Thermo-chiller

(English 1 pc./Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer 20A 1 pc., Barrel nipple 20A 1 pc., Drain pan for the pump 1 pc.

F

H O W T O O R D E R M I N I AT U R E F I T T I N G S P R O D U C T S E L E C T O R M P R O D U C T S E L E C T O R M A L E/M A L E N I P P L E: 1/8-1/8 H E X 1/4-1/4 H E X 3/8-3/8 H E X 1/2-1/2 H E X F L U S H TA P E R P L U G S: 18, 14, 38, 12, 34 P O R T S I Z E 3 M3 5 M5 01 18 3/4-3/4 H E X C O N F I G U R AT I O N See Product Selectors T U B E S I Z E ( W H E R E A P P L I C A B L E)

NCQ8

8" to 1" 1.38 1 1/4" to 2" 075 (3/4"), 106 (1-1/16") P-port H-thread C-depth 4 places Z Q 0.15-through hole J M2 bolt circle W M1 E I dia.

C85

1 w e !3 !

Stability of suction position,

1 !1 !2 !2 i i o o u u y y w w t t r r q q e e With buffer (Vacuum inlet: Vertical) With buffer (Vacuum inlet: Lateral) Component Parts No.

Environment

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

HRX-OM-M090

fluid and facility water . 8-7 Chapter 9 Documents . 9-1 9.1 Specifications List . 9-1 9.1.1 Product specification . 9-1 9.1.2 Refrigerant with GWP reference . 9-4 9.1.3 Communication specifications . 9-5 9.2 Outline dimensions . 9-6 9.3 Flow Chart . 9-7 9.3.1 HRS012-A-0 HRS018-A-0 HRS024-A-20 . 9-7 9.3.2 HRS012-W-0 HRS018-W-0 HRS024-W-20 . 9-7 9.4 Cooling capacity . 9-8 9.4.1 HRS012--10

High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 For XLF/XLG Symbol Changed part*2 Leakage [Pam3/s or less]*1 Internal External Nil None 1.3 x 1010 (FKM) 1.3 x 1010 (FKM) A w, e, r 1.3 x 108 1.3 x 108 B w, e 1.3 x 108 1.3 x 1010 (FKM) C r 1.3 x 1010 (FKM) 1.3 x 108 D w 1.3 x 108 1.3 x

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Contents No. q w e r t y u i o !0 !1 !2 !3 !

Integrated Controller

12 10 8 6 4 2 0 3000 mm/s2 3000 mm/s2 4 Work load: W [kg] Work load: W [kg] 3 2 5000 mm/s2 1 10 mm/s2 0 0 Speed: V [mm/s] 200 400 600 800 1000 1400 1200 0 Speed: V [mm/s] 200 400 600 800 1000 1200 EQFS40HA/Ball Screw Drive Horizontal/Lead 20 Vertical/Lead 20 70 5 4.5 4 3.5 3 2.5 2 1.5 1 0.5 0 3000 mm/s2 60 Work load: W [kg] Work load: W [kg] 50 40 3000 mm/s2 30 5000 mm/s2 20 10 10 mm/s2

IDX-OM-M051

V Timer type solenoid valve with auto drain IDF100F~150F-W 1.1 Part number of product 1 1 IDX-OM-M051 Air Dryer 1.

energy saving effect

Description Material Qty Note HRSE q Body PC, PP 1 w Element PP 1 e Extension piece Stainless steel 2 Conversion from NPT to Rc HRZ Replacement Element r Handle 1 When -H is selected HRZD HRS PF006 t Sealant tape PTFE 1 HRW e HECR Rc1 HEC NPT1 NPT1 HEB HED (256) e HEA Rc1 w IDH q (343) t r 183 HRSH Series u Wired Remote Controller When the wired remote controller is connected to the thermo-chiller

VFR

1, Connection bracket q, w, Gasket r, O-ring t, u Plug-in type VVFS3000-2A-1 End plate (U side) assembly VVFS3000-2A-2 !1 End plate (U) !1, Connection bracket q, w, Gasket r, O-ring t, u End plate (D) !2, Connection bracket q, w, Gasket e End plate (D) !2, Connection bracket q, w, Gasket e Non plug-in type Plug-in type Non plug-in type VVFS3000-3A-2 !

Vacuum Unit

3 q t i u w !5 With Pressure Switch for Vacuum with Energy Saving Function !7 !1 e o !0 r !2 With Pressure Sensor With Pressure Switch for Vacuum !6 Component Parts No.

LEC-OM02904

UVW)(UV W) U U V V M W W (UVW) M U V W U V W PE M P1-P2(11k~12KWP1-P) P1 P2 4 3 4 (C) 200V3.5kW CNP2P-D PC (11.2) (2) (a) DO CN1ON/OFF (b) CN3DC24V (c) CN3SDDOCOM CN3 DOCOM SD 4.1.3 (1) (a) (b) (10.4) (c) (2) 4 4 4 4.2 (1) b01(1) (25) ON 3000r/min (2) 5 No.

VQZ1000/2000/3000

Metal seal Rubber seal (1) None (1) Function (1) Yes Symbol Specifications DC (1.0 W) AC (1) Yes (W/o indicator light) Yes (W/o indicator light) (3) Nil Standard (1) (1) High pressure (Metal seal only) Note 1) Applicable to VQZ2000 and 3000.

HRS100/150

Description Material Qty Note q Body PC, PP 1 w Element PP 1 e Extension piece Stainless steel 2 Conversion from NPT to Rc HRSH HRSE Replacement Element r Handle 1 When -H is selected HRS PF006 t Sealant tape PTFE 1 HRZ HRZD e Rc1 HRW HECR NPT1 NPT1 HEC (256) HEB e HED Rc1 w HEA q IDH (343) t r 117 HRS100/150 Series i Wired Remote Controller When the wired remote controller is connected

Table of Contents

Port size KKA3P-01M-1 -02M-1 -03M-1 KKA4P-02M-1 -03M-1 -04M-1 KKA6P-03M-1 -04M-1 -06M-1 KKA3S-01M-1 -02M-1 -03M-1 KKA4S-02M-1 -03M-1 -04M-1 KKA6S-03M-1 -04M-1 -06M-1 R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type Female thread type Port size Body size Part no.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M4: L2 = 8 mm Applicable shaft types: S, W, Y L1 L1 = Q1 = M LL LL L2 = Q2 = M Q1 (mm) (mm) Size Size Keyway dimensions 30 50 63 80 100 30 50 63 80 100 Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc 1/8 Rc 1/4 Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc 1/8 Rc 1/4 2.5 4 5 4 5 6.8 2.5 4 5 (mm) 4 5 6.8 6.8 8.5 10.3 8 LL 3 5 5 5 5 Key groove

LEC-OM02704CN

0 1 1 1 1 b6 0 0 1 1 0 0 1 1 b5 0 1 0 1 0 1 0 1 b8 b5 b4 b3 b2 b1 C 0 1 2 3 4 5 6 7 R 0 0 0 0 0 NUL DLE Space 0 P 0 0 0 1 1 SOH DC1 1 A Q 0 0 1 0 2 STX DC2 2 B R 0 0 1 1 3 ETX DC3 3 C S 0 1 0 0 4 4 D T 0 1 0 1 5 5 E U 0 1 1 0 6 6 F V 0 1 1 1 7 7 G W 1 0 0 0 8 ( 2 H 1 0 0 1 9 ) 9 I Y i 1 0 1 0 10 J 1 0 1 1 11 + 1 1 0 0 12 L 1 1 0 1 13 = M m 1 1 1 0 14 N 1