Possible to transfer a workpiece at low-speed.

1 !9 !2 @1 @3 e u o t @2 !8 @0 @0 @3 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 q w r y !5 !6 i w i !

Thermo-con/Rack Mount Type

1 850 W*1 900 W*2 1500 W*2 Alarm Refer to Alarm.

EXxx-OMZ0016

Note that frequencies 2446-2468 [MHz] correspond to (1) W-LAN Channel: CH.10 above.

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet Applicable tubing O.D.

4-channel Flow Monitor ( compatible)

U8 0x00 3 R/W (0) 0: PFA (PF2A5) 1: PFW (PF2W5) 2: PFd (PF2D5) 3: USEr (User setting) 4 R/W Setting of connection product Y U8 0x01 (1) Setting of connection sensor (For PF3W5) Y U8 0x00 0: FloW 1: tEMP 5 R/W (0) Unit (Selection of display unit, for PF2A5) Y U8 0x00 0: L 1: Ft 6 R/W (0) 7 R/W Unit setting (For PF2W5, PF2D5) Y U8 0x00 0: L 1: GAL (0) Temperature unit setting (For PF2W5) 0:

MY1

W (kg) 500 l 400 (450) W l 300 Weight (m) Caution W 1. If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Therefore, be sure to level the cylinder tube when mounting.

Hydraulic

) Load (kN) 126 Technical Data 2 Series CH2E, CH2F, CH2G, CH2H Stroke range limit charts: Bore sizes 50, 63, 80, 100 Bore size 50 B-rod C-rod 5 2 4 8 3 7 2 4 8 3 7 5 2000 6 1 6 1 1000 Stroke (mm) 500 100 50 0.5 1 5 10 20 30 0.5 1 5 10 20 30 Load (kN) Load (kN) Bore size 63 B-rod C-rod 2000 1 2 8 5 4 3 7 6 1 2 3 5 4 8 7 6 1000 Stroke (mm) 500 100 50 0.5 1 5 10 20 50 0.5 1 5 10 20 50 Load (

•

G flats 12 .., ~ w w ,. u Rat with rib .. ~ 2 .5 B '--=-1 1/ ' Flat with rib ' 8 . 8 >; ~ \L~~~!

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Note 1) Be sure to enter a symbol of the cable length in with reference to page 562. For type "W", DC voltage is only available.

HRX-OM-S004

) . 7-9 Chapter 8 Documents . 8-1 8.1 Specifications . 8-1 8.1.1 HRS100/150-A-20. 8-1 8.1.2 HRS100/150-A-40. 8-2 8.1.3 HRS100/150-A-46. 8-3 8.1.4 HRS100/150-W-20. 8-4 8.1.5 HRS100/150-W-40. 8-5 8.1.6 HRS100/150-W-46. 8-6 8.1.7 Refrigerant with GWP reference . 8-7 8.1.8 Communication specification . 8-7 8.2 Outline dimensions . 8-8 8.2.1 HRS100/150-A-20/40/46. 8-8 8.2.2 HRS100/150-W-20/40/

Thermo-chiller

Note q Overflow port assembly 1 w Automatic fluid fill assembly 1 e Automatic fluid fill tank assembly PE 1 r M4 screw 2 For securing automatic fluid fill assembly t M6 screw 2 For securing overflow port assembly y Hose clamp 1 For securing automatic fluid fill assembly hose u Hose clamp 1 For securing overflow port assembly hose i Automatic fluid fill label 1 w q r t x 2 x 2 y u i uBall

5

3@1 !2 w !1 Component Parts Replacement Parts/Seal Kit Bore size (mm) Kit no. Contents 125 CS2Y125A-PS Without cushion Consists of !6, !8, @0 140 CS2Y140A-PS No.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

How to Order JSXZ 3 1 C N 02 R 5 G D B w y e r t u o !

MY1

Combination description Holder mounting bracket X416 1 2 1 1 1 1 1 1 1 X417 1 1 1 1 1 2 1 1 1 Nil W Z A L H AZ LZ HZ Nil W A L H A, L, H, AS, LS, HS A, L, H AL, AH AL, LH AH, LH AL, AH AL, LH AH, LH A, L, H, AS, LS, HS A, L, H AL, AH AL, LH AH, LH X416 on one side X416 on both sides X416 on one side, X417 on the other side X416 on A unit side X416 on L unit side X416 on H unit side

CRQ2

2 @1 e u o t @3 !8 @0 @0 @2 !4 !7 !1 !9 !2 @1 @4 e u o t @3 !8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

3 Port Solenoid Valve/

M12 connector pin number Wiring specication y t r q e y t w w r w q e y e q t r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) 1(P) 1(P) X X 1(P) 21 Safety Standard ISO13849-1 Certied 3 Port Solenoid Valve/ Residual Pressure Release Valve with Detection

Fluoropolymer Piping Equipment

Connection threads Rc/NPT E E H L L M Min. port size W Y L, L H W M LQ3H11-F 4 1/8" 10 9 11 35 34 14 2.5 10 18.5 LQ3H12-F 3 2 LQ3H21-F 6 1/8" 17 16 16 40 39 20 4 14 18.5 LQ3H22-F 1/4" 45 44 21.5 LQ3H31-F 10 1/8" Y (E, E) 7.5 18.5 LQ3H32-F 8 6.4 LQ3H33-F 10 1/4" 55 52 7.5 21.5 LQ3H34-F 8 6.4 LQ3H35-F 10 3/8" 55.5 52.5 7.5 25 LQ3H36-F 8 6.4 LQ3H41-F 12 1/4" 24 22 24 55.5 53 29 9.5 22 21.5 LQ3H42

1

X416 1 2 1 1 1 1 1 Stroke adjusting unit Combination description Holder mounting bracket MY2H X168 Bore size Stroke Auto switch Suffix X417 1 1 1 1 2 1 1 L, H, LS, HS Nil W Z L H LZ HZ Nil W L H With X416 (1 pc.) on only one side With X416 (2 pcs.) (With each 1pc. for both sides) With X416 on one side, X417 on the other side (1 pc.)

HRX-OM-X037

Please refer to the Fig. 9-15, Fig. 9-16 for the Cooling capacity*1 W details.

SY

) Valve effective area Note 2) A/B to EA/EB 16.2 (0.9) C10: mm (Cv factor) Manifold base weight W (g) n: Number of stations W = 30n + 50 W = 37n + 63 W = 61n + 101 W = 79n + 127 W = 100n + 151 Note 1) For 10 stations or more (5 stations or more in case of SS5Y7), supply pressure to P port on both sides and exhaust from EA and EB ports on both sides.