Nozzle Diameter: 0.4mm, Vacuum Pressure: -85 kPa For ZU03 /-87 kPa for ZU04; -90 kPa:For ZU05/07, Port Size: ø5/32"

Nozzle Diameter: 0.3mm, Vacuum Pressure: -85 kPa For ZU03 /-87 kPa for ZU04; -90 kPa:For ZU05/07, Port Size: -

Nozzle Diameter: 0.3mm, Vacuum Pressure: -85 kPa For ZU03 /-87 kPa for ZU04; -90 kPa:For ZU05/07, Port Size: ø5/32"

Nozzle Diameter: 0.4mm, Vacuum Pressure: -85 kPa For ZU03 /-87 kPa for ZU04; -90 kPa:For ZU05/07, Port Size: -

Type: Exhaust Cleaner, Main Body Material 1: Zinc Alloy, Flow Coefficient (Cv)(mm2): 105.6, Pipe Connection Port Type: [R] R, Mounting Thread Nominal: [3/4] 3/4, Effective Sectional Area Class(mm²): Up to 200, Recommended Flow Rate(m3/min(ANR)): 8.0 or less, Length A(mm): 88.5, Compatible Fluid: Compressed air, Body size: 07

Type: Exhaust Cleaner, Main Body Material 1: Zinc Alloy, Flow Coefficient (Cv)(mm2): 105.6, Pipe Connection Port Type: NPT, Mounting Thread Nominal: [3/4] 3/4, Effective Sectional Area Class(mm²): Up to 200, Recommended Flow Rate(m3/min(ANR)): 8.0 or less, Length A(mm): 88.5, Compatible Fluid: Compressed air, Body size: 07

7

I F C e d Grommet (with surge voltage suppressor) E U 300 1.2 7.5 A b a T IN OUT B 2 x P Port size L K D f J I F 4.5 4.5 e d DIN terminal C U V E Cable 6 to 12 G1/2 (44) T 7.5 31.5 1.2 5.5 A b a IN OUT B 2 x P Port size J I F L K D 4.5 4.5 f (mm) Electrical entry One-touch fitting P A B D E F I J K L Model Grommet Grommet (with surge voltage suppressor) DIN terminal C T U T T U U V 10,

Air Cylinder Series MB

DRod Boot Material Symbol Rod boot material -X J Nylon tarpaulin K Heat resistant tarpaulin Individual -X Maximum ambient temperature for the rod boot itself.

Electric Actuators

LJ1 LG1 LC1 LX LC6D/LC6C Switches 76 46 38 2-M2.5 x 0.45 thread depth 4 5H9 +0.030 0 10 3 depth5 J 27 J x K 25 8 Motor unit Refer to "Applicable Motor List" below for dimensions. (This drawing shows a Tamagawa Seiki, Co., Ltd. motor.)

New

(with surge voltage suppressor) A A D D J J Exhaust port 24.4 I R Q z300 24.4 Q z300 I 1/2 R 1/2 K K S S Exhaust port L L E H H E U U F F G G 2 P 2 P Port size Port size DIN terminal A D Q T J R Cable 6 to 12 S I K 24.4 1/2 Exhaust port (44) U F G1/2 L H E Port size 2 P G Dimensions (mm) Model Port size P A D E F G H I J K L S VXF25A< VXF26A< 2 1/2 3 182 206 92 102 212 247 47 63 117.5

Compact Rotary Actuator Series CRQ2

XA39 XA40 XA41 XA45 K K K XA46 CRQ2X MSQX Y Y Y Y Y 20, 30, 40 Y MRQ K, T J K K, T K 10, 15, 20, 30, 40 K K K K, T K X Z X, Z J Z J J, Z J 20, 30, 40 Z J 10, 15, 20, 30, 40 J T Reversed shaft, Change of double shaft length X 20, 30, 40 Reversed shaft, Change of double shaft length Combination Chart of Made to Order Chart 4.

Digital Flow Switch (Remote type sensor unit)

dimensions Piping port S T U V W Y Z 25 A 59 36 48 58 70 7 2 -46No.PF-OMN0010-J Dimensions of lead wire with M8 connector (ZS-40-A) -47No.PF-OMN0010-J Made to Order Change the seal material of the wetted parts to EPDM.

NCA1

None Nylon Neoprene Nil J K MT4 T MP4 C Standard stroke Inches MP1 MS2 MT1 MT2 Air cushion Nil Without auto switch Auto switch X S U J Stroke Both ends None Head end Rod end Nil N H R Hundredths of an inch For the applicable auto switch model, refer to the table on page 6-15-7. Auto switches are shipped together, (but not assembled.) Mounting Bracket Part No. Part no.

LX

LJ1 LG1 LC1 LX LC6D/LC6C Switches 76 46 38 2-M2.5 x 0.45 thread depth 4 5H9 +0.030 0 10 3 depth5 J 27 J x K 25 8 Motor unit Refer to "Applicable Motor List" below for dimensions. (This drawing shows a Tamagawa Seiki, Co., Ltd. motor.)

2 Phase Stepper Motor/Without Motor Brake Series LXS

Proximity switch (optional) depth 5 10 7.5 15 pin plug 5H9 +0.030 0 E-M5 x 0.8 thread depth10 Home position switch (optional) 6 Refer to page 100 for connection cables. 76 46 38 2-M2.5 x 0.45 thread depth 4 5H9 +0.030 0 10 3 depth5 J 27 J x K 25 8 Motor unit Refer to "Applicable Motor List" below for dimensions. (This drawing shows a Tamagawa Seiki, Co., Ltd. motor.)

NCA1

None Nylon Neoprene Nil J K MT4 T MP4 C Standard stroke Inches MP1 MS2 MT1 MT2 Air cushion Nil Without auto switch Auto switch X S U J Stroke Both ends None Head end Rod end Nil N H R Hundredths of an inch For the applicable auto switch model, refer to the table on page 6-15-7. Auto switches are shipped together, (but not assembled.) Mounting Bracket Part No. Part no.

High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 A XLS Series Dimensions XLS/Without control power supply D Lead wire AWG20, O.D.: 2.63 mm E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT

LX

E-M5 thread depth 10 6 LJ1 LG1 LC1 LX LC6D/LC6C Switches 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch

JXCx-OMU0004

P.50 34 No.JXC-OMU0004-A 7.3 SW (A) (B) PLC PLC SW (C) A,B,C A B C I/O I/O I/O 35 No.JXC-OMU0004-A A e i j PLC h 15 8.1 P.40 8.4 P.43 36 No.JXC-OMU0004-A B PLC I/O PLC PLC PLC PLC 3 i j 3 PLC PLC PLC PLC I/O g 7 LED f L L (1) 7 LED f (2) (3) 3 k n c 37 No.JXC-OMU0004-A C h [15] g 2 i j i h j g i 2 j i i h [0] j j 3 g 3 i OFF j 3 2 e h 0 h i g 3 j

Possible to transfer a workpiece at low-speed.

XA39 XA40 XA41 XA45 K K K XA46 Y Y Y Y Y 20, 30, 40 Y J K K, T K, T K 10, 15, 20, 30, 40 K K K K, T K Z X X, Z J J J, Z Z J 20, 30, 40 Z J 10, 15, 20, 30, 40 T J Reversed shaft, Change of double shaft length X 20, 30, 40 Reversed shaft, Change of double shaft length Combination Chart of Made to Order Chart 4.