SMC Corporation of America
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For connector cable of M8 connector, refer to page 90. 49 Series SYJ7000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) y e q t r q t r w w (B) 2 (A) 4 (A) 4 (B) 2 i i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) u 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 t q r w 5 (R1) 3 (R2)

Applicable tubing material Metal parts material Metric size Inch size Seal method Port size Body size 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 16 12 10 8 6 4 3.2 2 2 Gasket seal M5 x 0.8 1 2 10-32UNF 2 1/8 2 2 2 1/4 R Sealant 1 1/4 NPT 3 3/8 2 1/2 4 2 Brass/Steel wire Nylon (T, TIA Series) 1/8 2 2 1/4 Stainless steel Soft nylon (TS, TISA Series) G 1/4 3 3/8 Face seal Polyurethane (T, TIUB Series)

EX510-DX1) Mounting example 1 Mounting example 2 60 35.1 2 x M4 2 x M4 30.8 1707 Series EX510 Parts Description EX510-DX2 EX510-DX1 w r w u r i 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 CN0 CN1 CN2 CN3 CN4 CN5 CN6 CN7 i 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 CN0 CN2 CN4 CN6 CN8 CN10 CN12 CN14 0 1 2 3 0 1 2 3 CN1 CN3 CN5 CN7 CN9 CN11 CN13 CN15 1 q 4 5 6 7 4 5 6 7 3 q 5 8 9 10 11 8 9 10 11 7 12

equipment 7 1 2 Facility water inlet (Water-cooled refrigeration) 8 1 Fluid supply Automatic fluid fill port 2 2 6 Circulating fluid outlet 1 User's equipment 2 2 Circulating fluid return port 3 4 Overflow port To wastewater collection pit Tank drain port 5 * Ensure that the overflow port is connected to the wastewater collection pit in order to avoid damage to the tank of the thermo-chiller

2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

Features 2 Series LAT3 Model Selection 1 Selection Procedure for Positioning Operation (Refer to Front matter 3 and 4 for Fig.1, 2, 3, 4, 5 and Table 1, 2, 3 .)

Number of samplings Sampling method 0.5 to 5 m: Correction possible when it is sucked at a nonconstant velocity 108 Maximum concentration limit (particles/m 3) Considered particle diameter (m) 0.1 0.2 0.3 0.5 1 5 10 100 1000 10 10 10 Cleanliness class (N) 107 Airborne particle concentration, Cn (particles/m3) 106 2 24 237 2370 23700 237000 1 2 3 4 5 6 7 8 9 4 35 352 3520 35200 352000 3520

screen . 74 (4-2) Parameter group . 74 (4-3) Parameter setting . 75 (4-3-1) Parameter setting screens and how to set the parameter 75 (5) Normal mode Test . 76 (5-1) Test selection screen . 76 (5-2) Test items . 76 (5-3) Test details . 76 (5-3-1) JOG/MOVE . 76 (5-3-2) Return to origin . 78 (5-3-3) Test drive . 80 (5-3-4) Force output . 83 (6) Normal mode Monitor . 86 (6-1) Monitor selecting

Aluminum (setting temp.: 120C [248F]) Stainless steel (setting temp.: 120C [248F]) Uniform baking temperature Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. 3, 4, 5 3 120 120 Comparison with KF25 flange 100 100 Body 1 4 Temperature (C) Body 2 80 5 2 Temperature (C) Body 3 1 1, 2

6 () EX600-DYF No. 1 LED 2 () 3 4 5 () -35No.EX-OMN0035CN-A (1)EX600-DYB EX600-DYPB EX600-DYNB 1 NC 24 V() 2 2 2 3 0 V() NC 4 1 1 5 FE FE M12 (4 ) EX600-DYPB EX600-DYNB 1 1 24 V NC 2 2 2 2 DC24 V DC24 V 3 3 NC 0 V 4 4 1 1 5 5 FE FE FE FE IP67 OFF ON SI -36No.EX-OMN0035CN-A (2)EX600-DYE EX600-DYPE EX600-DYNE 1 0 2 2 3 4 4 6 5 8 6 10 7 12 8 14 9 NC 10 NC 11 NC 12

Branch Branch N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 Shield Controller CN4 Controller CN4 Description Pin No. Description Pin No. EMG+ 1 EMG+ 1 EMG2 EMG2 SD+ 3 SD+ 3 SD4 SD4 EN_SW+ 5 EN_SW+ 5 ON 6 ON 6 DC24V 7 DC24V 7 GND 8 GND 8 Shield Shield 30 - 9.

6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No. Note Note Description Material Description Material 40 to 63 Wear ring Resin Aluminum alloy Cylinder body q !8 CE2 12 to 20 Carbon steel Brass Rod end nut !

Instruction Drawing for Disassembly & Reassembly of Filter q AIR VENT e r w 5-1 t 5-2 i y u Element support Body IN OUT DRAIN qHexagon head Bolt tElement mounting bracket uJoint wHexagon Nut Spring iElement guide eCover Element holder rGasket yElement 5-1 5-2 476 Series FGC Replacement Procedure of Element 2 2. Overhaul 5.

Instruction Drawing for Disassembly & Reassembly of Filter q AIR VENT e r w 5-1 t 5-2 i y u Element support Body IN OUT DRAIN qHexagon head Bolt tElement mounting bracket uJoint wHexagon Nut Spring iElement guide eCover Element holder rGasket yElement 5-1 5-2 476 Series FGC Replacement Procedure of Element 2 2. Overhaul 5.

. 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 2 2 2 4 Drain Tube . 2 3 2 2 5 Electric wiring . 2 3 2 3 Cautions about reinstallation . 2 5 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart . 3 2 3 6 Precautions for long-term non-operation .

VQ4 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Connector wiring diagram (mixed wiring) VQZ 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 VQD 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2

No setting 1 4 2 5 7 2 5 3 2 2 3 5 3 1 MHZ2-16 No setting 3 2 4 1 MHZ2-20 MHZ2-25 MHZJ2-10 No setting No setting MHZJ2-16 No setting No setting 3 2 1 MHZJ2-20 MHZJ2-25 Note) "" in the table indicates a skip with no dimension.

2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

Brake spring Taper ring Ball retainer Brake shoe holder Air pressure supply Air pressure exhaust Brake shoe Release piston Steel ball Locked state Unlocked state 9-5-10 11 Series CNG Cylinder with Lock Double Acting, Single Rod Construction #7 e$4!2$1@2@4!7 With rubber bumper: CNGBN $6 $0 $7 #2 #1 #3 #6 #9 y #0 $0 @6 q @3 !0 !1 u #4 $5 !5 !4 @5 #5 CL Long stroke CL1 @8@9 @6$3o$2!3r!6i!

2 20 20 10 10 10 5 4 3 4 5 3 4 5 3 2 2 2 1 1 1 1 5 10 20 10 5 1 20 30 10 5 1 20 30 Transfer speed (m/min) Transfer speed (m/min) Transfer speed (m/min) Lever-type weight of transferred object and transfer speed graphs (graphs (2) and (3)) show the values at room temperature (20 to 25C).