CM2

, #11 SCM225A, #11, #9 SCM225A, #11, #9, #19 CM2T32SCM232A, #11 SCM232A, #11, #9 SCM232A, #11, #9, #19 CM2T40SCM240A, #11 SCM240A, #11, #9 SCM240A, #11, #9, #19 1.4-46 Series CM2 Integrated Clevis (E) CM2E Bore size Stroke S T (mm) Bore E CD I A CI K AL CX L B1 D MM F N G PR H U H1 NA NN P 0 0.033 0 0.033 0 0.033 0 0.039 1/8 1/8 1/8 1/4 13 5 8 28 18 20 5 15.5 12 12 8 M8 X 1.25 13 15 20 8

Metal Seal/Rubber Seal Series VQ Body Ported

SI unit output no. 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 SI unit output no.

CY1

9 @0 !8 q !5 !4 !7 w #3 !6 e #1 @9 #0 i !0 !3 !1 !

CLS

Brake piston Locking spring Air pressure Eccentric cam shaft Brake shoe holder Locked state (When air is exhausted) Unlocked state (When air is supplied) 9-9-10 11 Series CLS Cylinder with Lock Double Acting, Single Rod Construction @7 @4 @8 @6 %8 @2 %9 @7 !0 i o @1 @0 @3 y u !1#1 @9 #4^2^7^5^1 ^3 ^6 ^4 8%2 %3 %4 %6 q !9 w %7 $1 $2 $3 $6 $8 $9 $0 #3 #0 @5 #2 $5 $4 %0 %1 t y !2 !1 !

Stability of suction position,

9 35 9 9 9 9 B A 15 35 B A 35 14.5 Bushing Bushing Bushing M18 x 1.5 M10 x 1 M18 x 1.5 M18 x 1.5 B A M10 x 1 M10 x 1 Seal washer Seal washer Seal washer D D D D D D 40 26.5 31 31 26 26 2 3 53 50 6 40 6 35 32 6 Width across flats 6 2.5 14.5 Width across flats 6 Width across flats 6 43 19 19 19 D-D D-D D-D 16 16 16 8.5 8.5 8.5 Dimensions Dimensions Dimensions Model A B ZP3E-Y32UMlJB10 66.6

NCQ8

/2"), 100 (1"), 200 (2"), 400 (4") 037 (3/8"), 087 (7/8"), 175 (1-3/4"), 350 (3-1/2"), 025 (1/4"), 075 (3/4"), 150 (1-1/2"), 300 (3"), 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2") 250 (2-1/2") Double acting Double rod 13 012 (1/8"), 062 (5/8"), 125 (1-1/4"), 025 (1/4"), 075 (3/4"), 150 (1-1/2"), 037 (3/8"), 087 (7/8"), 175 (1-3/4"), 050 (1/2"), 100 (1"), 200 (2") Single rod

Sine Rodless Cylinder Series REA/REB

9 q !4 !3 !8 !7 @7 #1 @9 !0 t y e i u !2 !1 w #3 !6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 @6 REBHT32 Component Parts Component Parts No. Description No.

10

9 !1 !4 !0 !3!8 !6 !5 12-2 12-1 7-2 7-1 1-2 1-1 1-1 Width across flats Rod view 32 (2:1) Component Parts No.

Table of Contents

9 9 12 12 12 16 16 460 665 693 693 1162 1162 1162 1416 1416 19 19 19 19 19 19 19 27 27 80 M16 x l 250 M16 x l 250 M16 x l 250 M16 x l 300 M16 x l 300 M16 x l 300 M16 x l 500 M24 x l 500 M24 x l 500 AT6C AT11C AT22C AT37C AT55C AT75C AT125C AT150C AT220C 1 2 Rc 1/2 Rc 3/4 Rc 1 Rc 1 Rc 1 1/4 Rc 1 1/4 Rc 2 Rc 2 Rc 2 Rc 110 110 110 180 180 180 260 260 Rc 3 4 Rc 1 1 2 1 2 Rc 1 2B (JIS 10kFF) 2B

HRX-OM-X027

Instructions for Use . 1-6 1.5.2 Personal Protective Equipment . 1-7 1.6 Emergency Measures. 1-8 1.7 Waste disposal . 1-9 1.7.1 Disposal of refrigerant and compressor oil. 1-9 1.7.2 Disposal of product . 1-9 1.8 Material Safety Data Sheet (MSDS) . 1-9 Chapter 2 Name and Function of Parts . 2-1 2.1 Part number of product . 2-1 2.2 Name and Function of Parts . 2-2 2.3 Function of Parts . 2

Dual Rod Cylinder Series CXSJ/CXS

1 !2 e @1 q @7 @5 @8 CXSL10 CXSL15 @0!5 @9@3@4r!8w!9!3 i!0 @2ut!6 @0 !5 @9 @4 r w !8 !9 !3 i !0 @2 u t !6 !4ye!1!2 q @1 !4 y e !1 !2 @3 @1 q CXSL20 to 32 @0 !5!6@3@4r!8w!7o i!0u@2t !4 y e !1 !2 q @1 Component Parts: Standard Piping Component Parts No.

ISO Cylinder

: G Head flange: G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.3 G G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.5 W W Rod (side) W (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.7 (40)1 (40)1 (40)1 (100)1 0.3 38 79 0.1 (40)1 (40)1 Head ( side ) 0.5 37 29 60 76 600 500 400 300 1000 1100 900 800 700 200 100 0 Cylinder stroke [mm] (40)1 0.7 34 30 23 50 63 1 The data in ( ) are limited by max. stroke length

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Station 11 SOL.b Station 8 SOL.b 22 16 SOL.a SOL.a 21 15 Station 2 SOL.b Station 2 SOL.b 4 4 SOL.a SOL.a 3 3 Station 1 SOL.b Station 1 SOL.b 2 2 SOL.a SOL.a 1 1 Triangle mark Triangle mark This circuit is for the double wiring specification with up to 9 stations.

High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

Series SV

L dimension L dimension 8 6 5 4 3 2 7 1 0 0 7 98 185.5 7 5 4 3 2 1 6 0 1 8 110.5 198 0 7 6 5 4 3 8 2 1 2 9 123 210.5 1 M12 input block (n) 8 7 6 5 4 3 2 3 10 135.5 223 2 L dimension 9 8 7 6 5 4 4 11 148 235.5 3 10 9 8 7 6 5 12 160.5 248 4 Connector type: For M (m + n = 2 to 8) 10 9 8 7 6 173 5 11 10 9 6 1) When a DIN rail other than the above is required, refer to the separate DIN rail dimensions

Electric Actuator

1 @6 @7 o @4 !5 !0 !6 @0 B A !9 !8 y q w t !7 r e i u !3 @3 !4 D 25 32 In-line motor type/LEY !6 u @3 #4 #3 When rod end male thread selected !0 #0 #1 #2 #1 @9 Component Parts No. Description Material Note No.

LX

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

Rotary Actuator/Vane Type

9 i @0 !9 !6 q w !4 !2 w !4 o !0 !7 !1 q !5 !1 Double shaft type Single shaft type Single shaft type Component Parts Double shaft type DNo. Description Material Note No.

SYJ300/500/700

+ -+ R P R P P port 1/4 R port 1/4 P port 1/8 R port 1/8 Note) If there are more than 6 stations for type 20, or more than 9 stations for 21 type, supply air to both sides of P port and exhaust air from both sides of R port.

Filter Regulator

C Note 1) C Note 1) Option symbol 2 Semi-standard symbol 6 Semi-standard: 2 Semi-standard: Piping port Piping port (9) Part No. (9) Part No. thread ty pe thread ty pe Rc Rc AD47-2-A AD47-D G G NPT AD47N-2(Z)-A NPT AD47N(-Z)-D Appearance and part No.