PFxx-OMS0001CN

min 101000 L/min 202000 L/min 5525 L/min 101050 L/min 202100 L/min 0999,999,990 L 1 L/min 10 L (50 msec.) 1 L/pulse 10 L/pulse 1 2 5 00.8MPa 1.2MPa 2 5F.S.(00.8 MPa0.6 MPa ) DC1224 V10 P-P10 55 mA 3F.S. 3F.S. 1F.S.(0.05S 2F.S.) 5F.S.(050 25 ) NPN PNP 80 mA (NPN) DC28 V () NPN 1 V (80 mA ) PNP 1.5 V (80 mA ) 3 0.05 0.1 0.5 1 2 4 0 -66No.PF-OMS0001CN-A PFMC7501 PFMC7102

PFxx-OMP0001CN

mim 101000 L/mim 202000 L/mim 5525 L/mim 101050 L/mim 202100 L/mim 0999,999,990 L 1 L/min 10 L (50 msec.) 1 L/pulse 10 L/pulse 2 2 5 00.8MPa 1.2MPa 3 5F.S.(00.8 MPa0.6 MPa ) DC1224 V10 P-P10 55 mA 3F.S. 3F.S. 1F.S.(0.05S 2F.S.) 5F.S.(050 25 ) NPN PNP 80 mA (NPN) DC28 V () NPN 1 V (80 mA ) PNP 2 V (80 mA ) 4 0.05 0.1 0.5 1 2 5 0 -62No.PF-OMP0001CN-F PFMB7501 PFMB7102

Digital Flow Switch (Remote type monitor unit)

Dry air, N2, Ar 0.2 to 10.5 L/min 1 0.5 to 26.3 L/min 1 to 52.5 L/min 2 to 105 L/min 2 Display flow range Instantaneous CO2 0.2 to 5.2 L/min 0.5 to 13.1 L/min 1 to 26.2 L/min 2 to 52 L/min flow Dry air, N2, Ar 0 to 10.5 L/min 1 0 to 26.3 L/min 0 to 52.5 L/min 0 to 105 L/min 2 Set flow range CO2 0 to 5.2 L/min 0 to 13.1 L/min 0 to 26.2 L/min 0 to 52 L/min Min. setting/display unit 0.01 L/

LFE-OMY0008

X1.2 9 ( ) 24V10% 63 No.LFE*-OMY0008 LFE1 LFE2 LFE3 1 1 1 5S/cm () 10 0.520 L/min 2.5100 L/min 5200 L/min 0.424.0 L/min 2.0120.0 L/min 4240 L/min 0.424.0 L/min 2.0120.0 L/min 4240 L/min 2 0.4 L/min 2.0 L/min 4 L/min 0.1 L/min 0.5 L/min 1 L/min (50 ms) 0.1 L/pulse 0.5 L/pulse 1 L/pulse 3 085 () L/minL 2F.S. 21.5F.S. 5F.S.(25) 5F.S.(25) 3 01 MPa 3 2 MPa 4 9.9 L 9 L 0.1L 1L

PFxx-OMO0004CN

min 2210 L/min 0999,999,999 L 1 L/min 1 L (50 msec.) 1 L/pulse 2 2 5 00.75 MPa 1.0 MPa 3 5F.S.(00.75 MPa0.35 MPa ) DC1224 V10 P-P10 55 mA 3F.S. 3F.S. 1F.S.(0.05S 2F.S.) 5F.S.(050 25 ) NPN PNP 80 mA (NPN) DC28 V () NPN 1 V (80 mA ) PNP 2 V (80 mA ) 4 0.05 0.1 0.5 1 2 5 0 -65No.PF-OMO0004CN-E PFMB7201 15 V420 mA 1 k 6 24 V 600 12 V 300 7 0.4 V () 30 msec. 8 9

PFxx-OMO0007CN

min 550 L/min 10100 L/min 20200 L/min 50500 L/min / 12 0.510.5 L/min 2.552.5 L/min 5105 L/min 10210 L/min 25525 L/min / 0.1 L/min 0.5 L/min 1.0 L/min 2.0 L/min 5.0 L/min / 09 L / 1 L 3 4 -50 kPa0.5 MPa -50 kPa0.75 MPa 1.0 MPa NPN PNP 3 () 3 80 mA DC30 V(NPN ) NPN1 V (80 mA ) PNP1.5 V (80 mA ) 1 s 1F.S. 2F.S. 5F.S. 0 3 (3 digits) 50 ms 0.1 L/pulse 0.5 L/pulse 1 L/pulse 2

PF2A

Specifications PF2A710 PF2A750 PF2A711 PF2A721 PF2A751 Air, Nitrogen Model Measured fluid Flow rate measurement range Set flow rate range Rated flow range Minimum set unit 25 to 525 l/min 25 to 525 l/min 50 to 500 l/min 5 l/min 5 l/pulse 10 to 210 l/min 10 to 210 l/min 20 to 200 l/min 2 l/min 2 l/pulse 5 to 105 l/min 5 to 105 l/min 10 to 100 l/min 1 l/min 1 l/pulse 2.5 to 52.5 l/min 2.5

HRX-OM-M090

[mg/L] 70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential Ammonium ion [mg/L] 0.1 or less 1.0 or less item Residual chlorine [mg/L] 0.3 or less 0.3 or less Separation carbonic acid [mg/L] 4.0 or less

LFE-OMZ0013

Set point range 0.4 to 24.0 L/min 2.0 to 120.0 L/min 4 to 240 L/min Min. setting unit 0.1 L/min 0.5 L/min 1 L/min Accumulated volume per pulse (Pulse width=50ms) 0.1 L/pulse 0.5 L/pulse 1 L/pulse Display unit Instantaneous flow L/min, accumulated flow L Accuracy Display value: 0.5F.S. Analogue output: 0.5F.S. Repeatability 0.5%F.S.

HEC-OM-S008

sum CR (H) (L) Thermo-con STX COM Data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Host ACK CR (Possible to omit) Host SOH UT ENQ COM Check sum CR (H) (L) Thermo-con SOH UT STX COM Data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Host ACK CR (Possible to omit) COM indicates communication command.

Series PF2W Digital Flow Switch For Water

PF2W704 Model PF2W740 PF2W711 Measured fluid Flow rate measurement range Set flow rate range Rated flow range Minimum set unit Water 1.7 to 17.0 L/min 7 to 110 L/min 3.5 to 45 L/min 0.35 to 4.5 L/min 1.7 to 17.0 L/min 7 to 110 L/min 3.5 to 45 L/min 0.35 to 4.5 L/min 2 to 16 L/min 10 to 100 L/min 5 to 40 L/min 0.5 to 4 L/min 0.1 L/min 1 L/min 0.5 L/min 0.05 L/min 0.1 L/pulse 1 L/pulse 0.5

Stainless Steel Heat

Operating air pressure Air discharge if no drainage 6 l (ANR) each time 0.3MPa 10 l (ANR each time 0.5MPa 14 l (ANR) each time 0.7MPa Operation cycle: 1 cycle/min. Operation time: 2 sec./min. Motor operated auto drain is packed together with main unit.

Cylinder Port: NPT, Arm Opening Angle: 45°, Arm Position: D (Both Sides), Switch Type: P (P & F), R Arm Mtg Position: C (Mounting Position C), R Arm Style: A010 (Straight Machined ref NAAMS ACA110M), L Arm Mtg Position: X [w/o Arm on Left Side (D Arm Position Type Only)], L Arm Style: XXXX [w/o Arm on Right Side (D Arm Position Type Only)]

Cylinder Port: TF (G), Arm Opening Angle: 90°, Arm Position: D (Both Sides), Switch Type: P (P & F), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A012 (Straight Machined ref NAAMS ACA112M), L Arm Mtg Position: X [w/o Arm on Left Side (D Arm Position Type Only)], L Arm Style: XXXX [w/o Arm on Right Side (D Arm Position Type Only)]

Cylinder Port: NPT, Arm Opening Angle: 135°, Arm Position: D (Both Sides), Switch Type: P (P & F), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A041 (65mm Offset Plain ref NAAMS ACA144M), L Arm Mtg Position: A (Mounting Position A), L Arm Style: A041 (65mm Offset Plain ref NAAMS ACA144M)

Cylinder Port: TF (G), Arm Opening Angle: 105°, Arm Position: D (Both Sides), Switch Type: P (P & F), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A054 (70mm Offset Machined ref NAAMS ACA158M), L Arm Mtg Position: X [w/o Arm on Left Side (D Arm Position Type Only)], L Arm Style: XXXX [w/o Arm on Right Side (D Arm Position Type Only)]

Cylinder Port: NPT, Arm Opening Angle: 120°, Arm Position: D (Both Sides), Switch Type: P (P & F), R Arm Mtg Position: C (Mounting Position C), R Arm Style: A026 (20mm Offset Plain ref NAAMS ACA127M), L Arm Mtg Position: C (Mounting Position C), L Arm Style: A026 (20mm Offset Plain ref NAAMS ACA127M)

Cylinder Port: NPT, Arm Opening Angle: 120°, Arm Position: D (Both Sides), Switch Type: P (P & F), R Arm Mtg Position: D (Mounting Position D), R Arm Style: A036 (25mm Offset Machined ref NAAMS ACA138M), L Arm Mtg Position: D (Mounting Position D), L Arm Style: A036 (25mm Offset Machined ref NAAMS ACA138M)

Cylinder Port: NPT, Arm Opening Angle: 120°, Arm Position: D (Both Sides), Switch Type: P (P & F), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A050 (70mm Offset Machined ref NAAMS ACA154M), L Arm Mtg Position: X [w/o Arm on Left Side (D Arm Position Type Only)], L Arm Style: XXXX [w/o Arm on Right Side (D Arm Position Type Only)]

Cylinder Port: NPT, Arm Opening Angle: 135°, Arm Position: D (Both Sides), Switch Type: P (P & F), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A072 (120mm Offset Machined ref NAAMS ACA178M), L Arm Mtg Position: A (Mounting Position A), L Arm Style: A072 (120mm Offset Machined ref NAAMS ACA178M)