Non-contact Gripper

P PL M ML C D XT661-2A-(R, L) M5 x 0.8 5 M2 x 0.4 3.2 20 XT661-4A-(R, L) M5 x 0.8 5 M4 x 0.7 5 32.8 40 XT661-6A-(R, L) M5 x 0.8 5 M4 x 0.7 5 47 60 XT661-8A-(R, L) Rc 1/8 M4 x 0.7 5 47 80 XT661-10A-(R, L) Rc 1/8 M4 x 0.7 5 47 100 ZP2 ZP2V ZP ZPT ZPR Dimensions [Low Profile Cyclone Type] XT661 XT661 XT661-3A-(R, L)-X260 XT661-2A-(R, L)-X260 1.6 Air supply port 1.6 Air supply port 20 1.8

Vacuum Unit

V port type A C Metric size 06 6 8.25 4 08 8 11.4 6 Inch size 07 1/4" 9.7 4.76 09 5/16" 11.4 6 PV port type B Metric size 06 6 9.7 Inch size 07 1/4" 12.3 With bracket M4 Nut 5 14.5 2 x 4.6 15 5.8 26.5 M4 x 20 1 46.4 1 Mounting bracket for single unit (Option), [Nuts and bolts are included.]

MY2

Horizontal m1 Note) Static load m M3 m1 x g x X m2 x g x X m4 x g x Z M1 Static moment M1 m1 x g x Y m2 x g x Y m3 x g x Z M2 z y Y Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a weight movable by thrust.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

18.5 12.6 9.2 35 4.5 29h9 29.5h9 14H9 3.8 5 H9 5.3 2.5 4.2 10 3.3 6 3.5 M4 x 0.7 2.2 5.3 M4 x 0.7 4 5.5 38 23 15.5 10.5 40 4.5 33h9 34 h9 17H9 5 6 H9 5.3 2.5 4.2 10 4.2 7.5 4.5 M5 x 0.8 2.5 6 M4 x 0.7 4 5.5 45 30 18.4 12.2 50 5 39h9 40 h9 20H9 6 7 H9 6.5 2.5 4.5 11.5 4.2 7.5 4.5 M5 x 0.8 2.5 6 M5 x 0.8 5 (mm) JJ JK JU P Q S SD SF SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 1 2 3 7 M3

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

J (mm) DRB 7 8 12 12 17 NA Model PE 2.2 2.8 2.7 2.7 RA M4 x 0.7 M5 x 0.8 M8 x 1 M8 x 1 LC MA MB MC MD ME NB 4.5 7.5 9.5 12 16.5 P M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc1/8 PA 22.5 25 42 50 69.5 PB 24 27 44.5 55 75.5 PC 8 10 11.5 14 14.5 PD 4.5 6 7 8.5 11 RC 2 2.5 4 4 6 RD 5.7 6 9 9 12.4 MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M4 x 0.7 M6 x 1 7.5 11 15 20 25 14.5 19 28.5 35.5

CNG

97 10 (12) 25 6.5 9 7 10 6 31 Up to 300 301 to 400 20 to 300 301 to 400 Data 22 19.5 17 45 104 1/8 51.5 20 12 18 2 97 10 (12) 25 6.5 9 7 10 6 38 Up to 300 301 to 450 20 to 300 301 to 450 30 27 19 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 Up to 300 301 to 800 20 to 300 301 to 800 Bore size (mm) 20 25 32 40 W J K KA MM NA PG PH PL S TA TB TC WA WB WH WW XA XB P 30 M5 x 0.8 M4

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

m1 Note) Static load m M3 m1 x g x X m2 x g x X m4 x g x Z Static moment M1 M1 m1 x g x Y m2 x g x Y m3 x g x Z M2 z y Y Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a weight movable by thrust.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Screw mounting (LECP2mm-m) (Installation with two M4 screws) 2. Grounding Tighten the screw with the washer when mounting the ground wire as shown below. Ground wire M4 screw Mounting direction Cable with crimped terminal Tooth lock washer Mounting direction Controller Note) The space between the controllers should be 10 mm or more.

Slider Type Ball Screw Drive/11-LEFS Series

600 650 700 750 800 850 900 950 1000 Product weight [kg] 5.37 5.65 5.93 6.21 6.49 6.77 7.15 7.33 7.61 7.89 8.17 8.45 8.75 9.01 9.29 9.57 9.85 10.13 Additional weight with lock [kg] 0.53 517 11-LEFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication Dimensions: Ball Screw Drive 11-LEFS16 (72) ( ) +0.025 0 3H9 depth 3 40 Body mounting Note 1) reference plane 4 x M4

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

J (mm) DNA Model P M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc1/8 PA 22.5 25 42 50 69.5 PB 24 27 44.5 55 75.5 PC 8 10 11.5 14 14.5 PD 4.5 6 7 8.5 11 PE 2.2 2.8 2.7 2.7 RA M4 x 0.7 M5 x 0.8 M8 x 1 M8 x 1 RB 7 8 12 12 17 RC 2 2.5 4 4 6 RD 5.7 6 9 9 12.4 LC MA MB MC MD ME NB 4.5 7.5 9.5 12 16.5 MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M4 x 0.7 M6 x 1 7.5 11 15 20 25 6 7 10 12 15 9 12.5

CNG

10 14 2 97 10 (12) 25 7 6 31 to 300 301 to 400 51.5 10 301 to 400 6.5 9 20 to 300 22 19.5 17 45 104 1/8 20 12 18 2 97 10 (12) 25 7 6 38 to 300 301 to 450 51.5 10 301 to 450 7 11 20 to 300 30 27 19 52 112 1/8 26 16 25 2 104 10 (13) 26 7 8 47 to 300 301 to 800 58.5 12 301 to 800 (mm) Bore size (mm) 20 25 32 40 P J K KA MM NA PG PH PL S TA TB TC WA WB WH WW W XA XB 141 (149) 88 5.5 M5 x 0.8 M4

A

Bore size A B C DA DB E F G GA GB H J K L MM ML NN P PW 12 39 39 29 6 8 0 8 29 11 7.5 58 16 13 18 M4 x 0.7 10 M4 x 0.7 M5 7 16 43 43 33 8 10 0 8 33 11 8 64 18 15 22 M5 x 0.8 13 M5 x 0.8 M5 5 20 47 47 37 10 12 0 8 36 10.5 8.5 74 19 17 26 M5 x 0.8 13 M5 x 0.8 1/8 7 S L I D E B E A R I N G 25 47.5 47.5 37.5 12 16 0 8 42 11.5 9 88 21 21 32 M6 x 1.0 15 M6 x 1.0 1/8 8 32 71.5 47.5 37.5 16 20 24

LJ1H

Thread size M4 x 0.7 8 2 46 Effective thread length (mm) Quantity P.C.D.

VT317

Each valve is fixed to the manifold base with two M4 mounting screws. Tighten the screws evenly when re-mounting. Tightening torque of the mounting screw (M4): 1.4 Nm 2. For mounting, tighten M4 or equivalent screws evenly into the mounting holes of the manifold base. Individual exhaust Changing from N.C. to N.O. This product is delivered as N.C. valve.

Cylinder with Lock Series CNG

10 14 2 97 10 (12) 25 7 6 31 to 300 301 to 400 51.5 10 301 to 400 6.5 9 20 to 300 22 19.5 17 45 104 1/8 20 12 18 2 97 10 (12) 25 7 6 38 to 300 301 to 450 51.5 10 301 to 450 7 11 20 to 300 30 27 19 52 112 1/8 26 16 25 2 104 10 (13) 26 7 8 47 to 300 301 to 800 58.5 12 301 to 800 (mm) Bore size (mm) 20 25 32 40 P J K KA MM NA PG PH PL S TA TB TC WA WB WH WW W XA XB M5 x 0.8 141 (149) 88 5.5 M4

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

Applicable bore size (mm) A1 L NDd9 MM B C d H B C d H 0.030 0.060 0.030 0.060 Y-J010SUS 10 SNJ-016SUS 10 NTJ-010SUS 10 3.3 14 7 8 15.2 21 M4 x 0.7 16.2 M10 x 1.0 4 8.1 M4 x 0.7 3.2 Y-J016SUS SNKJ-016SUS NTJ-015SUS 16 16 16 5 17 8 11 16.6 21 M5 x 0.8 19.6 M12 x 1.0 4 9.2 M5 x 0.8 4 NDH10 U1 NX R1 Part no. +0.048 0 Y-J010SUS 3.3 3.2 8 10 +0.048 0 Y-J016SUS 5 6.5 12 10 Rod end cap T-bracket

Electric Actuator Triple Axis P&P Unit

Motor mounting process M5 x 14 Tightening torque 4.4Nm0.2Nm M4 x 14 Tightening torque 2.1Nm0.1Nm Plate A M4 x 14 M4 x 12 B 22 22 B section detail A section detail 18 Electric Actuator/Maintenance Guide 3 Be sure to read before handling. Belt mounting procedure Belt mounting process Belt mounting process 1. Confirm that the belt to be used has the following part number.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Thread size M4 x 0.7 8 2 46 Effective thread length (mm) Quantity P.C.D.

MXW Series Long Stroke Slide Table

) 5H9 +0.03 depth 4.5 0 6 38 5 22 12 Y Y 25 40 84 L 10 13 13 K A 30 24 15.8 A Z NN-M4 x 0.7 thread depth 8 Bottom through hole 3.3 (N-1) x H G N-M4 x 0.7 thread depth GG HH H 6 depth 4.5 5H9 +0.03 Bottom through hole 3.3 0 5H9 +0.03depth 4.5 0 F E G F E Model HH H GG J Z N L K NN 64 106 71 MXW875 30 19 92 228 5 45 31 1 98 112 106 MXW8100 32 34 115 278 5 70 56 1 121 144 129 MXW8125 32 32

Short Stroke Electric Actuator Series LX

x 0.7 thread depth 9 31 G 28 58 5H9 +0.030 0 depth 5 (5.5) 10 D-M4 x 0.7 (for work piece mounting) 10.5 12 2-M3 thread depth 5 (3.5) 6 4-8 50 18.5 10 20 17.5 22 25 35 (5) 62 72 12 (6) 8 (15) 1 0.2 31 5H9 +0.030 0 depth 5 Photo micro sensor wire (300mm) 10 13 1.5 [5.5] 6 25 (4) 30.5 10 (39.5) E Motor wire (300mm) Stroke + 135 The dimension inside [ ] shows the location at which the home