Compact

ao . , , , , t o o 3 . , , . , 05 stePping a ''.a: ' , . a , : a : l r : : i : l ::: I iob' ' ', ' t99;:9i1':i1:t t: llli,2.gtepping O8: 12mm lead , , . , , 1 ( } . u 5 asbinriea,i : r iri llliqq'i'' o5 stepoinq 30 08; zmm lead o2 stepping 80 08; 5mm lead 10.03 30 08; 2mm lead s5 stepping 80 08; 5mm lead a I a a a 100 O8; 6mm lead o2 stepping 200 08; 12mm lead 10.05 I M <-iD;;,;; uo100 08

LX Series Compact Electric Actuators

ao . , , , , t o o 3 . , , . , 05 stePping a ''.a: ' , . a , : a : l r : : i : l ::: I iob' ' ', ' t99;:9i1':i1:t t: llli,2.gtepping O8: 12mm lead , , . , , 1 ( } . u 5 asbinriea,i : r iri llliqq'i'' o5 stepoinq 30 08; zmm lead o2 stepping 80 08; 5mm lead 10.03 30 08; 2mm lead s5 stepping 80 08; 5mm lead a I a a a 100 O8; 6mm lead o2 stepping I M <-iD;;,;; uo200 08; 12mm lead 10.05 100 08

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Fitting plug KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 Dimensions L (mm) A Applicable fitting size d A L D Part number KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 5 6 8.5 10 11.5 31.5 32 35 39 43 1/8 5/32 1/4 5/16 3/8 16 16 18 20.5 22 D Used to block unused cylinder port. L DIN rail AXT100-DR12.5 (Pitch) 5.25 7.5 Suffix number into from the dimension table below.

Fieldbus System

1 A, B port size q Series 3 SY3000 5 SY5000 7 SY7000 Nil Standard (0.7 MPa) B Quick response type (0.7 MPa) K* High pressure type (1.0 MPa) Thread piping Symbol Port size Applicable series M5 M5 x 0.8 SY3000 01 1/8 SY5000 02 1/4 SY7000 * Only metal seal type is available for high pressure type.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

MGC Bore size (mm) 40 Bore size (mm) 40 Model Model 50 63 80 100 50 63 80 100 MGF D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F5NTL D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6 D-B59W D-G5/K59 D-G5W/J59W D-G5BAL D-G59F/G5NTL D-A3C/A44C D-G39C/K39C CY1 BT-04 BT-04 BT-06 BT-08 BT-08 BA-04 BA-05 BA-06 BA-08 BA-10 MY1 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BA3-040 BA3-050 BA3-063 BA3-080 BA3-100 To order

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

MG Bore size (mm) 40 Bore size (mm) 40 Model Model 50 63 80 100 50 63 80 100 MGP D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F5NTL D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6 D-B59W D-G5/K59 D-G5W/J59W D-G5BAL D-G59F/G5NTL D-A3C/A44C D-G39C/K39C MGQ BT-04 BT-04 BT-06 BT-08 BT-08 BA-04 BA-05 BA-06 BA-08 BA-10 MGG MGC BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BA3-040 BA3-050 BA3-063 BA3-080 BA3-100 To order

CV/MVGQ

D-A5/A6/A59W/F5/J5 D-F5W/J59W/F5NTL/F59F D-A3/A44/G39/K39 D-B5/B64/B59W/G5/K59 D-G5W/K59W/G59F/G5NTL CC BT-04 BT-04 BT-06 BT-08 BT-08 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M RB BA-04 BA-05 BA-06 BA-08 BA-10 D-A3C/A44C/G39C/K39C BA3-040 BA3-050 BA3-063 BA3-080 BA3-100 J D-Z7/Z80/Y59/Y69/Y7P D-Y7PV/Y7W/Y7WV BA4-040 BA4-040 BA4-063 BA4-080 BA4-080 DMounting bracket belongs to D-A3C/A44C/G39C

CNA

Electrical entry/Function Bore size (mm) 40 Model No. of auto switch 50 63 80 100 D-B5/B6 Grommet Band mounting Tie rod mounting Band mounting Tie rod mounting D-B59W Grommet (2 color indication) D-A5/A6 D-A59W D-F5l/J5l D-F5lW/J59W D-F5NT D-F5BAL/F5lF D-A3l Terminal conduit Reed switch Solid state switch D-A44 DIN terminal BT-04 BT-04 BT-06 BT-08 BT-08 D-A5/A6 Grommet D-A59W Grommet (2 color

Vacuum Unit Series ZK2

Vacuum Unit Series ZK2 RoHS How to Order Single Unit Vacuum Pump System 08 P K 5 A L ZK2 00 ZK2 08 A K 5 A L 12 Ejector System (with Valve) ZK2 08 A N 0 N N 12 Ejector System (without Valve) Remains blank when option is not selected. q e r t y u i w e Combination of Supply Valve and Release Valve Note 3) q System/Body Type Supply valve Release valve Supply valve Release valve System Body

CNA

Bore size (mm) 40 50 63 80 100 Bore size (mm) 40 Auto switch model Foot 50 63 80 100 CA1-L04 CA1-L05 CA1-L06 CA1-L08 CA1-L10 D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F5NT D-F5BAL/F59F Flange CA1-F04 CA1-F05 CA1-F06 CA1-F08 CA1-F10 Single clevis CA1-C04 CA1-C05 CA1-C06 CA1-C08 CA1-C10 BT-04 BT-04 BT-06 BT-08 BT-08 Double clevis CA1-D04 CA1-D05 CA1-D06 CA1-D08 CA1-D10 When ordering foot bracket

CNA

Bore size (mm) 40 50 63 80 100 Bore size (mm) 40 Auto switch model Foot 50 63 80 100 CA1-L04 CA1-L05 CA1-L06 CA1-L08 CA1-L10 D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F5NT D-F5BAL/F59F Flange CA1-F04 CA1-F05 CA1-F06 CA1-F08 CA1-F10 Single clevis CA1-C04 CA1-C05 CA1-C06 CA1-C08 CA1-C10 BT-04 BT-04 BT-06 BT-08 BT-08 Double clevis CA1-D04 CA1-D05 CA1-D06 CA1-D08 CA1-D10 When ordering foot bracket

KFx-OMV0007

Mounting/ Piping Equivalent tightening torque [Nm] KF 04 1.5 to 2.0 2 to 7 KF 06 1.5 to 2.0 3 to 8 KF 08 1.5 to 2.0 4 to 9 KF 10 1.5 to 2.0 6 to 9 KF 12 1.5 to 2.0 9 to 12 KF 04 1.5 2 to 4 KF 06 1.5 4 to 6 KF 08 1.5 6 to 9 KF 10 1.5 10 to 12 KF 12 1.5 10 to 12 Sleeve material Fitting size Appropriate tightening rotations Nylon 66 C2700 2.

Air Suction Filter With One-touch Fittings ZFB Series

IN side, OUT side 4 10 20 30 50 75 75 Weight (g) 22 22 30 30 39 39 Model Tubing size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 7 7 12 12 16 16 6 6 8 8 10 Unrestricted 360 piping tube mounting on the IN side Metric size Easily replaced filter element Easy installation and removal with One-touch fittings 3 16 1 4 1 4 3 8 1 2 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13

Air Suction Filter With One-touch Fittings

54 6 ZFB200-06 6 ZFB200-08 8 ZFB300-08 69.5 8 ZFB300-10 70 10 48 26 22.5 12.5 24 17.5 15 50 15.5 14.4 12.8 8.5 Metric size 52 28 65 24.5 13.5 27 19.5 16 61 17.5 16.6 15.2 9.5 57 30 27 14.5 29.5 21 17 65 21.5 18 18.5 11 ZFB101-05 53 24 17.5 3/16" ZFB101-07 54 24.2 17.7 1/4" ZFB201-07 52 28 65 24.5 13.5 27.2 19.7 16 61 17.5 16.6 15.2 1/4" 9.5 ZFB301-11 57 30 70 27 14.5 30.2 21.7 17 65 21.5

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

Symbol Nil 1 Clean packaging equivalent to Class M3.5 Standard packaging equivalent to Class M5.5 Size 1 2 3 4 5 6 7 Packaging K Symbol 1 Type Male M Applicable tubing size H Metric Size Inch Size Applicable tubing size Applicable tubing size 3 x 2 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 19 x 16 25 x 22 Size Size Symbol Symbol KK 03 07 11 13 19 25 32 03 04 06 08 10 12 19 25 1/8" x 0.086" 1/4" x

Fieldbus System

Stations 1 station Symbol 01 I/O Unit stations 16 Note) 16 stations Nil None 1 station Note) Max. number of stations depends on the wiring specifications. 1 9 9 stations Note 1) Without SI Unit, the symbol is nil. Cylinder port size Note 2) SI Unit is not included in I/O Unit stations.

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

Model K VCKL0604-02F H KFN-06-X2 K VCKL0806-02F H KFN-08-X2 K VCKL1075-02F H L Union nut C3604BD + Ni plated 1 1 set unit KFN-10-X2 K VCKL1008-02F H K VCKL1209-02F H KFN-12-X2 K VCKL-02F H K VCKL0604-02F H KFS-06 K VCKL0806-02F H KFS-08 K VCKL1075-02F H M Sleeve Nylon 1 1 set unit KFS-10 K VCKL1008-02F H K VCKL1209-02F H KFS-12 N Gasket VCKK-4-1 Nylon 1 10 set unit 23 Troubleshooting (Valve

Plug-in/Plug Lead: Single Unit

PE X Electrical entry R1 R2 P 18.4 PE X 27.5 27.5 Rc 1/8 PE port Rc 1/8 External pilot port R2 R1 18.5 P 41 41 41 41 27.5 27.5 Rc 1/8 PE port Rc 1/8 external pilot port 5-Rc 1/2 5-Rc 1/2 (P), 4(A), 2(B), 5(R1), 3(R2) port Numbers inside ( ) are for metal seal 3 position type 1(P), 4(A), 2(B), 5(R1), 3(R2) port 2-6-6 Series VQ5000 Base Mounted Plug-in Unit How to Order Manifold VV5Q 5 1 08

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 505 Applicable Fluids Material and fluid compatibility check list for High

Cylinder with Lock

Bore size (mm) Auto switch model 40 50 63 80 100 D-A9/A9V D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL BA7-040 BA7-040 BA7-063 BA7-080 BA7-080 BT-08 BT-08 BT-06 BT-04 BT-04 D-A5/A6/A59W D-F5/J5/F5W/J59W D-F5NT/F5BAL/F59F BA3-100 BA3-080 BA3-063 BA3-050 BA3-040 D-A3C/A44C/G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL BA4-080 BA4-080 BA4-063 BA4-040 BA4-040 The above figure