Vacuum Module Series ZX

ZX1 1 10 F Filter unit Ejector unit Nil Q CE marked Ejector unit nozzle dia.

NCQ8

1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC3/4 7/8 1 1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-3/4 1-7/8 2 2-1/4 2-1/2 2-3/4 3 3-1/2 4 4-1/2 5 #10-24UNC1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-3/4 1-7/8 2 2-1/4 2-1/2 2-3/4 3 3-1/2 4 4-1/2 5 #10-24UNC1-1/4 1-3/8 1-1/2 1-5/8 1-3/4 1

Step Motor Controller

LE CP 1 (14.2) (13.5) Connector C Actuator side (Terminal no.) 1 2 Cable length (L) 1 3 5 8 A B C (14) (18) A1 B1 8 1.5 m 3 m 5 m 8 m (17.7) (17.7) 5 6 1 2 Connector A A6 B6 Connector D 10 m L (11) (30.7) (14.7) 5 6 15 m (10) 20 m Controller side Produced upon receipt of order 8 10 15 20 LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) (Terminal no.) (14.2) (13.5

A_HEC-OM-K001

Host STX 31H Setting data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Chemical Thermo-con ACK CR Host SOH UT STX 31H Setting data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Chemical Thermo-con ACK UT CR 7.4.2 Reading of target temp. As 0.1oC is the minimum unit, the number in the hundredths place (10-2) is always 0 (=30H).

CRQ2

Size 20, 30, 40 (mm) (mm) (mm) Y 1 to 9 1 to 10 1 to 15 1 to 18 1 to 20 Size 10 15 20 30 40 X 2 to 18 2 to 20 Size 10 15 Size 10 15 CRQ2 Y 1 to 9 1 to 10 X 2 to 18 2 to 20 MSQ MRQ Symbol: A20 Symbol: A21 Symbol: A22 The long shaft can be further shortened by machining it into a stepped round shaft with a double-sided chamfer.

C95

-2)/2 n = 2, 4, 6, 8 160 10 10 + 55(n-2)/2 n = 2, 4, 6, 8 A5 A6 2 A59W n 15 15 15 10 10 + 55(n-2)/2 n = 2, 4, 6, 8 15 15 + 55(n-2)/2 n = 2, 4, 6, 8 10 100 35 1 1, 2 F5(W)/J5/J59W n F5BAL/F59F 15 15 1, 2 F5NTL n 10 100 35 1 2 (Same side) 2 (Different sides) A3 K3 G3 n (Same side) n (Different sides) 10 55 35 10 55 35 1 2 (Same side) 2 (Different sides) A44 n (Same side) n (Different

Flow Control Equipment

Style Inch Millimeter Elbow Universal 2 3 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 23 04 06 08 10 12 03 05 07 09 11 13 4 6 8 10 12 Control Meter out Meter in 0 1 1/8" tube should be used.

Dual Speed Controller with One-touch Fitting Series ASD

Port size 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 4 ASD230F-M5 ASD330F-01 ASD430F-02 ASD530F-02 ASD530F-03 ASD630F-04 M5 x 0.8 R 1/8 R 1/4 R 1/4 R 3/8 R 1/2 ASD230F-U10/32 ASD330F-N01 ASD430F-N02 ASD530F-N02 ASD530F-N03 ASD630F-N04 10-32 UNF NPT 1/8 NPT 1/4 NPT 1/4 NPT 3/8 NPT 1/2 Specifications Fluid Air Proof pressure 1.5 MPa Max. operating pressure 1 MPa Min. operating pressure

Mechanically Jointed Rodless Cylinders

1 1 Applicable cylinder Model Common JJ L P LD H G Adjustment range Adjustment range Ea Eb Ea Eb MY316 MY320 MY325 MY332 MY340 MY350 MY363 MYAJ16 MYAJ20 MYAJ25 MYAJ32 MYAJ40 MYAJ50 MYAJ63 1 1 1 1 1 1 1 1 1 1 1 72 90 100 38 50 55 60 32 36 40 20 21 22 22 M8 x 1.25 M8 x 1.25 M10 x 1.5 M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 6.5 6.5 9 4.5 4 5.5 5.5 10 10 12 12 16 16 19 6 6.5 9.5 9.5 11 11 14 Applicable

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

32 10 85 15 26 54 10 10 8 M8 x 1.25 6 14 71 50 25 to 600 25 to 600 35 32 70 27 108 1/4 1/4 52 20 40 10 95 17 27 59 13 12 11 M8 x 1.25 7 18 80 63 32 to 600 32 to 600 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 26 67 18 15 11 M10 x 1.25 7 18 99 80 41 to 750 41 to 750 40 37 102 32 129 1/4 1/4 78 25 52 14 113 21 30 72 23 17 13 M12 x 1.75 10 22 117 100 45 to 750 45 to 750 40 37 116 41 140 1/4 1

Programless Controller Series LECP1

Connector C Actuator side (8) (Terminal no.) 1 2 5 6 (14) (18) A1 B1 (13.5) Cable length (L)[m] 1 3 5 8 A B C (17.7) (17.7) 1 2 1.5 3 5 8 A6 B6 (30.7) Connector A 15 16 (14.7) Connector D L (11) (10) 10 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) Controller side 15 (14.2) Connector C (Terminal no.) 1 2 5 6 20 (5.5) (6.3) Actuator side (14) (18) (Terminal

Series VQ Base Mounted Metal Seal/Rubber Seal

(1) [EX124-SCS2](2) EX120-SMJ1(-XP)(1) [EX124-SMJ1](2) AXT100-1-P (4) U S w e r U S U S VZ AXT100-1-F (4) U S AXT100-1-GU20 Note 1) Suffix XP for dust-proof SI unit.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

2) /2 n = 2, 4, 6, 8 15 + 40 (n 2) /2 n = 2, 4, 6, 8 2 (Different surfaces, Same surface) 1 10 15 D-M9mAV n 10 + 30 (n 2) /2 n = 2, 4, 6, 8 15 + 30 (n 2) /2 n = 2, 4, 6, 8 2 (Different surfaces, Same surface) 1 10 15 D-A9m n 10 + 40 (n 2) /2 n = 2, 4, 6, 8 15 + 40 (n 2) /2 n = 2, 4, 6, 8 2 (Different surfaces, Same surface) 1 10 D-A9mV n 10 + 30 (n 2) /2 n = 2, 4, 6, 8 D-F5m D-F5mW

HRX-OM-X037

method Air-cooled refrigeration Refrigerant R410A(HFC) Quantity of refrigerant kg 1.8 1.8 Control method PID control Ambient temperature C 2 to 45 Circulating fluid CH1 : Clear water 1, DI water (pure water) 9 CH2 : Clear water 1,DI water (pure water) Set temperature range C CH1 : 5 to 35 / CH2 : 10 to 40 Cooling capacity2 kW 10 1 8 21.5 1 8 Heating capacity3 kW 1.5 1 4.0 1 Temperature stability

CL

8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 19 13 73.5 8 9 10 57.5 6 3.5 8 Up to 300 55 80 8 20 18 15.5 20 13 38 19 13 83.5 10 9 10 69 9 4 9 Up to 300 64.5 90 8 19.5 26 17 25 22 45 19 13 83.5 12 9 10 69 9 4 9 Up to 300 64.5 90 8 19.5 26 17 32 22 45 30 16 90.5 14 10 15 76 11 4 8 Up to 300 70 21 100.5 32 11 22 40 24 52 H GQ GR H1 I N NA K L P PG PH PL PW RR S U Z ZZ MM NN Bore size (mm) 1/8 1/8 1/8 1/4 28

Title not found

1/4-28 3/8-24 B Hex 9/16 9/16 9/16 9/16 9/16 9/16 7/16 7/16 5/16 5/16 7/16 C Thread 10-32 10-32 1/16 NPT 1/8 NPT 1/16 NPT 1/8 NPT 10-32 1/16 NPT 10-32 10-32 10-32 D Height 3/4 1/2 1/2 1/2 3/4 3/4 9/16 9/16 17/32 17/32 1/2 Part # RB 1/4-10 RB 1/4-10 Short RB 1/4-1/16 Short RB 1/4-1/8 short RB 1/4-1/16 RB 1/4-1/8 RB 1/8-10 RB 1/8-1/16 RB 1/16-10 RB 428-10 RBB3/8-10 72 Caps & Swivel Nipple Swivel

HRX-OM-M090

Rated Rated Sensitivity voltage x size voltage current of leak [V] [A] current [mA] HRS012--10 HRS018--10 1-phase 100V AC(50Hz) 100 200 15 15 or 30 HRS01--10-T 1-phase 3 cores x Sharing 100V to 115V 14AWG (High pump head AC(60Hz) [Optional]) (3 cores x 2.0mm2) HRS012--20 HRS018--20 HRS024--20 1-phase 10 30 (including ground) 200, 200-230V AC 230 HRS0--20-T (50/60Hz) 15 30 (High pump head

High Vacuum Angle Valve, XL Series

0.3 1.0 0.3 0.8 0.3 Actuation pressure difference MPaNote 1) 0.5 0.25 0.4 0.2 0.2 0.15 Reverse pressure potential MPa Note 2) 1 x 10 -6 Port A pressure Pa 1.3 x 10 -9 {1 x 10 -8} at ordinary temperatures, excluding gas permeation Internal External 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Leakage Pa m 3/s {Torr l/s} VCR 1.3 x 10 -11 {1 x 10 -10} Fitting

Slide Unit Series CX2/CXWM/CXWL

Table (4) Housing Mounting Style with Auto Switch (CDBXW -) Component Parts for Mounting Switches and No. of Component Parts M L 10 16 20 25 32 Assembly model no. for mounting switch Component parts Material M L CDBXW 16MM L CDBXW 20MM L CDBXW 25MM L CDBXW 32MM L CDBXW 10M1 1 1 Magnet mounting block assembly Aluminum alloy 1 1 1 1 1 Aluminum alloy 1 Switch mounting rail Spacer Aluminum

Slide Unit Series CX2/CXWM/CXWL

Table (4) Housing Mounting Style with Auto Switch (CDBXW -) Component Parts for Mounting Switches and No. of Component Parts M L 10 16 20 25 32 Assembly model no. for mounting switch Component parts Material M L CDBXW 16MM L CDBXW 20MM L CDBXW 25MM L CDBXW 32MM L CDBXW 10M1 1 1 Magnet mounting block assembly Aluminum alloy 1 1 1 1 1 Aluminum alloy 1 Switch mounting rail Spacer Aluminum