PAB-OM-O003

Handling Precautions . 10 5. Names and functions of parts . 10 6. How to use . 11 7. Specification and how to order . 12 8. Discharge capability . 14 9. Troubleshooting . 16 10. Outer dimensions. 18 2 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

DOC1003077

Install it above 0.6m from the floor. 9 Maintenance 10 Troubleshooting 6 Operation Continued 6 Operation Continued 9.1 Daily Check 10.1 Alarm list No. Modes Function Selectable Setting Default No.

3 Port Direct Operated Solenoid Valve Rubber Seal Series SY100 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Based on dynamic performance test, JIS B 8374-1981.

lVFl 10

B Locking ' Special Order option t Consult factory for availability NVF 1100-ODO{IT (drx ) Lamp and Sorga Protec-tion Z rv/Lamp/Surge Protection S dsurqe Protection Onlv L.mp and S dsurge Only BRACKET (Sutfix "F') .[ otMEr{stoNs A B c D E F 1.35 (34.41 1.34 (34.11 0.61 115.4) 0.83 Q 1 t 1.76 1.77 (44.9) Millamte.s in Parenthe$s rxfENsroNs A B c D E F G H J K It N o P o R 64.7) 0.83 (21) l.t

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-l01 G43-10-l01 G43-10-l01 Refer to pages 427 and 430 for details of the modular applicable products and accessories.

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

MVGQ

Types S, Z 24 VDC: 7 to +10 %, 12 VDC: 4 to +10 % Type T 24 VDC: 8 to +10 %, 12 VDC: 6 to +10 % Note 1) Impact resistance: Made to Order Specifications (For details, refer to pages 1847.) Symbol Specifications No malfunction resulted from the impact test using a drop impact tester.

In-line Air Filter ZFC Series

In-line Air Filter ZFC Series RoHS How to Order B 4 ZFC 5 Body size Symbol Body size Filtration area 1 5 L/min 140 mm2 3 10 L/min 470 mm2 Made to order Refer to page 8 for details.

EX600-SMJ_eng

SPEEDCON connector wiring method is explained below. (1)Align the mark B on the metal bracket of the cable side connector (plug/socket) with the mark A. Wiring Setting and Adjustment Address X10 OFF OFF OFF OFF OFF OFF OFF OFF 10 Mbps OFF OFF ON OFF OFF (3)When the mark B of the connector has been turned 180 degrees (1/2 turn), wiring is completed.

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

B Locking ' Special Order option t Consult factory for availability NVF 1100-ODO{IT (drx ) Lamp and Sorga Protec-tion Z rv/Lamp/Surge Protection S dsurqe Protection Onlv L.mp and S dsurge Only BRACKET (Sutfix "F') .[ otMEr{stoNs A B c D E F 1.35 (34.41 1.34 (34.11 0.61 115.4) 0.83 Q 1 t 1.76 1.77 (44.9) Millamte.s in Parenthe$s rxfENsroNs A B c D E F G H J K It N o P o R 64.7) 0.83 (21) l.t

Series LX Construction and Mounting

Description Material Aluminum alloy Stopper B Motor 1 10 Sensor plate Direct acting guide 2 11 Chromated Mild steel Coupling 3 Resin/Alloy steel Aluminum alloy 12 Nut Alloy steel Magnet Rolled screw 4 13 Bumper Body Rubber Anodized 5 14 Aluminum alloy Resin Motor cover Anodized Aluminum alloy Table 6 15 Anodized Aluminum alloy End plate Photo micro sensor 7 16 Anodized Aluminum alloy

90

-l01 G43-10-l01 G43-10-l01 Refer to pages 427 and 430 for details of the modular applicable products and accessories.

VQ4000

SY SYJ 0 VQ4 0 1 Plug-in SX 2 5 VQ4 1 Plug lead VK VZ Enclosure Configuration Dust-proof 2 position single 3 position closed center VF (A) 4 (B) 2 (A) 4 (B) 2 Dust tight, jet proof (Applicable to IP 65) W 3 1 VFR 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Manual override 2 position double 3 position exhaust center (A) 4 (B) 2 (A) 4 (B) 2 VP7 Metal Rubber B: Locking slotted style : Non-locking

Water-cooledThermo-chiller

Specific heat C [kg/m 3] [g/L] ([kcal/kgC]) [J/(kgK)] 10C 1.10 x 10 3 3.02 x 10 3 0.72 20C 1.08 x 10 3 3.15 x 10 3 0.75 50C 1.06 x 10 3 3.27 x 10 3 0.78 80C 1.04 x 10 3 3.40 x 10 3 0.81 Water Density : 1 x 10 3 [kg/m 3] [g/L] Specific heat C: 4.2 x 10 3 [J/(kgK)] (1.0 [kcal/kgC]) 107 Thermo-chiller Series HRW Fluorinated Fluid Type SEMI How to Order 002 H HRW Fluorinated FluidType Option

Stainless Steel One-touch Fittings Series KG

D1 D2 L1 L2 A M M5 0.8 KGL04-M5 KGL04-01 KGL04-02 KGL06-M5 KGL06-01 KGL06-02 KGL06-03 KGL08-01 KGL08-02 KGL08-03 KGL10-01 KGL10-02 KGL10-03 KGL10-04 KGL12-02 KGL12-03 3.5 2.7 10 19 3.5 7 9.5 16 13.5 15 13 4 1 8 1 4 10 14 7 11.5 22 26 23 25 10.4 10 18 16 4.2 4.2 M5 0.8 3.1 12 10 33 13 21 35 25 26 14 10 14 17 12 14 17 16 14.5 17 23 25.5 27 27.5 29 29 3.5 3.5 1 8 6 1 4 11.4 11.4 12.8 10 20

33

Outlet: 60 Hz Outlet: 60 Hz 20 20 0.1 0.1 10 10 Outlet: 50 Hz Outlet: 50 Hz Return port Allowable operating range Return port Allowable operating range 0 0 0 5 10 15 20 25 30 0 5 10 15 20 25 30 Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] 202 Thermo-chiller Basic Type HRSE Series Dimensions HRSE012/018/024-A-10/20/23 Ventilation air outlet Ventilation air inlet

KF

KFN-04 KFN-06 KFW-04 KFW-06 KFV-04 KFV-06 KFS-04 KFS-06 4 6 KFN-08 8 KFN-10 10 KFN-12 12 4/2.5 6/4 KFW-08U 8/5 KFW-08N 8/6 KFW-10U 10/6.5 KFW-10N 10/7.5 KFW-12U 12/8 KFW-12N 12/9 4/2.5 6/4 KFV-08U 8/5 KFV-08N 8/6 KFV-10U 10/6.5 KFV-10N 10/7.5 KFV-12U 12/8 KFV-12N 12/9 4 6 KFS-08 8 KFS-10 10 KFS-12 12 Precautions Be sure to read before handling.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

KFV-04 KFV-06 KFN-04 KFN-06 KFW-04 KFW-06 KFS-04 KFS-06 4/2.5 6/4 KFV-08U 8/5 KFV-08N 8/6 KFV-10U 10/6.5 KFV-10N 10/7.5 KFV-12U 12/8 KFV-12N 12/9 4 6 KFN-08 8 KFN-10 10 KFN-12 12 4/2.5 6/4 KFW-08U 8/5 KFW-08N 8/6 KFW-10U 10/6.5 KFW-10N 10/7.5 KFW-12U 12/8 KFW-12N 12/9 4 6 KFS-08 8 KFS-10 10 KFS-12 12 Precautions Be sure to read before handling.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8"1/2" 2.5, 4, 6 AS121F-M3 AS131F-M3 M3 x 0.5 6, 10, 16, 20 AS121F-M5 AS131F-M5 M5 x 0.8 6, 10, 16, 20 AS121F-U10/32 AS131F-U10/32 10-32 UNF Tube swivels 360 Universal type permits 360 piping swivel. (1) 20, 25, 32 AS221F-01 AS231F-01 R 1/8 20, 25, 32,