor With Pressure Switch for Vacuum !6 Component Parts No.

LEC-OM02904

UVW)(UV W) U U V V M W W (UVW) M U V W U V W PE M P1-P2(11k~12KWP1-P) P1 P2 4 3 4 (C) 200V3.5kW CNP2P-D PC (11.2) (2) (a) DO CN1ON/OFF (b) CN3DC24V (c) CN3SDDOCOM CN3 DOCOM SD 4.1.3 (1) (a) (b) (10.4) (c) (2) 4 4 4 4.2 (1) b01(1) (25) ON 3000r/min (2) 5 No.