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ON OFF 6 (1) 2 0.5MPa 2 10 (2) VR2110 3 )0.25MPa A 60sec (), (S) 0.8MPa 40sec B (3) (MPa) 3 OFF 1)4 1) OUT 0.7 0.6 VM1 VM1 () 0.5 0.4 0.3 0.2 ,0.6MPa VM2 VM2 0.1 ,0.3MPa 2 0 1 2 3 4 5 6 7 8 9 10 (m) 4 11 7. 4 (EXH) 1/8 (PIL) R 3 (R) 21/8 2 (A) 1 (P) 2M61 8 () 2x6.5 M6x1x12 4xM6 4X7 t=2 t=3 12 Revision history DVM VM100-A E (JIS) 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

NOTE2)Bracket assembly includes a bracket, bolts, nuts and washers. 12 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved 13

Model name corrected. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved

12No.VEX-OMY0001 () () 3(R) 2(A) 1(P) 1(P) 2(A) 3(R) () a b P1P2 2(A) 1(P) -13No.VEX-OMY0001 (7) (1) (2) (3) (4) (5) (6) (12) (7) (8) () (9) (5) (6) (14) (10) (P2) (5) (4) (11) (4) (13) DCAC (7) 14 No.VEX-OMY0001 o. (1) (2) (3) (4) (5) 1 ISO VG 32 (6) (7) (8) (9) (10) (11) (12) () (13) (14) ()() 15 No.VEX-OMY0001 C 2020.6 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

. * 12 VEX-OMV0001 : VW 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2017 SMC Corporation All Rights Reserved VEX-OMV0001

CAN_H Drain CAN_L VWhite Drain Blue Black Red MNS I/O connection is established (On line status) Green ON Red flashing I/O connection / time out (Minor communication error) V+ CAN_H Drain CAN_L VMAC ID duplication error or BUS OFF error (Serious communication error) Red ON White Drain Blue Blac Red Figure 1 URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

Description No.1 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 0 HW Set the address and speed in a local with switch on the SI unit Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 1 S / W mode Set address and communication speed by network1. : SW1-1 to 8 are invalid. Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

1558836 7/8 2 m PCA-1558849 7/8 6 m PCA-1564927 M12 B code2 mSPEEDCON PCA-1564930 M12 B code6 mSPEEDCON PCA-1564943 M12 B code2 mSPEEDCON PCA-1564969 M12 B code6 mSPEEDCON (9)DeviceNet PCA-1557633 M12 A code5 mSPEEDCON PCA-1557646 M12 A code5 mSPEEDCON (10) PCA-1557769 M12(4 )3 m PCA-1557772 M8(3 )3 m -78No.EX-OMN0029CN-D Revision history A B () C D 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 -10 to 50 oC (Max. surrounding air temperature rating: 50 oC) Operating temperature range The status display LED displays the power supply and communication status. -20 to 60 oC Storage temperature range 24 VDC Class2, 2 A Power supply 24 VDC Class2, 2 A Output DeviceNetTM status

Fieldbus system DeviceNet Compatible GW unit Operation Manual EX510-GDN1 URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2010-2017 SMC Corporation All Rights Reserved EX-OMH0023-

URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2010 SMC Corporation All Rights Reserved

Technical documentation giving detailed accessories information can be found on the SMC website (URL http://www.smcworld.com). 5 SV0 V 0 V for valve 2 1 4 3 SW24 V +24 V for SI unit and input URL http://www.smcworld.com SW0 V 0 V for SI unit and input 4 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 5 FE Ground Example of

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 -10 to 50 oC (Max. surrounding air temperature rating: 50 oC) Operating temperature range The status display LED displays the power supply and communication status. -20 to 60 oC Storage temperature range 24 VDC Class2, 2 A Power supply SI unit common status PROFIBUS DP status

Fieldbus system PROFIBUS DP Compatible GW unit Operation Manual EX510-GPR1 URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2009-2017 SMC Corporation All Rights Reserved EX-OMH0024

PWR SI unit power supply not connected or out of range OFF ON Normal communication URL http://www.smcworld.com L RUN OFF Communication termineted (Time over error) Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 ON Communication error L ERR Address or communication speed changed during operation Flashing Note: Specifications

mm 3 DC24 V() 40 mm 4 0 V() 5 (2)(SPEEDCON ) PCA-140180 7 L 7 1500[mm] 8 3000[mm] 9 5000[mm] B code No. 5.0 mm 1 DC24 V() AWG22 2 0 V() 1.27 mm 3 DC24 V() 21.7 mm 4 0 V() 5 / -31No.EX-OMP0004CN-I M12 10 EX9-AWTS BUS OUT IP67 (SI 1 ) -32No.EX-OMP0004CN-I Revision history A B C D E F [2016 7 ] G [2019 6 ] H [2019 11 ] I [2022 6 ] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

PWR OFF Power supply for SI unit is OFF Green ON Power supply for Solenoid valves is ON PWR(V) OFF Power supply for Solenoid valves is OFF URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 -10 to 50 oC (Max. surrounding air temperature rating: 50 oC) Operating temperature range The status display LED displays the power supply and communication status. -20 to 60 oC Storage temperature range 24 VDC Class2, 2 A Power supply 24 VDC Class2, 2 A Output CC-Link status

Fieldbus system CC-Link Compatible GW unit Operation Manual EX510-GMJ1 URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2003-2017 SMC Corporation All Rights Reserved EX-OMH0014-C