Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/0.5m Lead Wire and No Connector, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Non-Cassette Type, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/0.5m Lead Wire and No Connector, End Lock: -

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

Model: 1000 (SV1000), Disk Type: 2A (EXH Block Disk - Exhaust)

Model: 2000 (SV2000), Disk Type: 2A (EXH Block Disk - Exhaust)

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: A (2 pcs D-A93 w/0.5m Lead Wire and No Connector)

Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: A (2 pcs D-A93 w/0.5m Lead Wire and No Connector)

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

ISE7xG.eng

Name Lead wire colour Function IO-Link status indicator light 1 L+ Brown 18 to 30 VDC LCD display 4 Refer to the product catalog or SMC website (URL https://www.smcworld.com) for more information about the product specifications and outline dimensions.

Body Size: 30, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 03 (3/8), Option: G (for Sizes 20, 25, 30, 40 Round Type Pressure Gauge w/Limit Indicator; for Size10: Round Type Pressure Gauge w/o Limit Indicator), Attachment: S (Pressure Switch), Semi-Standard 1: J (Drain Guide 1/8: Size 20; Drain Guide 1/4: Sizes 25, 30, 40), Semi-Standard 2: Standard

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa); Sub-atmospheric : 100mm Hg absolute to 30 psig (-88kPa to 0.2MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Range Options: A (Sub-atmospheric), Ports: 3PW [3 Ports (1-In; 2-Out; 4-Gauge Port Outlet)], Connections, Inlet

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa); Sub-atmospheric : 100mm Hg absolute to 30 psig (-88kPa to 0.2MPa)], Surface Finish: 10 μin. (0.25 μm), Standard, Range Optons: A (Sub-atmospheric), Ports: 3PW [3 Ports (1-In; 2-Out; 4-Gauge Port Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port, Inlet: V3 [-30

Body Size: 30, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 3/8, Option: for Sizes 20, 25, 30, 40 Round Type Pressure Gauge w/Limit Indicator; for Size10: Round Type Pressure Gauge w/o Limit Indicator, Attachment: Pressure Switch, Semi-Standard 1: Drain Guide 1/8: Size 20; Drain Guide 1/4: Sizes 25, 30, 40, Semi-Standard 2: Standard

Body Size: 30, Thread: N (NPT), Port Size: 02 (1/4), Option: G (For Sizes 10, 20, 30, 40 Round Type Pressure Gauge w/Limit Indicator; For For Size 10: Round Type Pressure Gauge w/o Limit Indicator ), Semi-Standard 1: 8 (Metal Bowl w/Level Gauge), Semi-Standard 2: Z (NPT Porting requires Z, Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 30, Thread: N (NPT), Port Size: 03 (3/8), Option: G (For Sizes 10, 20, 30, 40 Round Type Pressure Gauge w/Limit Indicator; For For Size 10: Round Type Pressure Gauge w/o Limit Indicator ), Semi-Standard 1: 8 (Metal Bowl w/Level Gauge), Semi-Standard 2: RZ (R + Z)

Body Size: 30, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: 03 (3/8), Mounting: B (Bracket), Semi-Standard, Body Size 10: Standard, Semi-Standard, Body Size 20: Standard, Semi-Standard, Body Size 30, 40, 50 & 60: 8 (Metal Bowl w/Level Gauge)

Body Size: 30, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: 02 (1/4), Mounting: B (Bracket), Semi-Standard, Body Size 10: Standard, Semi-Standard, Body Size 20: Standard, Semi-Standard, Body Size 30, 40, 50 & 60: 8R (8 + R)

Body Size: 30, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: 02 (1/4), Mounting: B (Bracket), Semi-Standard, Body Size 10: Standard, Semi-Standard, Body Size 20: Standard, Semi-Standard, Body Size 30, 40, 50 & 60: 8 (Metal Bowl w/Level Gauge)