6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140

10)C4 (One-touch fitting for ?4) C6 (One-touch fitting for ?6) C8 (One-touch fitting for ?8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190

10)C4 (One-touch fitting for ?4) C6 (One-touch fitting for ?6) C8 (One-touch fitting for ?8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190

P

Body size Metric size 06 08 10 12 Inch size 07 09 11 13 3 4 5 6 1/8 1/4 3/8 1/2 6mm 8mm 10mm 12mm 1/4 5/16 3/8 1/2 Thread size Universal type 1/8 1/4 3/8 1/2 01 02 03 04 With One-touch fitting Uni-fit thread form Dimensions Models TUBE O.D. d L3 Applicable tubing O.D.

Thermo-chiller Air-cooled 200 V Type Inverter Type HRSH Series (UL Standards)

Note 10) The anchor bolt xing brackets (including 6 M8 bolts) are used for xing to wooden skids when packaging the thermo-chiller. No anchor bolt is included. 166 B

Air Suction Filter ZFA Series

Symbol Thread type B 1 8 1 4 ZFA200 ZFA100 Nil T Rc B NPTF F G ZFA200 How to Order Manifold (2 to 10 stations) Symbol Indicate both the symbols for air suction filter and bracket part no.

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base, Side ported, Available with external pilot, Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring, One-touch fittings, MANIFOLD, VALVE, NEW SY3000 MFLD, UJ, NEW SY3000 MFLD, FITTING

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base, Side ported, Available with external pilot, Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring, One-touch fittings, MANIFOLD, VALVE, NEW SY3000 MFLD, UN, NEW SY3000 MFLD, FITTING

10)C4 (One-touch fitting for ?4) C6 (One-touch fitting for ?6) C8 (One-touch fitting for ?8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190

IR30-OM00013

-01 G43-P10-N01-X30 02:1/4 03:3/8 04:1/2 Rc FG NNPT 00.010.2MPa 10.010.4MPa 20.010.8MPa PRECI SI O N REG U LATO R I R302BG No.

Pneumatic Positioner IP300/IP3100

'to 28" (10-85mm) (0.3" to 3.4" std.)5.9max.l Linearitv* Within 1 1% Within + 2% Hvsteresis Within 1% Repeatability* Within 0.5% Within 1% Sensitivity Within 0.1% Within 0.5% Within 0.2% Within 1% Within 0.2% Within 1% Air Consumption (lvlax.) less than 0.25 SCFM @ 20 osi 0,7 SCFM @ /u osl 0.25 scFM @ 20 osi 0.7 SCFM @ 70 psi 0.25 SCFIVI @ 20 Dsi 0.7 SCFM @ 70 DSi Supply Pressure Variation

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

I 10 I G H F E X H .

•

Repet~ ion accuracy (standard) (reversed) 12 24VDC (Ripple 10% max.) Power supply Peak I Bottom hold function ConsumptIOn current 45mA max. Fau ~ display Indication: Red LED f lashes! LCD error code displayed .

XL-OMV0005

Refer to Chapter 3 3-2. and 3-3 Step 3 (P9, 10). Air facility for valve drive For opening and closing the valve. Table 6. Bolt and Nut size Valve size Bolt size Nut size 16 M4 M4 25 M5 M5 40 M6 M6 50 M8 M8 63 M10 80 M10 6 XL-OMV0005 2-4.

rep-modular-e

Round cutting pliers Nominal: 125 or 150 Tightening torque: 1.4 0.1 Nm 10) Mount the bowl assembly. Hold the bowl assembly by hand and rotate clockwise. Do not use tool for mounting because the bowl may be damaged. Refer to the Check item for referential tightening torque. Actuators Modular F.R.L.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

Round cutting pliers Nominal: 125 or 150 Tightening torque: 1.4 0.1 Nm 10) Mount the bowl assembly. Hold the bowl assembly by hand and rotate clockwise. Do not use tool for mounting because the bowl may be damaged. Refer to the Check item for referential tightening torque. Actuators Modular F.R.L.

2/3 Port Solenoid Valve for Chemicals

3 PBT Return spring 9 Stainless steel o Board assembly 10 Casing 11 PBT r e Plug 12 NBR w O-ring 13 NBR O-ring 14 EPDM/FKM/Kalrez !4 q 4 Series LVM10/100 Dimensions/Body Pored Type LVM11-(N.C.) (2 x R3.2) 9 25.4 19 2 x 3.2 Mounting hole (Lead wire length) 300 UL1007 AWG22 52.5 M5 x 0.8 IN port M5 x 0.8 OUT port 2 5 5 16 13 The broken lines indicate the bracket type. LVM11R-(N.C.)

Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM

3 PBT Return spring 9 Stainless steel o Board assembly 10 Casing 11 PBT r e Plug 12 NBR w O-ring 13 NBR O-ring 14 EPDM/FKM/Kalrez !4 q 4 Series LVM10/100 Dimensions/Body Pored Type LVM11-(N.C.) (2 x R3.2) 9 25.4 19 2 x 3.2 Mounting hole (Lead wire length) 300 UL1007 AWG22 52.5 M5 x 0.8 IN port M5 x 0.8 OUT port 2 5 5 16 13 The broken lines indicate the bracket type. LVM11R-(N.C.)

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 Note 1) Values at ambient temperatures, excluding gas permeation.