Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

Weight Material: NBR, Mounting: A [g] qWeight Difference by Mounting Style [g] ZHP63BMNA-C6S 184 ZHP80BMNA-C6S 224 ZHP63UMNA-C6S 167 ZHP80UMNA-C6S 175 B C D E F G H 20 5 14 7 25 1 11 wWeight Difference by Material [g] For the ZHPA-00 (without ejector), weight shown above 12 g.

Environment

Load: F [N] LEY32 10 LEY25 LEY16 1 Based on the above calculation result, the LEY16B-200 is selected. Stroke [mm] 0 100 200 300 400 500 600 223 LEY Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Refer to page 225 for the LECPA and page 226 for the LECA6.

3 Port Solenoid Valve Series SYJ300/500/700

N.O. 1 (P) 3 (R) 1 (P) 3 (R) a c e d a c e d (A) (A) 2 2 g g 3 (R) 1 (P) 3 (R) 1 (P) b b f f Component parts Replacement parts Note Zinc die-casted No.

VT325

Suitable for use in vacuum applications 101.2 kPa (For vacuum specifications type: VT/VO325V) 02 1 G VT325 SY Thread type SYJ Nil F N T Rc G NPT NPTF For manifold: Enter VO.

VY511, VYU5

SW RESET RUN2 RUN1 OV INPUT 6 7 5 8 4 + 9 3 SET UP A 2 B 1 0 C D 1 E F 0 to 10V V R 1 OUTPUT SET UP BALANCE CONTROLLER VYU5-D 2 V R 2 OV ERR.

Series AP3100

Manually operated type (For high pressure and high flow) Diaphragm Valve for Ultra High Purity Series AP3100 Suitable for UHP gas supply line Body material: 316L SS secondary remelt High pressure type: 20.7 MPa and 9 MPa Designed for bulk specialty gas (BSGS) delivery LOTO standard with AP3157, optional AP3125 How to Order (Inlet) (Outlet) AP31 00 2PW MV8 MV8 S Model Ports Code Maximum operating

EX600-WEN_WSV.eng

Parameter Setting Hardware Configuration (EDS file) I/O Map SWEDEN (46) 8 603 12 00 Ekhagsvgen 2931, SE-141 71 Segeltorp, Sweden (7) Set the Ethernet port Refer to the SMC website (URL https://www.smcworld.com) to obtain more detailed information about these setting above.

EXxx-OMV0028.eng

Parameter Setting Hardware Configuration (GSDML file) I/O Map SWEDEN (46) 8 603 12 00 Ekhagsvgen 2931, SE-141 71 Segeltorp, Sweden Refer to the SMC website (URL https://www.smcworld.com) to obtain more detailed information about these setting above.

RS2H-OM0045P

. :0.1 D 50 : : mmax 1 RS2H mmax : mmax (Kg) =0.1 =0.2 NO 50 400 280 mAm max 63 530 365 YES 80 800 565 V m mmax=0.1 200<400 mP6 -1-* -1-1V=20m/minm=278(Kg) 200278 NO mA m YES FA=mAg FA 2000.19.8 196(N) FAmAg(N) (g: :9.8m/S 2) P F -2-1P=0.5(MPaF=766(N)766(N) 196776 P7 -2-1 NO FA F RS2H50 YES v [m/min] m [kg] -1 5 - -1-1.(RS2H50) -1-2.(RS2H63 -1-3.

VFRA3000

-9200-www.stevenengineering.com 5 3 position pressure center Port size VR W/o sub-plate (Pilot port: Rc) W/o sub-plate (Pilot port: Other than Rc) 1/4 3/8 Nil VH 00 VHS 02 03 How to Order Manifold Base 10 1 2 VV5FRA3 n Port size Thread type Indicate the same part number as VFR3000 manifold.

AC Servo Motor Driver (Pulse input type)

The station should be set to 00. The setting should match the setting of parameter [PC20]. The default value of parameter [PC20] is [0]. When using LECSB for the first time please use the default value for parameter [PC20] which is set to [0], and please set [Station] to [00] Please select servo amplifier connection USB as the communication device. Click OK.

Multistage Ejector (N)ZL Series

(full span) Class 3 Port exhaust 0 to 50C (32 to 122F) Housing: Polycarbonate/ABS resin Symbol Standard P V 5 Series (N)ZL Multistage Ejector Option Specifications Digital vacuum pressure switch specifications With digital vacuum pressure switch (ZSE4) ZSE4-00--X105 ZSE4B-00--X105 ZSE4E-00--X105 Part number Display Pressure setting range Maximum operating pressure LCD LED LCD with back light

Multistage Ejector Series ZL

(full span) Class 3 Port exhaust 0 to 50C Housing: Polycarbonate/ABS resin Symbol Standard P V 2 Multistage Ejector Series ZL Option Specifications Digital vacuum pressure switch specifications With digital vacuum pressure switch (ZSE4) ZSE4-00--X105 ZSE4B-00--X105 ZSE4E-00--X105 Part number Display Pressure setting range Maximum operating pressure LCD LED LCD with back light 101 to 10KPa

Pipe Port Type: Rc (R), Rod Arm Type: -, Mounting Method: Side, Plunger Type: Roller Lever, Body Shape: Block Vertical Type, Number of Ports: 5-Port, Push Button Type: -, Plumbing Type & Direction: Direct Side, Number of Switching Positions: 2-Position Direction Switching, Switching Operation: Plunger, Nominal Designation of Piping Thread: 1/8, Valve Flow Coefficient (Cv)(mm2): 10.71, Body

Pipe Port Type: Rc (R), Rod Arm Type: -, Mounting Method: Side, Plunger Type: One-Way Motion Roller Lever, Body Shape: Block Vertical Type, Number of Ports: 5-Port, Push Button Type: -, Plumbing Type & Direction: Direct Side, Number of Switching Positions: 2-Position Direction Switching, Switching Operation: Plunger, Nominal Designation of Piping Thread: 1/8, Valve Flow Coefficient (Cv)(mm2

Pipe Port Type: Rc (R), Rod Arm Type: -, Mounting Method: Side, Plunger Type: One-Way Motion Roller Lever, Body Shape: Block Vertical Type, Number of Ports: 5-Port, Push Button Type: -, Plumbing Type & Direction: Direct Side, Number of Switching Positions: 2-Position Direction Switching, Switching Operation: Plunger, Nominal Designation of Piping Thread: 1/8, Valve Flow Coefficient (Cv)(mm2

Pipe Port Type: Rc (R), Rod Arm Type: -, Mounting Method: Side, Plunger Type: Straight, Body Shape: Block Vertical Type, Number of Ports: 5-Port, Push Button Type: -, Plumbing Type & Direction: Direct Side, Number of Switching Positions: 2-Position Direction Switching, Switching Operation: Plunger, Nominal Designation of Piping Thread: 1/8, Valve Flow Coefficient (Cv)(mm2): 10.71, Body options

Pipe Port Type: Rc (R), Rod Arm Type: -, Mounting Method: Side, Plunger Type: Roller Plunger, Body Shape: Block Vertical Type, Number of Ports: 5-Port, Push Button Type: -, Plumbing Type & Direction: Direct Side, Number of Switching Positions: 2-Position Direction Switching, Switching Operation: Plunger, Nominal Designation of Piping Thread: 1/8, Valve Flow Coefficient (Cv)(mm2): 10.71, Body

Pipe Port Type: Rc (R), Rod Arm Type: -, Mounting Method: Side, Plunger Type: Roller Plunger, Body Shape: Block Vertical Type, Number of Ports: 5-Port, Push Button Type: -, Plumbing Type & Direction: Direct Side, Number of Switching Positions: 2-Position Direction Switching, Switching Operation: Plunger, Nominal Designation of Piping Thread: 1/8, Valve Flow Coefficient (Cv)(mm2): 10.71, Body

Pipe Port Type: Rc (R), Rod Arm Type: -, Mounting Method: Side, Plunger Type: -, Body Shape: Block Vertical Type, Number of Ports: 5-Port, Push Button Type: -, Plumbing Type & Direction: Direct Side, Number of Switching Positions: 2-Position Direction Switching, Switching Operation: Toggle Switches, Nominal Designation of Piping Thread: 1/8, Valve Flow Coefficient (Cv)(mm2): 10.71, Body options