Load Mass (Horizontal Mounting)(kg): 5~9.2, Table Size Length L(mm): 210.5, Table Material: [Aluminum] Aluminum, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide 1 axis, Table Size Width W(mm): 60, Table Size Height H(mm): 46, Table Parallelism(µm): 95, Table Surface Treatment: Heat Treated, Operating Pressure(MPa): 0.15 to 0.7, Environment: General Purpose

Load Mass (Horizontal Mounting)(kg): 5~9.2, Table Size Length L(mm): 210.5, Table Material: [Aluminum] Aluminum, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide 1 axis, Table Size Width W(mm): 60, Table Size Height H(mm): 46, Table Parallelism(µm): 95, Table Surface Treatment: Heat Treated, Operating Pressure(MPa): 0.15 to 0.7, Environment: General Purpose

Load Mass (Horizontal Mounting)(kg): 5~9.2, Table Size Length L(mm): 238.5, Table Material: [Aluminum] Aluminum, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide 1 axis, Table Size Width W(mm): 60, Table Size Height H(mm): 46, Table Parallelism(µm): 105, Table Surface Treatment: Heat Treated, Operating Pressure(MPa): 0.15 to 0.7, Environment: General

Load Mass (Horizontal Mounting)(kg): 5~9.2, Table Size Length L(mm): 266.5, Table Material: [Aluminum] Aluminum, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide 1 axis, Table Size Width W(mm): 60, Table Size Height H(mm): 46, Table Parallelism(µm): 125, Table Surface Treatment: Heat Treated, Operating Pressure(MPa): 0.15 to 0.7, Environment: General

Load Mass (Horizontal Mounting)(kg): 5~9.2, Table Size Length L(mm): 266.5, Table Material: [Aluminum] Aluminum, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide 1 axis, Table Size Width W(mm): 60, Table Size Height H(mm): 46, Table Parallelism(µm): 125, Table Surface Treatment: Heat Treated, Operating Pressure(MPa): 0.15 to 0.7, Environment: General

Load Mass (Horizontal Mounting)(kg): 5~9.2, Table Size Length L(mm): 266.5, Table Material: [Aluminum] Aluminum, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide 1 axis, Table Size Width W(mm): 60, Table Size Height H(mm): 46, Table Parallelism(µm): 125, Table Surface Treatment: Heat Treated, Operating Pressure(MPa): 0.15 to 0.7, Environment: General

Load Mass (Horizontal Mounting)(kg): 5~9.2, Table Size Length L(mm): 238.5, Table Material: [Aluminum] Aluminum, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide 1 axis, Table Size Width W(mm): 60, Table Size Height H(mm): 46, Table Parallelism(µm): 105, Table Surface Treatment: Heat Treated, Operating Pressure(MPa): 0.15 to 0.7, Environment: General

Load Mass (Horizontal Mounting)(kg): 5~9.2, Table Size Length L(mm): 266.5, Table Material: [Aluminum] Aluminum, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide 1 axis, Table Size Width W(mm): 60, Table Size Height H(mm): 46, Table Parallelism(µm): 125, Table Surface Treatment: Heat Treated, Operating Pressure(MPa): 0.15 to 0.7, Environment: General

46?0.11?0.1?------??--Translucent (color of material)Please refer to the applicable fluid in page 41.1 MPa6.9 MPa20260CSuper PFA

Main Body Shape: Unit, Additional Function: Silencers / Filter, Ultimate Vacuum(kPa): -80, Air Consumption Flow Rate(l/min): 46, Vacuum Port Connecting Port Shape: M5, Vacuum Port One-Touch Fitting Size: -, Air Supply Port Connecting Shape: M5, Air Supply Port One-Touch Fitting Size: -, Operation Category: Normally Closed, Application: Individual Item, Operating Pressure Range(MPa): 0.3～0.5

Main Body Shape: Unit, Additional Function: Silencers / Filter, Ultimate Vacuum(kPa): -80, Air Consumption Flow Rate(l/min): 46, Vacuum Port Connecting Port Shape: M5, Vacuum Port One-Touch Fitting Size: -, Air Supply Port Connecting Shape: M5, Air Supply Port One-Touch Fitting Size: -, Operation Category: Normally Closed, Application: Individual Item, Operating Pressure Range(MPa): 0.3～0.5

Main Body Shape: Unit, Additional Function: Silencers / Filter, Ultimate Vacuum(kPa): -80, Air Consumption Flow Rate(l/min): 46, Vacuum Port Connecting Port Shape: M5, Vacuum Port One-Touch Fitting Size: -, Air Supply Port Connecting Shape: -, Air Supply Port One-Touch Fitting Size: -, Operation Category: Normally Closed, Application: Manifolds, Operating Pressure Range(MPa): 0.3～0.5, Operating

Main Body Shape: Unit, Additional Function: Silencers / Filter / Valves for Vacuum Generation / Mechanical Pressure Switch for Vacuum / Vacuum Destruction Support, Ultimate Vacuum(kPa): -84, Air Consumption Flow Rate(l/min): 46, Vacuum Port Connecting Port Shape: M5, Air Supply Port Connecting Shape: M5, Application: Individual Item, Operating Temperature Range(°C): 5:50～, Suction Flow(l/

Main Body Shape: Unit, Additional Function: Silencers / Filter / Valves for Vacuum Generation / Mechanical Pressure Switch for Vacuum / Vacuum Destruction Support, Ultimate Vacuum(kPa): -84, Air Consumption Flow Rate(l/min): 46, Vacuum Port Connecting Port Shape: M5, Air Supply Port Connecting Shape: M5, Application: Individual Item, Operating Temperature Range(°C): 5:50～, Suction Flow(l/

Main Body Shape: Unit, Additional Function: Silencers / Filter / Valves for Vacuum Generation / Mechanical Pressure Switch for Vacuum / Vacuum Destruction Support, Ultimate Vacuum(kPa): -84, Air Consumption Flow Rate(l/min): 46, Vacuum Port Connecting Port Shape: M5, Air Supply Port Connecting Shape: M5, Application: Individual Item, Operating Temperature Range(°C): 5:50～, Suction Flow(l/

Main Body Shape: Unit, Additional Function: Silencers / Filter / Valves for Vacuum Generation / Mechanical Pressure Switch for Vacuum / Vacuum Destruction Support, Ultimate Vacuum(kPa): -84, Air Consumption Flow Rate(l/min): 46, Vacuum Port Connecting Port Shape: M5, Air Supply Port Connecting Shape: M5, Application: Individual Item, Operating Temperature Range(°C): 5:50～, Suction Flow(l/

Main Body Shape: Unit, Additional Function: Silencers / Filter / Valves for Vacuum Generation / Mechanical Pressure Switch for Vacuum / Vacuum Destruction Support, Ultimate Vacuum(kPa): -84, Air Consumption Flow Rate(l/min): 46, Vacuum Port Connecting Port Shape: M5, Air Supply Port Connecting Shape: M5, Application: Individual Item, Operating Temperature Range(°C): 5:50～, Suction Flow(l/

Main Body Shape: Unit, Additional Function: Silencers / Filter / Valves for Vacuum Generation / Mechanical Pressure Switch for Vacuum / Vacuum Destruction Support, Ultimate Vacuum(kPa): -84, Air Consumption Flow Rate(l/min): 46, Vacuum Port Connecting Port Shape: M5, Air Supply Port Connecting Shape: M5, Application: Individual Item, Operating Temperature Range(°C): 5:50～, Suction Flow(l/

Main Body Shape: Unit, Additional Function: Silencers / Filter / Valves for Vacuum Generation / Mechanical Pressure Switch for Vacuum / Vacuum Destruction Support, Ultimate Vacuum(kPa): -84, Air Consumption Flow Rate(l/min): 46, Vacuum Port Connecting Port Shape: M5, Air Supply Port Connecting Shape: M5, Application: Individual Item, Operating Temperature Range(°C): 5:50～, Suction Flow(l/

Main Body Shape: Unit, Additional Function: Silencers / Filter / Valves for Vacuum Generation / Mechanical Pressure Switch for Vacuum / Vacuum Destructive Valve, Ultimate Vacuum(kPa): -84, Air Consumption Flow Rate(l/min): 46, Vacuum Port Connecting Port Shape: M5, Air Supply Port Connecting Shape: M5, Application: Individual Item, Operating Temperature Range(°C): 5:50～, Suction Flow(l/min