Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 40, Backflow Function: K (Backflow Function), Thread: N (NPT), Port Size: 03 (3/8), Accessory: BG (B+G), Specifications: 1 (0.005 to 0.2 MPa Setting), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 40, Backflow Function: K (Backflow Function), Thread: N (NPT), Port Size: 02 (1/4), Accessory: BG (B+G), Specifications: 1 (0.005 to 0.2 MPa Setting), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 40, Backflow Function: K (Backflow Function), Thread: N (NPT), Port Size: 04 (1/2), Accessory: BG (B+G), Specifications: 1 (0.005 to 0.2 MPa Setting), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 16, Motor Type: A [Servo Motor (24 VDC)], Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 50mm, Motor Option: B (w/Lock), Vacuum Port: Left, Positioning Pin Hole: K (Body Bottom, 2 Locations)

Body Size: 50, Backflow: K (w/Backflow Function), Thread: Rc, Port Size: 10 (1), Options: B (w/Bracket), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 60, Backflow: K (w/Backflow Function), Thread: Rc, Port Size: 10 (1), Options: B (w/Bracket), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 60, Backflow: K (w/Backflow Function), Thread: Rc, Port Size: 10 (1), Options: BM (B+M), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 20, Backflow: K (w/Backflow Function), Thread: Rc, Port Size: 02 (1/4), Options: BE3 (B+E3), Set Pressure: 1 (0.02 to 0.2 MPa Setting), Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: ZA (Digital Pressure Switch: w/Unit Selection Function)

Body Size: 50, Backflow: K (w/Backflow Function), Thread: Rc, Port Size: 10 (1), Options: BM (B+M), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 20, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 01 (1/8), Options: BE4 (B+E4), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: ZA (Digital Pressure Switch: w/Unit Selection Function)

Body Size: 20, Backflow: K (w/Backflow Function), Thread: Rc, Port Size: 02 (1/4), Options: BE3 (B+E3), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: R (Right to Left), Knob: Y (Upward), Pressure Units: ZA (Digital Pressure Switch: w/Unit Selection Function)

Body Size: 20, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 01 (1/8), Options: BE1 (B+E1), Set Pressure: 1 (0.02 to 0.2 MPa Setting), Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: ZA (Digital Pressure Switch: w/Unit Selection Function)

Body Size: 20, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 02 (1/4), Options: BE1 (B+E1), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: R (Right to Left), Knob: Downward, Pressure Units: ZA (Digital Pressure Switch: w/Unit Selection Function)

Body Size: 20, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 02 (1/4), Options: BE1 (B+E1), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: ZA (Digital Pressure Switch: w/Unit Selection Function)

Body Size: 20, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 02 (1/4), Options: BE3 (B+E3), Set Pressure: 1 (0.02 to 0.2 MPa Setting), Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: ZA (Digital Pressure Switch: w/Unit Selection Function)

Body Size: 25, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 02 (1/4), Options: BE1 (B+E1), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: R (Right to Left), Knob: Downward, Pressure Units: ZA (Digital Pressure Switch: w/Unit Selection Function)

Body Size: 50, Backflow: K (w/Backflow Function), Thread: Rc, Port Size: 10 (1), Options: BE2 (B+E2), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 60, Backflow: K (w/Backflow Function), Thread: Rc, Port Size: 10 (1), Options: BE (B+E), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 20, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 02 (1/4), Options: BE3 (B+E3), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: ZA (Digital Pressure Switch: w/Unit Selection Function)

Body Size: 40, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 04 (1/2), Options: BE2 (B+E2), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: ZA (Digital Pressure Switch: w/Unit Selection Function)