Fieldbus system Digital unit

I/O signal assignment (EX600-DM E) Configuration Pin number 1 2 3 4 5 6 7 8 Signal name Input 0 Input 1 Input 2 Input 3 Input 4 Input 5 Input 6 Input 7 Input signal Bit 0 Bit 1 Bit 2 Bit 3 Bit 4 Bit 5 Bit 6 Bit 7 Pin number 14 15 16 17 18 19 20 21 Signal name Output 0 Output 1 Output 2 Output 3 Output 4 Output 5 Output 6 Output 7 Output signal Bit 0 Bit 1 Bit 2 Bit 3 Bit 4 Bit 5 Bit 6 Bit

ITV

ITV X88 2 0 1 0 S 0 1 2 High-speed response time specifications Model Pressure range 1 2 1000 type 2000 type 1 3 5 0.1 MPa 0.5 MPa 0.9 MPa Pressure display unit 2 3 4 5 MPa kgf/cm2 bar PSI kPa Power supply voltage Input signal 0 1 24 VDC 12 to 15 VDC 0 1 2 3 Current 4 to 20 mA (Sink type) Current 0 to 20 mA (Sink type) Voltage 0 to 5 VDC Voltage 0 to 10 VDC Cable connector type S L N Straight

LEY-OM007

-46- 7.5. 1. 2. (1mm ) 3. 4. N Nm LEY16 LE-D-2-1 10 0.36 LEY25 LE-D-2-2 19 0.63 LEY32 LE-D-2-3 30 1.5 5. LEY32 Nm LEY16 0.63 LEY25 1.5 LEY32 5.2 6. -47- 8.

High Purity Chemical Valve

Orifice dia. 4 8 12 20 Symbol 2 3 4 5 Body class 2 3 4 5 Valve type Tubing size 0 1 2 N.C.

CNA

Yes 3-wire (NPN) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 3-wire (PNP) 24 V Grommet 12 V 2-wire Water resistant (2-color indication) With diagnostic output (2-color indication) Magnetic field resistant (2-color indication) 4-wire (NPN) IC circuit 5 V, 12 V 2-wire Lead wire length symbols: 0.5 mNil (Example) A54 3 m L (Example) A54L 5 m Z (Example) A54Z Solid state

CNA

0 u @5 i !5 !1 o q %0 y $3 r #3 #1 $1 #6 B A @3 !4 %2 !3 $0 @8 #7 $2 w #0 $7 $9 $5 %1 %3 $6 @1 @4 !8 @0 !7 !

IDG

(2) (2) Compressed air Fluid Range of operating conditions Inlet air pressure (MPa) 0.3 to 0.85 0.3 to 1.0 Inlet air temperature (C) 5 to 55(3) (3) 5 to 50 Ambient temperature (C) 5 to 50 5 to 55 5 to 50 5 to 50 Outlet air atmospheric pressure dew point (C) Inlet air flow rate (l/min (ANR)) (4) Standard performance 20 62 125 250 375 625 900 1190 725 31 Outlet air flow rate (l/min (ANR))

Cylinder with Turntable Series MGT

(Tolerance 30%) Hysteresis may fluctuate due to the operating environment. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 10 10 5 5 10 15 Auto Switch Mounting Bracket/Part No.

IDX-OM-W034

2 2 Installation . 2 2 2 2 1 Location . 2 2 2 2 2 Tie Down . 2 3 2 2 3 Air piping . 2 3 2 2 4 Drain Tube . 2 3 2 2 5 Electric Wiring . 2 4 2 3 Cautions for Reinstallation . 2 6 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart . 3 2 3 6 Precautions for long-term non-operation

CXS

5 t @0 @3 r !9 !8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 @9 !7 o i Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Component Parts No. Description No.

CXS

8 @2 @6 !4 !2 @4 @5 !5 t !5 t r !9 !8 @2 w !4 !2 !0 !0 !6 !6 i u !7 o i u !7 o MX MTS MY CY !3 y !1 e q !3 y !1 q @7 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CXSJM20 to 32 CXSJL20 to 32 CX @5 i u !7 o !5 t !6 r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !

ZR

M5 PD port Common vacuum release pressure port Rc 1/8 PV port Air supply pressure port M5 PS port 2-Rc 1/2 EXH port 3 3 1.5 1 2.5 1.5 1 2.5 7.5 7.5 Pilot valve supply pressure port Common exhaust port 4.5 4.5 Rc 1/8 PV port Air supply pressure port 2-M5 PS port Common pilot supply port 2-Rc 1/8 PV port Common air supply pressure port Stations (mm) 1 85 104 2 118 137 3 151 170 4 184 203 5

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

MQQ

5 !0 !1 !2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

MQQ

5 !0 !1 !2 u y i o MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

Fieldbus system Ethernet POWERLINK compatible SI unit

With DIN rail bracket 2 M12 (5 pin) 3 With DIN rail bracket (Specified for SY series) 3 7/8 inch (5 pin) Summary of Product parts EX600-ED2EX600-ED3No.

Cylinder with Lock

5 !6 @5 #9 #1 $4 #0 #2 B A #8 #7 $0 $1 $2 $3 $5 $7 $8 $9 @9 !3 !4 !7 !8 @0 !9 @1 @3 @4 @6 @2 w @7 #5 B section (Release piston bushing) A section: 50 to 100 100 80 63 50 40 !2 !2 Component Parts Component Parts Note No. 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 No.

Programless controller (with stroke study) Step motor (servo 24 VDC)

Brown 2 A B-1 Red 1 A A-1 Cable length (L) Orenge 6 B B-2 Yellow 5 B A-2 1 1.5m Green 3 COM-A / COM B-3 Blue 4 3 3m COM-B / A-3 Shield 5 5m Cable color T erminal no.

4-channel Flow Monitor ( compatible)

[F30] Accumulated flow value hold setting is completed : Data memorization is performed every 5 minutes, this means that the accumulated flow value for up to 2 or 5 minutes before the power supply is turned off will not be added to the device memory.

OMR0031

Note 5) Cables are not included. 15 - 3.2 2 Parts description Details of the parts of the controller. (1) (2) (3) Remove the housing. (10) (8) (4) (5) ON (6) ON (7) OFF 1 2 3 4 5 6 (9) Pulse input signal switch (default) No.