Series AK1000 Applicable Fluid Process Gas Molecular Formula Process Gas Molecular Formula Ar CClF3 Argon Halocarbon 13 C2Cl2F4 CF4 Halocarbon 114 Halocarbon 14 C2ClF5 CH2F2 Halocarbon 115 Halocarbon 32 C2F6 CH4 Halocarbon 116 Methane C2H2 CHF3 Acetylene Halocarbon 23 C2H2F4 CO2 Halocarbon 134A Carbon Dioxide C2HF5 H2 Halocarbon 125 Hydrogen C3F8 He Halocarbon R218 Helium C3H6 Kr Propene Krypton C3H8 N2
A1 E1 L1 MM RR1 U1 ND NX NZ L ML2B Material: Free cutting sulfur steel Polished round 12 40 Y-04C 3 x 18l 16 + 0.3 + 0.1 22 24 55 M14 x 1.5 13 55.5 25 12 38 NDH10 NX Applicable bore size (mm) Part no.
NDd9 Applicable bore size (mm) Flat washer size Flat washer Polished round A1 E1 D1 L1 MM RR1 U1 ND NX NZ L Part no.
Material: Cast iron ND H10 d9 Cotter pin Applicable bore size (mm) E1 L1 MM RR1 U1 ND NX NZ L Cotter pin size Flat washer size Flat washer MM A1 Part no. 3 x 18l Y-04C 40 +0.3 +0.1 16 22 M14 x 1.5 24 55 13 25 12 38 55.5 Polished round 12 NX NZ E1 L 3 x 18l +0.3 +0.1 16 50, 63 Y-05C 27 M18 x 1.5 28 60 15 27 12 38 55.5 Polished round 12 4 x 25l +0.3 +0.1 28 80 Y-08C 37 M22 x 1.5 36 71 19 28
Y type double knuckle joint RR1 I type single knuckle joint MM NDH10 45 RR1 NDH10 MM E1 E1 NX NZ U1 A1 L1 U1 NX A L1 Bore size (mm) Part No. Bore size (mm) Part No.
Y-type double knuckle joint I-type single knuckle joint MM NDH10 45 RR1 RR1 NDH10 MM E1 U1 A1 E1 NZ NX L1 NX A U1 L1 Bore size (mm) Part No. Bore size (mm) Part No.
(Not included.) 12 Series CG5-S Accessory Dimensions Single knuckle joint Double knuckle joint Material: SUS440 (pin) SUS304 (bracket, snap ring) Material: SUS304 MM ND hole H10 MM ND hole H10 L RR1 RR1 E1 E1 A L1 U1 A1 NX A1 L1 U1 NZ NX A (mm) (mm) Part no. Applicable bore size (mm) E1 Part no. Applicable bore size (mm) E1 Applicable pin no.
MM +0.3 +0.1 Y-04D 40 3 x 18 l 16 Polished round 12 22 10 24 55.5 55 M14 x 1.5 12 38 13 25 E1 NX NZ L +0.3 +0.1 Y-05D 50, 63 3 x 18 l 16 Polished round 12 27 14 28 55.5 60 M18 x 1.5 12 38 15 27 D1 A1 L1 U1 +0.3 +0.1 Y-08D 80 4 x 25 l 28 Polished round 18 37 18 36 76.5 71 M22 x 1.5 18 55 19 28 RR1 +0.3 +0.1 Y-10D 100 4 x 30 l 30 Polished round 20 37 21 40 83 83 M26 x 1.5 20 61 21 38 Knuckel
. +0.058 0 +0.058 0 +0.058 0 +0.070 0 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 25 32 40 50, 63 25 32 40 50, 63 8 10 10 14 10.5 12 14 18 16 18 20 28 27 31 36 46 10.5 12 14 18 14 18 20 28 27 31 36 46 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 RQ MU DR1 U1 NZ NX NDH10 NL NL NO U1 NO NX R1 Part no. Applicable pin Part no.
. +0.058 0 +0.058 0 +0.058 0 +0.070 0 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 25 32 40 50, 63 25 32 40 50, 63 8 10 10 14 10.5 12 14 18 16 18 20 28 27 31 36 46 10.5 12 14 18 14 18 20 28 27 31 36 46 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 RQ MU DU1 R1 NZ NX NDH10 NL NL NO U1 NO NX R1 Applicable pin Part no. Part no.
A A1 E1 L1 MM RR1 U1 NZ L Part no. A I-G04 I-G05 Y-G04 Y-G05 M14 x 1.5 42 56 14 18 22 28 30 40 12 16 14 20 42 56 16 20 22 28 M14 x 1.5 12 16 14 20 36 41.6 10 +0.058 0 18 IY-G04 IY-G05 30 40 +0.5 +0.3 M18 x 1.5 M18 x 1.5 44 50.6 14 +0.070 0 22 +0.5 +0.3 Knuckle pin and retaining ring are included.
= m x (a2 + b2) / 12 + m x H2 = 0.4 x (0.102 + 0.062) / 12 + 0.4 x 0.042 = 0.00109 kgm2 Inertial moment Kinetic energy 6 Confirm that the load's kinetic energy is within the allowable value. 1 / 2 x x 2 allowable energy = 2 / t (: Terminal angular velocity) : Rotation angle (rad) 1/ 2 x 0.00109 x (2 x ( / 2) / 0.3)2 = 60 mJ Allowable energy OK t : Rotation time (s) Allowable kinetic
Applicable bore size [mm] A1 D1 E1 L L1 MM ND NX NZ R1 U1 Split pin size Flat washer size Flat washer: Polished round MM Y-04D 40 22 10 24 55.5 55 M14 x 1.5 12 16+0.3 +0.1 38 13 25 3 x 18l Polished round 12 E1 NX NZ L Y-05D 50, 63 27 14 28 55.5 60 M18 x 1.5 12 16+0.3 +0.1 38 15 27 3 x 18l Polished round 12 D1 Y-08D 80 37 18 36 76.5 71 M22 x 1.5 18 28+0.3 +0.1 55 19 28 4 x 25l Polished round
Number of pages changed from 52 to 56 NZ Edition C Safety Instructions Be sure to read Handling Precautions for SMC Products (M-E03-3) before using.
Applicable bore size (mm) A A1 E1 L1 MM U1 NX NZ L A Applicable bore size (mm) MM R R1 U1 NDH10 NX Applicable pin part no. A1 E1 L1 RR1 Part No.
10 2 x 5 14.5 0.2 0.2 24 +0.033 0 26H8 ( ) 114.2 3 3 127 133 240 (Motor cable entry: Basic type) 230 (Motor cable entry: Entry on the left side) Dimensions [mm] 5H8 ( ) depth 5.5 24 Model H1 H2 H3 LER50 16 5.5 15.5 LERH50 26 15.5 25.5 +0.018 0 2 x M10 x 1.5 x 20 2 30 163 Controllers JXCm Series For details, refer to page 182 and onwards.
H2 H2 L1 M1 M1 M1 D Pad side Pad side Pad side ZP2V-A01ZP2V-AN1ZP2V-A5ZP2V-A8ZP2V-AG1Vacuum generator side D Vacuum generator side M2 M2 L3 L2 H1 Vacuum generator side L2 L33 H1 M2 H1 (L4) (L4) No.0.8 No.0.8 (L4) No.0.8 H2 H2 L1 L1 L1 H2 M1 M1 M1 Pad side Pad side Pad side ZP2V-B01ZP2V-BN1ZP2V-BG1ZP2V-B5ZP2V-B61 The place at the vacuum generator side where the tool is applied. 2 The place
I type Single knuckle joint Y type Double knuckle joint NDH10 45 RR1 RR1 MM NDH10 E1 A L1 U1 A1 MM E1 NZ NX NX U1 L1 [mm] [mm] Part no. Bore size A A1 E1 L1 MM R1 U1 NDH10 NX Part no.
I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 +0.058 0 +0.058 0 +0.058 0 +0.070 0 25 32 40 50, 63 10.5 12 14 18 16 18 20 28 27 31 36 46 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 25 32 40 50, 63 10.5 12 14 18 14 18 20 28 27 31 36 46 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 8 10 10 14 NX NZ R1 U1 NO NDH10 NL NL NO NX R1 U1 Part no. Applicable pin Part no.
Vespel is a registered trademark of DuPont. 19 Intermediate flow (Tied-diaphragm) Two Stage Regulator for Ultra High Purity Series AP2700 For UHP gas delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity to 150 slpm (NF3) to 900 slpm (H2) Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance Minimizes supply pressure effect by