IDX-OM-N030

Description Maintenance/Service Work Description Date 7.1 Service Record 7 1 IDFA100F 150F Revision Rev HNovember,2020 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020 SMC Corporation All Rights

IDX-OM-U022

6.5 IDX-OM-U022 6. 6.6 (1 ) () IDF-FL219 (IDFA100F,125F ) 1 IDF-FL220 (IDFA150F ) 1 ADH-E400 (V ) 1 () 1 B 20,000 (6 ) 1 B 20,000 (6 ) 1 A 20,000 (6 ) 1 A 20,000 (6 ) 1 A 20,000 (6 ) 2 (IDF150F3) A 20,000 (6 ) 1 A 20,000 (6 ) 1 A 20,000 (6 ) 12 /JEMA 300 A B IDFA100F150F 6 9 6.6 IDX-OM-U022 7. 7 7.1 / IDF100150F 7.1 7 1 A2020 11 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

IDX-OM-V024

Description Contents of check Date IDFB60/70/80/90 Series 13.1 Inspection record 13-1 Revision Rev FOct,2019 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved

IDX-OM-W034

Description Maintenance/Service Work Description Date IDFB Series 13-1Service Record 13 1 Revision Revision ANov.2019 Revision BMay.2021 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation

IDX-OM-W035

IDFB22E-11-V IDFB22E/37E-23-V IDFB55E/75E-23-V IDF-S0199 IDF-S0198 IDF-S0302 240psi (1.6MPa) AC115V10% (60Hz) AC230V10% (60Hz) AC230V10% (60Hz) ON 0.5sec OFF 0.5min 12-3 ON OFF 4 6 2 3 2 8 1 4 10 0.5 5 0.5 ON:SEC OFF:MIN 12-4 V 6-4 6-3 T 11-6 11-4 12-2 IDFB Series 12-2 IDX-OM-W035 13 13 13-1 / IDFB Series 13-1 13-1 A2019/11 B2021/5 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

IDX-OM-W038

TC M C PLC THS M C OLR PTC CM PLC PTC C01 CM IDH6-10 TC IDH6 / IDHA6 TS M C F H SSR FM PRS P FM 1 IDH6/IDHA6 IDH6 / IDHA6 IDH6/IDHA6 IDH6 / IDHA6 CM FM OLR PRS ILS PTC PTC() MC THS TB TC TS SSR H F GFCI PLC 64 IDH Series IDX-OM-W038 . 6.4 6.3 IDH6 / IDHA6 1 65 IDH Series 6.4 IDX-OM-W038 7 7 7-1 / IDH Series 7-17-1 7-1 D2022/7 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

IDX-OM-X004

IN (Dampness air) ID Series 6-4 Structure and operation principles 6 4 Revision history Rev DJanuary.2023 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

AMX-OM-R001E

Standard Compressed air outlet Applicable tube O.D. 6 Compressed air inlet Applicable tube O.D. 6 Option P Purge air outlet for dehumidification Applicable tube O.D. 6 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation

Membrane Air Dryer

B: Correction of specification column 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved

Membrane Air Dryer

. -6- Revision history A: Changes to Maintenance and Checks B: Correction of specification column. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved

AMX-OM-Q015E

Option: S (for IDG3, 3H, 5, 5H) -6- Revision history A: Changes to Maintenance and Checks B: Correction of specification column 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All

AMX-OM-Q018E

Option: S (for IDG3, 3H, 5, 5H) -6- Revision history A: Changes to Maintenance and Checks B: Correction of specification column 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All

Line filter

guide cock guide B B B B B B B B B AFF20 159. 6 159. 4 146. 1 142. 1 148. 6 AFF30 219. 8 219. 8 219. 8 186. 6 184. 9 180. 6 185. 1 200. 6 205. 1 AFF40 263.3 265.1 265.1 232 230. 3 225. 9 230. 4 245. 9 250. 4 -31- Revision history Revision A: September 2020 Addition of the Series 20 and 40 Revision B: August 2021 Addition of the element service indicator. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

Air preparation filter

June 2019 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved -23-

Main Line Filter

. -10- FGX-OM-P003-A Revision history New : 2012/04 The overall revision Ver.A: 2012/07 P7 Change of How to Order URL http://www.smcworld.com 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: +81 3 5207 8249 Fax: +81 3 5298 5362 Specifications are subject to change without prior notice and any obligation the part of the manufacturer. 2012 SMC Corporation All Rights Reserved -11-

Mist Separator

142. 1 148. 6 AM30 219. 8 219. 8 219. 8 186. 6 184. 9 180. 6 185. 1 200. 6 205. 1 AM40 263. 3 265. 1 265. 1 232 230. 3 225. 9 230. 4 245. 9 250. 4 -31- Revision history Revision A: September 2020 Addition of the Series 20 and 40 Revision B: September 2020 Addition of the P.6 Caution 1) Revision C: August 2021 Addition of the element service indicator. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

Micro Mist Separator

cock guide B B B B B B B B B AMD20 159. 6 159. 4 146. 1 142. 1 148. 6 AMD30 219. 8 219. 8 219. 8 186. 6 184. 9 180. 6 185. 1 200. 6 205. 1 AMD40 263. 3 265. 1 265. 1 232 230. 3 225. 9 230. 4 245. 9 250. 4 -31- Revision history Revision A: September 2020 Addition of the Series 20 and 40 Revision B: August 2021 Addition of the element service indicator. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

Activated Carbon Filter

B AMK20 139.1 AMK30 167 AMK40 212.4 -24- Revision history Revision A: December 2021 Partial revision of external dimensions 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation All Rights

Activated Carbon Filter

P A B C D G J M N Q R S T U V AMK50 3/41 90 222 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 AMK60 1 90 299.1 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 -16- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of

Clean Gas Filter Clean Gas Strainer

. -9- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved -10-