3

p8 p7 p6 p5 p4 p3 p2 p1 p0 PF3W720/520-;03 (at 16 L /min) Accuracy [% F.S.]

LOCK UP VALVE

NBR 2 JIS B 2401, P8 O ring NBR 2 JIS B 2401, P5 O ring NBR 1 JIS B 2401, P3 O ring NBR 2 -9- -10-10- -11#1 -11-11- Revision A Format change and content review B Drawings update 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the

ZL3-OM00801

11) 12) 8 No.ZL3-OM00801-A 3.3 3.3.1 1 2 3ISO8573-1:2010(JIS B 8392-1:2012) 2:6:3 ISO8573-1:2010JIS B8392-1:2012 AFM AFF AF AR 2 : 6 : 3 3 dm 1 m 3) 0.1 d 0.5 0.5 d 1.0 1.0 d 5.0 () (mg/m 1 20,000 400 10 1 -70 1 0.01 2 400,000 6,000 100 2 -40 2 0.1 3 90,000 1,000 3 -20 3 1 4 10,000 4 +3 4 5 5 100,000 5 +7 6 +10 3.3.2 1 9 No.ZL3-OM00801-A 3.4 3.4.1 P5

VH Series, 4 Way Hand Valve

VH200 24404 (24404-1) 24408 24077 JIS B2401 P5 JIS B2401 P42 2407102A Material No.

Clamp Cylinder with Lock Series CLK1

Model A B Same side Same side 8 0 0 D-P7, D-P8 25 25 25 50 + 65(n-2) 50 50 D-P7, D-P8 D-P5 Approx. Hs 45 49 54.5 Approx. Ht 28 28 28 A B 3 4.5 4.5 26 27.5 27.5 D-P5 Approx. Hs 46 50 56 Approx. Ht 26 26 26 16 Series CLK1 Clamp Cylinder with Lock Auto Switch Specifications Lead wire colors inside [ ] are those prior to conformity with IEC standards.

Manifold Regulator Modular Type ARM2500/3000 Series

resistant NBR 3 2 Bracket A 1349161A 131515A Bracket Bracket 2 1 set Valve assembly Brass, HNBR 4 Bracket B 13639A 13649A 13 Hex. socket head cap screw Valve spring Stainless steel 5 136310 136410 2 KA00892 KA00904 12 Valve O-ring NBR 6 1 O-ring 11.5 x 8.5 x 1.5 14.5 x 10.5 x 2 Bracket A 2 Bracket KA00078 KA00083 2 1 set assembly Bracket B O-ring 136312 136412 NBR 7 13 JIS B 2401 P3 JIS B 2401 P5

Hand Valve Series VH

VH200 24404 (24404-1) 24408 24077 JIS B2401 P5 JIS B2401 P42 2407102A Series VH200 VH300 VH400 Part No. 244010 24418 240258 Material No.

Hand Valve Series VH

Description VH300 244120 244120-1 VH400 244219 244219-1 VH600 Resin e Slide ring 24408-1 24077 JIS B 2401 P5 JIS B 2401 P42 24403 24416-3 240359 JIS B 2401 P10 JIS B 2401 G55 24413 2407102A (2407114A) 24425-6 240359 JIS B 2401 P10 JIS B 2401 P71 24413 2407102A (2407114A) 240417 24047 JIS B 2401 P15 JIS B 2401 G120 r t y u i Slide ring spring Check ball spring O-ring O-ring Handle head Piano

Dedicated Controller

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD SG 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector. 12 SG Note 1) Do not orient diodes incorrectly

Hand Valve Series VH 1

Description VH300 244120 244120-1 VH400 244219 244219-1 VH600 Resin e Slide ring 24408-1 24077 JIS B 2401 P5 JIS B 2401 P42 24403 24416-3 240359 JIS B 2401 P10 JIS B 2401 G55 24413 2407102A (2407114A) 24425-6 240359 JIS B 2401 P10 JIS B 2401 P71 24413 2407102A (2407114A) 240417 24047 JIS B 2401 P15 JIS B 2401 G120 r t y u i Slide ring spring Check ball spring O-ring O-ring Handle head Piano

LEC-OM02904

1 1 5 9 1 3 5 7 9 8 6 LG 4 MRR 2 BAT P5 3 7 BAT P5 MR BAT MR LE-CSE-SB . 10 .

Compact Low Friction Cylinder Compact Low Friction Cylinder Compact Low Friction Cylinder Compact Low Friction Cylinder Metal Seal Type Metal Seal Type Metal Seal Type Metal Seal Type MQ MQ MQ MQ Series Series Series Series (M

(P5 Precautions) Compared with the setting pressure, substances from the air source. cylinder thrust is unstable. 2) Selection of the Use metal seal type actuation valve. In case of rubber seal type, actuation valve the sliding resistance may increase due to grease splash on the main valve. (P5 Precaution) 3) Lateral load Use within the allowable lateral load range.

New

or less (Full span) Symbol Switch output PNP open collector output: Max. 80 mA Hysteresis: p3% (Full span), Self-diagnosis: p5% or less (Full span) p1% or less (Full span) Linearity Hysteresis Repeatability Sensitivity Temperature characteristics 1% or less (Full span) p1% or less (Full span) p1% or less (Full span) p0.12% or less (Full span)/oC p2% or less (Full span) p1 digit Accuracy

FGX-OM-N027

Rev B:Jan.2021 P5 to P8,P10,P11: Valve shape change. P5:Postscript 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020 SMC Corporation All Rights Reserved

ITV_D-E

O PERATI O N M AN U AL E/P REGULATOR M O D EL N AM E ITV1000, ITV2000, ITV3000 series Seri es CO N TEN TS Cont ent s P1 Saf et y i nst ruct i ons P2 H andl i ng precaut i ons P3 Speci f i cat i ons P4 W i ri ng m et hod P5 Pressure set t i ngs P6 Error i ndi cat i ng f unct i on P6 U RL ht t p: //w w w . sm cw orl d. com 1 Saf et y i nst ruct i ons These saf et y i nst

NARM Series

L 1 End plate ass'y NARM2500 NARM3000 12 O-ring 1 13636A 13646A 13636B 13646B Bracket A 131515A 1349161A 3 Diaphragm ass'y NBR 2 (Except for O-ring) (Except for O-ring) Bracket 2 1 set 2 Bracket B Hexagon socket head cap screw 13649A 13639A 4 13 Valve ass'y Brass/NBR 136410 136310 5 Valve spring Stainless steel 11.5 X 8.5 X 1.5 14.5 X 10.5 X 2 6 14 Valve O-ring NBR 1 O-ring Bracket A P3 P5

CLK1

Model A B Same side Same side 8 0 0 D-P7, D-P8 25 25 25 50 + 65(n-2) 50 50 D-P7, D-P8 D-P5 Approx. Hs 45 49 54.5 Approx. Ht 28 28 28 A B 3 4.5 4.5 26 27.5 27.5 D-P5 Approx. Hs 46 50 56 Approx. Ht 26 26 26 16 Series CLK1 Auto Switch Specifications Lead wire colors inside [ ] are those prior to conformity with IEC standards.

Clean Air Module

Without restrictor With restrictor S Digital flow switch ON/OFF valve Nil Without digital flow switch NPN open collector 1 output + Analog output (1 to 5 V) PNP open collector 1 output + Analog output (1 to 5 V) NPN open collector 2 outputs PNP open collector 2 outputs NPN open collector 1 output + Analog output (4 to 20 mA) PNP open collector 1 output + Analog output (4 to 20 mA) P1 P2 P3 P4 P5

PIROT OPERATED 2 PORT SOLENOID VALVE

No.VXP*-OMX0010 PRODUCT NAME PIROT OPERATED 2 PORT SOLENOID VALVE MODEL / Series / Product Number VXP Series Contents 1Safety Instructions P1,2 2Design P3 3Selection P3,4 4Mounting P4 5Piping P4 6Operating Environment P4 7Maintenance P5 8Precautions P5 9Return of Product P5 10Wiring P6 11Electrical Connections P6 12Pressure Terminology P6 13Applicable Fluids Check List P7 14Specifications

Low Profile 2/3-Port Solenoid Valve

Doc. no.SX90***-OMY0004 PRODUCT NAME Low Profile 2/3-Port Solenoid Valve MODEL / Series / Product Number SX90/090 Series Contents Safry Instructions P2,P3 Design Instrucrions P4 Selection P4 Mounting P5 Piping P5 Wrining P6 Air Supply P6 Operating Enviroment P6,P7 Maintenance P7 How to order P8 Specifications P8 Dimensions P9 Specific Product Precautions P9 Troubleshooting P10