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Monitor output (BLK) 2 4 24 VDC Power supply voltage 3 Ground (BLU) 5 W Maximum power consumption 0-10V or 4-20mA [Sink Type] Input signal 1-5 VDC full stroke Output signal 32~122F (0-50C) Operating temperature 0.5mm (50mm stroke) OR 1.0mm (100mm stroke) Repeatability Protection IP65 equivalent MPC Cylinders Cables Part Numbers MPC25-50-DCN070PN MPC40-100-DCN069PN MPC25-50-DCN708SN MPC40-

Between case and 12VDC: 500V AC for 1min REC Withstand voltage Insulation resistance Between case and AC line: 500V DC, 50M or more RHC Ambient temperature 0 to 50C (No freezing) Ambient humidity 35 to 85% RH (No condensation) MTS Square wave noise from a noise simulator (pulse duration 1s) 100V AC line 1500V, 24V DC line 36V I/O line 600V Noise resistance CC Vibration resistance Endurance

710 670 20 700 230 120 222 1.17-19 Booster Lube Series ALB900 Standard Specification AC Centralized control of multipoint lubrication Model ALB900-10 ALB900-20 ALB900-30 AV Port (Bypass lubrication adapter) Rc(PT)1 Rc(PT)2 3 inch flange Stable oil feeding with a micromist Port size (Body) IN: Rc(PT) OUT: Rc(PT) Air 1.5MPa 0.4 to 1.0MPa 0.05 to 0.2MPa 5000 Turbine oil class 1 ISO VG32 5 to 50C

size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi or less) Ambient and fluid temperature 5 to 50C

to 7002m AN800 to 9003m AN200 to 900 Jis symbol Specifications/Model Specifications Model AN101 -01 AN110 -01 AN120 -M3 AN120 -M5 AN202 to 402 AN202 to 402 Condition: 0.5MPa at supply pressure of solenoid valve Measurement distance: 1m R(PT) R(PT) M3 M5 1 8 1 8 Port size Fluid Noise reduction dB(A) 16 21 13 18 Compressed air Max. operating press Ambient and fluid temperature 1.0MPa 5 to 50C

Approx. 10k Input impedance Current type Approx. 250k 1 to 5 VDC (Load impedance: 1k or more) Output accuracy: Within 6% (full span) Analog output Output signal Linearity Within 1% (full span) Hysteresis Repeatability Within 0.5% (full span) Within 0.5% (full span) Sensitivity Within 0.2% (full span) Within 0.12% (full span)/C Temperature characteristics Operating temperature range 0 to 50C

PFA Metric size TL LQ-GJ LQ-GK 1, 2 Inch size J type K type TIL LQ-GL LQ-GM 1, 2, 3, 4, 5, 6 L type M type Features 5 Applicable Fluids Material and fluid compatibility check list for high purity fluoropolymer fittings Material Chemical Fluoro resin PFA Acetone Ammonium hydroxide Isobutyl alcohol Isopropyl alcohol Hydrochloric acid Ozone (dry) Hydrogen peroxide Concentration 5% or less, 50C

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model Maximum flow capacity l/min (ANR) 1000 200 500 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 0.43 0.68 Weight kg Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less Ambient and fluid temperature 5 to 50C Filtration degree

N.O. 101.2 kPa to 0.2 VPA344 544 744 Pilot pressure (MPa) Ambient and fluid temperature (C) Lubrication Mounting orientation Impact/Vibration resistance (m/s2) Note) Same as operating pressure (Min. 0.2 MPa) 10 to 50C (No freezing. Refer to page 5-11-4.) Not required (Use turbine oil Class 1 lSO VG32, if lubricated.)

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Option 01 1/8 Nil Without bracket 02 1/4 VR B Foot bracket VH Specifications VHS Fluid Air Operating pressure range (MPa) 0 to 1.0 Pilot pressure range (MPa) 0.2 to 1.0 Ambient and fluid temperature (C) 10 to 50C (No freezing. Refer to page 5-11-4.)

0.5 0.1 (With power saving circuit) F Note) Note) An option only applicable to 24 VDC plug lead type. 4-11-2 3 Series S070 3 Port Solenoid Valve Compact Direct Operated Specifications Valve construction Fluid Maximum operating pressure Proof pressure Ambient and fluid temperature Note 1) Poppet Air/Inert gas/Low vacuum (1.33 x 102 Pa) 0.3 MPa (0.35 W, 0.1 W), 0.5 MPa (0.5 W) 1 MPa 10 to 50C

Moreover, the residual voltage of the diode is approximately 1 V. 4-3-3 4 For details about certified products conforming to international standards, visit us at www.smcworld.com. 3 Port Direct Operated Solenoid Valve Rubber Seal Series SY100 Specifications Fluid Air 10 to 50C (No freezing. Refer to page 4-18-4.)

Operation AC, 100 VDC or more 0.2 to 0.9 MPa Operating pressure range 101.2 kPa to 0.9 MPa Equivalent operating pressure Min. 0.2 MPa In the case of indicator light assembly Terminal no. 1 (+) External pilot pressure 30 ms or less (at the pressure of 0.5 MPa) Response time (1) Coil Coil Max. operating frequency 5 c/s (Min. operating frequency: 1 c/30 days based on JIS B 8374-1981) Max. 50C

V100 Direct operated type 2 position single solenoid Type of actuation Fluid Air SY 5 to 50C (No freezing. Refer to page 4-18-4.) Ambient and fluid temperature Response time (at 0.5 MPa) (1) 10 ms or less (Standard), 15 ms or less (Low power consumption type) Non-locking push type Not required (Use turbine oil Class 1 ISO VG32, if lubricated.)

0.09 0.09 0.11 0.09 0.14 0.09 0.09 0.14 0.09 0 to 0.7 Body ported 80 (1) 90 (1) 2 3 101.2 KPa to 0.1 2 3 M5 x 0.8 Rc 1/8 Base mounted (With subplate) 0 to 0.7 120 130 101.2 kPa to 0.1 Note) VKF33: Add 10 g to each when equipped with bracket. 4-13-4 5 3 Port Direct Operated Poppet Solenoid Valve Series VKF300 Standard Specifications Direct operated type 2 position single solenoid Air Max. 50C

8 9 Large Size 3 Port Solenoid Valve Rubber Seal Series VP3145/3165/3185 Specifications JIS Symbol -X80 Valve configuration Type of actuation Fluid Operating pressure range Pilot pressure Ambient and fluid temperature Lubrication (1) External pilot 3 port solenoid valve Double solenoid (-X80), Single solenoid (-X81) Air 101.2 kPa to 0.8 MPa 85 to 115% of main pressure, Min. 0.2 MPa 0 to 50C

Inert gas Fluid Maximum operating pressure 0.7 MPa 0.8 MPa 0.7 MPa (5) 0 MPa (0.1 MPa ) Minimum operating pressure C[dm3/(sbar)] 0.042 0.055 V100 b 0.27 1 2 0.22 Cv SY 0.011 0.014 Flow characteristics C[dm3/(sbar)] 0.045 0.083 SYJ Valve specifications Electricity specifications b 0.28 2 3 0.28 Cv 0.012 0.021 VK ON: 3.5 ms, OFF: 2 ms ON: 3.5 ms, OFF: 2.5 ms Response time (1) VZ (2) 10 to 50C

Operating pressure range 0 to 0.9 MPa 10 to 50C (No freezing. Refer to page 4-18-4.) Ambient and fluid temperature Response time 20 ms or less (at the pressure of 0.5 MPa) (1) Max. operating frequency 10 Hz Not required (Use turbine oil Class 1 ISO VG32, if lubricated.) Lubrication Manual override Caution Non-locking push type 1.

Refer to the accessories on page 4-7-14. 4-7-9 10 Series VT317 Standard Specifications Type of actuation Direct operated type 2 position single solenoid Air Fluid Operating pressure range 0 to 0.9 MPa 10 to 50C (No freezing. Refer to page 4-18-4.)

VO325-00 VQZ VT325-T Specifications VZ Type of actuation Direct operated type 2 position single solenoid VS Air Fluid Operating pressure range 0 to 1.0 MPa 10 to 50C (No freezing. Refer to page 4-18-4.)