2/3 Port Valve

VNl Port size 01 02 03 04 VQ 1 8 1 4 3 8 1 2 Refer to table w for configuration. Thread T F N Rc(PT) NPTF G(PF) NPT Refer to p.4.0-15 for ordering coil only. Refer to table q for configuration.

Aluminum High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

Smooth Cylinder/Low Speed Cylinder

1/8 Up to 300 12 13 10 87 12 139 13 1/8 10 1/8 Up to 300 13 14 12 102 13 162 14 1/4 12 1/4 Up to 300 13 14 12 102 13 162 14 1/4 12 1/4 Up to 300 20 17 122 196 20 3/8 17 3/8 Up to 300 20 17 122 196 20 1/2 17 1/2 Up to 300 1206 Smooth Cylinder Series CG1Y With Mounting Bracket Axial foot style: CG1YL LH B LT 2 x LC ZZ + Stroke LS + Stroke M W W X Y X Y Z LX (Knock pin position) 4 x LD

CQ2

Note No. q w e r t y u i o !0 !1 !2 !3 !

HRX-OM-X071

1-5 1.7 Waste Disposal . 1-6 1.7.1 Disposal of refrigerant and compressor oil . 1-6 1.7.2 Disposal of product . 1-6 1.8 Material Safety Data Sheet (MSDS) . 1-7 Chapter 2 Name and Function of Parts . 2-1 2.1 Model Number of Product . 2-1 2.1.1 HRR050-A/W-20. 2-1 2.1.2 HRR050-A/W-40. 2-2 2.2 Name and Function of Parts . 2-3 2.2.1 HRR050-A-20/40(Air cooled type) . 2-3 2.2.2 HRR050-W-20/40(Water

Air Cylinder

7 @0 @1 q o u r t e w y Long stroke 80, 100 r y u u e i Long stroke 1001 to 1500 With air cushion o w !5 !1 !3 !6 !2 !4 !0 !9 @0 !8 !7 @1 @1 @2 q r t e Long stroke Component Parts No. Description Material Note 1 Rod cover Aluminum alloy Hard anodized 2 Tube cover Aluminum alloy Hard anodized 3 Piston Aluminum alloy No.

Possible to transfer a workpiece at low-speed.

1 !9 !2 @1 @3 e u o t @2 !8 @0 @0 @3 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 q w r y !5 !6 i w i !

Thermo-con/Rack Mount Type

1 850 W*1 900 W*2 1500 W*2 Alarm Refer to Alarm.

EXxx-OMZ0016

Note that frequencies 2446-2468 [MHz] correspond to (1) W-LAN Channel: CH.10 above.

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet Applicable tubing O.D.

4-channel Flow Monitor ( compatible)

U8 0x00 3 R/W (0) 0: PFA (PF2A5) 1: PFW (PF2W5) 2: PFd (PF2D5) 3: USEr (User setting) 4 R/W Setting of connection product Y U8 0x01 (1) Setting of connection sensor (For PF3W5) Y U8 0x00 0: FloW 1: tEMP 5 R/W (0) Unit (Selection of display unit, for PF2A5) Y U8 0x00 0: L 1: Ft 6 R/W (0) 7 R/W Unit setting (For PF2W5, PF2D5) Y U8 0x00 0: L 1: GAL (0) Temperature unit setting (For PF2W5) 0:

MY1

W (kg) 500 l 400 (450) W l 300 Weight (m) Caution W 1. If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Therefore, be sure to level the cylinder tube when mounting.

Hydraulic

) Load (kN) 126 Technical Data 2 Series CH2E, CH2F, CH2G, CH2H Stroke range limit charts: Bore sizes 50, 63, 80, 100 Bore size 50 B-rod C-rod 5 2 4 8 3 7 2 4 8 3 7 5 2000 6 1 6 1 1000 Stroke (mm) 500 100 50 0.5 1 5 10 20 30 0.5 1 5 10 20 30 Load (kN) Load (kN) Bore size 63 B-rod C-rod 2000 1 2 8 5 4 3 7 6 1 2 3 5 4 8 7 6 1000 Stroke (mm) 500 100 50 0.5 1 5 10 20 50 0.5 1 5 10 20 50 Load (

•

G flats 12 .., ~ w w ,. u Rat with rib .. ~ 2 .5 B '--=-1 1/ ' Flat with rib ' 8 . 8 >; ~ \L~~~!

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Note 1) Be sure to enter a symbol of the cable length in with reference to page 562. For type "W", DC voltage is only available.

HRX-OM-S004

) . 7-9 Chapter 8 Documents . 8-1 8.1 Specifications . 8-1 8.1.1 HRS100/150-A-20. 8-1 8.1.2 HRS100/150-A-40. 8-2 8.1.3 HRS100/150-A-46. 8-3 8.1.4 HRS100/150-W-20. 8-4 8.1.5 HRS100/150-W-40. 8-5 8.1.6 HRS100/150-W-46. 8-6 8.1.7 Refrigerant with GWP reference . 8-7 8.1.8 Communication specification . 8-7 8.2 Outline dimensions . 8-8 8.2.1 HRS100/150-A-20/40/46. 8-8 8.2.2 HRS100/150-W-20/40/

Thermo-chiller

Note q Overflow port assembly 1 w Automatic fluid fill assembly 1 e Automatic fluid fill tank assembly PE 1 r M4 screw 2 For securing automatic fluid fill assembly t M6 screw 2 For securing overflow port assembly y Hose clamp 1 For securing automatic fluid fill assembly hose u Hose clamp 1 For securing overflow port assembly hose i Automatic fluid fill label 1 w q r t x 2 x 2 y u i uBall

5

3@1 !2 w !1 Component Parts Replacement Parts/Seal Kit Bore size (mm) Kit no. Contents 125 CS2Y125A-PS Without cushion Consists of !6, !8, @0 140 CS2Y140A-PS No.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

How to Order JSXZ 3 1 C N 02 R 5 G D B w y e r t u o !

MY1

Combination description Holder mounting bracket X416 1 2 1 1 1 1 1 1 1 X417 1 1 1 1 1 2 1 1 1 Nil W Z A L H AZ LZ HZ Nil W A L H A, L, H, AS, LS, HS A, L, H AL, AH AL, LH AH, LH AL, AH AL, LH AH, LH A, L, H, AS, LS, HS A, L, H AL, AH AL, LH AH, LH X416 on one side X416 on both sides X416 on one side, X417 on the other side X416 on A unit side X416 on L unit side X416 on H unit side