Body material: SUS304, Seal material: FKM, Non-greased specification (standard), Fluid: water, air, S COUPLER, S/S, CONNECTORS, KKA S COUPLERS, PX, KKA THREADS ONLY, 1.94740 lb

Body material: SUS304, Seal material: FKM, Non-greased specification (standard), Fluid: water, air, S COUPLER, S/S, CONNECTORS, KKA S COUPLERS, PX, KKA THREADS ONLY, 4.62970 lb

Body material: SUS304, Seal material: FKM, Non-greased specification (standard), Fluid: water, air, S COUPLER, S/S, CONNECTORS, KKA S COUPLERS, PX, KKA THREADS ONLY, 4.38920 lb

Body material: SUS304, Seal material: FKM, Non-greased specification (standard), Fluid: water, air, S COUPLER, S/S, CONNECTORS, KKA S COUPLERS, PX, KKA THREADS ONLY, 4.33576 lb

LFE-OMZ0013

Sub screen 2 s 5 s 0.5 s 1 s Press the or button to select the response time. Press the button to set. Return to function selection mode.

HRX-OM-S004

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRS Series 3.3Installation 3-27 HRX-OM-S004 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Air cylinder

Grease pack part number: GR-S-010 (10g), GR-S-020 (20g) Refer to Page 27 for made to order product (XC85, X446). 1) Rod seal Apply a thin layer of grease to all surfaces of the new seal to make it easy to mount the rod seal and improve sealing.

AIR COMBINATION

Note 5) Option Nil Without pressure gauge 4 Note 6) Round type pressure gauge (without limit indicator) Pressure gauge b Round type pressure gauge (with limit indicator) Round type pressure gauge (with color zone) Nil Without attachments Check valve c Mounting positionAW+K+AL Note7) Semi-standard Attachment Nil Without attachments Pressure switch d 5 Mounting positionAW+S+AL Note 8)

AIR COMBINATION

OutputNPN output / Electrical entryWiring bottom entry Digital OutputNPN output / Electrical entryWiring top entry pressure OutputPNP output / Electrical entryWiring bottom entry switch OutputPNP output / Electrical entryWiring top entry Nil Without attachment c Check valve Mounting positionAF+AR+K+AL Note7) Nil Without attachment d Pressure switch Attachment Mounting positionAF+AR+S+

2–4

Variations Standard stroke (mm) Series Bore size (mm) Cushion 5 10 15 20 25 30 35 40 45 50 75 100 12, 16 20, 25 Rubber cushion CQM 32, 40 50 Compact Cylinder/Guide Rod Type 12, 16, 20, 25, 32, 40, 50 Series CQM How to Order Without auto switch B 20 10 CQM B 20 10 M9B S CDQM With auto switch With auto switch Number of auto switches Mounting Bore size 12 16 20 25 32 40 50 Nil S n 2 pcs. 1 pc

Table of Contents

SOL: ON(OFF) 1-2-4 1-2-5 4 Series SV Air Cylinders Drive System Full Stroke Time and Speed at the End Air Cylinders Drive System Full Stroke Time and Speed at the End Series SV3000 Applicable bore size: 50, 63, 80, 100 Series SV4000 Applicable bore size: 63, 80, 100, 125 Applicable related components Total stroke time (s) Applicable related components Total stroke time (s) SV Solenoid valve

Compact Vacuum Unit

Also, do not use the filter when these chemicals are present in the atmosphere. 2 Series ZB How to Order Manifold S 01 ZZB 08 M5 Stations Pressure Sensor/Vacuum Pressure Switch Mountable Note) Sensor/switch non-mountable base Sensor/switch mountable base Nil S 01 02 1 station 2 stations Note) Select S when the model with either the pressure sensor or the vacuum pressure switch is selected

PSE200

CH kPa MPa kPa MPa MPa kPa kPa MPa kPa MPa OUT1 OUT2 CH 1 2 3 4 P R E S S U R E Copy function (page 14) Each channel's information can be copied to another channel.

VNB

Note) In the case of body options S and L, the materials of the part nos. e and r are as follows: (Example): VN1-A3BA However all brackets of valve element VNB 1 to 4 are made of stainless steel. (No need to add options S and L.)

VKF300

Grommet type (G) Without light Without light Without light With light With light With light S Non-locking push type (tool required) AC Hole dia. 5 Z None S 12 VDC or less 9 None Z There are manual overrides in 2 directions, on the top and on the side (solenoid side).

3

(15 to 35C) 5% F .S. (0 to 50C) 2% F .S.

Clean Room Rodless Cylinder Series CYP ø15, ø32

Data L R S Piping Port Locaition Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model. Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

VZS2000

Other dimensions are the same as the grommet type. 3-7-12 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS2000 Non Plug-in 2 position double, 3 position closed center/exhaust center/pressure center Grommet 2 position double: VZS2250-G H(S)-01 3 position closed center: VZS2350-G H(S)-01 3 position exhaust center: VZS2450-G H(S)-01 3 position pressure center:

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

AWM20 to AWM40

O S O S Min. clearance for maintenance Drain G A AWM30, AWM40 AWD30, AWD40 J N T M Panel fitting dimension D F Y W U Bracket (Option) S G B C R IN OUT Z Q V IN OUT AWM30/AWD30: Max. 3.5 AWM40/AWD40: Max. 5 K OUT P2 2-P1 (Port size) (Pressure gauge port size) Min. clearance for maintenance E Drain A Applicable model AWM20, AWM40/AWD20 to AWD40 Digital pressure switch Square embedded type pressure