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EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5 (R1

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EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5 (R1

IR1000/2000/3000

Standard part number X1 Clean room specifications Specifications Non-grease specifications Cleanliness Bleed port Class 10 With M5 fitting (applicable tube O.D. 6) Manifold Specifications (except type IR2120 and series IR3000) 6 IR1000/2000: M5 fitting (applicable tube O.D. 6) IR3000: Rc(PT) 1/2 female thread EXH port Grease Teflon grease 2 to 8 station manifold type regulators.

CC

Wall mounting screw Unit port U1, U2 MI W S CEP1 CE1 CE2 (mm) Model Oil port size Rc A B CA CL GB GL KA KB KL L QA M NB NL QB QL R T GA 18 S F 35 ML2B CCVS02-G-S 45 80 86 35 25 1 36 17.5 88.2 72 45 1/2 148.5 103.9 101 CCVS1-G-S 45 80 86 35 18 35 25 2 36 17.5 72 98 57 1/2 148.5 121.8 101 M5 x 0.8 5.4 to 7.5 C J G5-S CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9

CC

S 1/2 45 80 86 101 35 18 35 36 25 72 17.5 1 88.2 148.5 103.9 45 CCVS02-lG-S 1/2 45 80 86 101 35 18 35 36 25 72 17.5 2 98 148.5 121.8 57 CCVSl1-lG-S M5 X 0.8 5.4 to 7.5 1/2 45 80 86 101 35 18 35 36 25 72 17.5 1 98 148.5 57 88.2 103.9 CCVSl2-lG-S 1/2 45 80 86 101 35 18 35 36 25 72 17.5 1 98 148.5 57 88.2 103.9 CCVSl3-lG-S 1/2 45 80 86 35 36 25 72 17.5 98 57 88.2 CCVSl0-S 3

Rotary Table

angular acceleration after t seconds can be found as follows. t ( 1 ) 2 1 ( 2 ) C t tdt 2 When 0 t , rotation angle =0, so the integration constant is C=0. t t 2 1 2 1 2 thus, 2 t 28 - Auto switch type for rotary table The rotary table has a magnet mounted on its piston and an auto switch on the outside of the body to detect the piston position (table position).

NAIV

241 4.86 (123.5) (5s) lz3;.(1s) (20) nm2[ , t % 7.62 6.8i] 4!

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

CY1 MY1 3.4-3 End Lock Cylinder Series CBM2 20, 25, 32, 40 How to Order L 40 150 H N CBM2 Standard L 40 150 C73 H N CDBM2 With auto switch Air cylinder with auto switch Number of auto switch Mounting 2 1 n S n Basic Axial foot Front flange Rear flange Single clevis Double clevis Front trunnion Rear trunnion B L F G C D U T Bore size 20 25 32 40 20mm 25mm 32mm 40mm Auto switch Without auto

MRQ

How to calculate the load energy Moment of inertia and rotation time 2 t E = I2, = 1 2 0.006 0.005 Moment of inertia (kgm2) E: Kinetic energy.(J) I: Moment of inertia...(kgm2) : Angular velocity.(rad/s) : Rotation angle.(rad) 180 = 3.14rad t: Rotation time.

3 Port Air Operated Valve Series SYJA300 1

Flow Characteristics/Weight Flow characteristics C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Weight (g) Pilot port size Type of actuation Port size SYJA512-M5 SYJA522-M5 0.12 0.18 0.39 0.45 0.47 0.66 0.14 0.18 0.45 0.45 N.C. 0.53 0.66 M5 x 0.8 Body ported 45 N.O. M5 x 0.8 SYJA514-01 0.32 0.46 1.1 0.32 0.41 1.2 75 (Without subplate 45) Rc 1/8 N.C.

ZPT/ZPX

Calculation ZX ZR : Lifting force (N) : Stable vacuum pressure (kPa) : Pad area (cm2) : Factor of safety: Horizontal pad contact : 4 (dynamic) Vertical pad contact : 8 (dynamic) W P S t Pad ZM W = P x S x 0.1 x 1 t W ZH W ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

HRX-OM-X071

Model number Serial number Type and quantity of refrigerant How to read the serial number y T 001 Jun 2020 y T 001 Year Symbol Remarks Month Symbol Remarks Serial no. 4 R Repeated from O to Z in alphabetical order, with O for January and Z for December 2020 y Repeated from A to Z in alphabetical order 2021 Z 5 S 2022 A 6 T Fig 1-1 Position of product label HRR Series 1.4 Product Label 1-3

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread, Connector Type: S (M12 Connector Type)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread, Connector Type: S (M12 Connector Type)

Rated Vacuum Range: F (-100.0 to 100.0 kPa), Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: M5 (Female Thread), Connector Type: S (M12 Connector Type)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread, Connector Type: S (M12 Connector Type)

Rated Vacuum Range: F (-100.0 to 100.0 kPa), Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Connector Type: S (M12 Connector Type)

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

2 Meter-out type Meter-in type 638 Speed Controller with Indicator/Elbow Type Uni Thread Type AS-FS Series Dimensions: Elbow Type Seal method: Gasket seal For Uni thread Indicator window direction: 0 Indicator window direction: 180 W1 X W2 Y D3 AS-F AS-F Applicable tubing O.D. d TMH ASD AS L3 A L4 D1 AS-FE KE AS-FG L2 L1 M1 AS-FP H (Width across flats) T AS-FM Metric Size [mm] Model d T H

Rotary Table

, the rotation time of the rotary actuator is: 100 0.320 1.600 200 0.560 2.900 E: Allowable kinetic energy [ J ] : Rotation range [ rad ] I: Moment of inertia [ kgm2 ] During uniform acceleration, the angular acceleration after t seconds can be found as follows. t = ( 1 ) 2 1 ( 2 ) C t tdt + = = 2 When 0 = t , rotation angle =0, so the integration constant is C=0. t t 2 1 2 1 2 = = thus

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5 (R1