PSxx-OMP0001E

Lead wire length Output specification CE-compliant 10 For positive pressure 3 m L Wetted part material Sensor part: Silicon, Body part: PBT, O-ring: HNBR Nil No For vacuum and residual puressure 11 Q CE-compliant Piping specification For vacuum 12 R06 6 reducer URL http://www.smcworld.com R07 1/4 reducer Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3

PSxx-OMQ0004E

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2013-2018 SMC Corporation All Rights Reserved PS-OMQ0004-B

Digital Gap Checker

[June 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015-2022 SMC Corporation All Rights Reserved No.PS-OMT0002-E

ISA3-IOLink.eng

URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 SET 2 secs. Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved PS-OMW0010

ISA2.eng

Green 1 URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 6 9 5. Apply a thickness gauge again and check that the Green turns on.

PSE5xx.eng

Sumitomo 3M OMRON Series Tyco Electronics SMC corporation PSE53# 3-1473562-4 Connector for sensor lead wire Lever PSE54# 37104-3101-000FL ZS-28-C 1-1473562-4 PSE550 XN2A-1430 For low differential pressure For low pressure For positive pressure For compound pressure For vacuum URL https://www.smcworld.com Pressure range PSE56# 1473562-4 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

Pressure Sensor

[July 2018] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2010-2018 SMC Corporation All Rights Reserved No.PS-OMG0009-D

EXxx-OMA1018_Eng

Diagnostic URL https://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Refer to the SMC website (URL https://www.smcworld.com) to obtain more detailed information about diagnostic.

IP Address Setting Tool (Interactive Type)

[December 2020] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com NOTE: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. EtherNet/IPTM is a trademark of ODVA. 2018-2020 SMC Corporation All Rights Reserved. No.EX-OMV1026-B

JSY1000/3000/5000 Series (Plug-in)

If the product has failed, then please return the valve without any modifications. 41 No.JSY1000V-OMW0002-B Revision history Renewal 2021.11 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC

JSY1000/3000/5000 Series (Non Plug-in)

No.JSY1000V-OMW0004-A One-touch Fittings, Clip, Port Plate, Tube Releasing Tool Refer to How to Replace One-touch Fittings on page 13 for the replacement method. 21 No.JSY1000V-OMW0004-A Manifold Options 22 No.JSY1000V-OMW0004-A 23 No.JSY1000V-OMW0004-A 24 No.JSY1000V-OMW0004-A 25 No.JSY1000V-OMW0004-A Revision history DIN terminal, M12 connector added. 2023.4 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

SY3000/5000/7000 Series Plug-in Type

In addition, in the case of trouble, please send it back to the supplier for repair or replacement. 21 No.SY3000V-OMM0002-B Revision history A Safety instructions Po B NEW SY7000 Safety instructions Tightening torque Construction WQ 1st Printing :oS 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications

SY3000V-OMY0001

SY7000 16 No.SY3000V-0MY0001 2 2 2 2 3 // 3 3 3 SY3000 SY5000/ SY7000: /HNBR SY3000 SY5000 SY7000 P.145 17 No.SY3000V-0MY0001 (E) () () (PE) 18 No.SY3000V-OMY0001 No. 1(ISO VG 32) (R) 19 No.SY3000V-OMY0001 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to

VF1000-OMP0001

DXT170-80-4A-20 6 (1mm) 0.6 Nm VF1000 1.4 Nm VF3000 1.4 Nm VF5000 1.4 Nm VF130 VF133 DXT144-12 DXT031-44-1 M4X39.5 DXT031-30-2 VF330 VF333 DXT155-25-1 VF340 VF343 VF350 AXT620-32-1 M4X48 DXT156-9-8 VF520 DXT156-9-1 VF544 10 VF1000-OMP0001 R () P 11 VF1000-OMP0001 No. 1ISO VG 32 (R) 1. 2. 3. 4. 5. 6. 7. 12 VF1000-OMP0001 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

VP4_50-OMU0001

P AorB ) )VP4350 () VP4450() A B EA EB () ()0() DIN 1 1) 1)() 2) 2)2a 2b 3)3a 3)2a 2b 4) 2. 0.5Nm20% 1) 90 2) No.12 (+/-) 3)3e 3f(Y ) DIN DIN , +COM-COM 3f 0.5Nm15% 1 A 2 B 3 COM 8 VP4_50-OMU0001 (EA,EB ) () (PE) 9 VP4_50-OMU0001 Ass'y 1 (ISO VG-32) Ass'y Ass'y Ass'y 1. 2. 3. 4. 5. 6. 10 VP4_50-OMU0001 Revision history :Vo 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

VQ1000V-OMV0001

) DIN ) DIN 0.40.6Nm No.VQ1000V-OMV0001 9 - 1) 2) 1) 1) 2) OFF DC 3% AC 8% 3 Assy Assy 1) OFF DC 3% AC 8% 2) 3) 1 1-1) VQ1000 : 0.250.35Nm VQ2000 : 0.50.7Nm 1-2) 1-3) 10 No.VQ1000V-OMV0001 2 2-1) 2-2) 2-3) 2-4) Assy 3R 1set 200cc (at 0.5MPa) 3-1) VQ1000 : 0.250.35Nm VQ2000 : 0.50.7Nm 3-2) 4 11 No.VQ1000V-OMV0001 Revision history VT 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

VQC5000Series

Insufficient bolt tightening After stopping air and re-tighten the bolts. 21 No.VQC5000V-OMU0002 S Revision history 1st printing : UT 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation

VQZ100V-OMT0001

16 No.VQZ100V-OMT0001 Revision history TW 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved No.VQZ100V-OMT0001

VFS4000-OMY0001

No. 15 No.VFS4000-OMY0001 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved No.VFS4000-OMY0001

VFR6000 Series

In addition, in the case of trouble, please send it back to the supplier for repair or replacement. 12 VFR6000-OMA0001-B Revision history A Renewal MZ B Safety Instructions PQ 1st printing: AZ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation