HRX-OM-Z015 Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 5 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low tank fluid level 1 CH1 abnormal high circulating fluid temp. 2 Reservation
2 stations 2 stations 2 stations 1 station 2 VQ7-6-FHG-D 4 2 Use of Control Unit VQ7-6-FG-D 4
Quick exhaust Normal operation High speed supply B 1/2 PP PA C D PA PP 1(P) 2 2(A) 1 1/2 PP = approx.
,G,NPT 1/8 (Finger opening port) Auto switch mounting groove (4 locations) 98 H 11 2 x M10 x 1.5 (Rack thread) 40.2 16 1 37 16 18 25 25 26 28 38 39 30 Width across flats 17 (2 locations) 38 79 (117) K 20 Width across flats 19 (2 locations) 4 13 4 38 18 18 18 48 2 x M12 x 1.75 (Piston rod thread) 4 x M12 x 1.75 through (Thread for mounting attachment) 28 When open G When open F 28 60 86 (mm
16 21 26 39 19 N 4 4 4 4 6 6 6 8 HA 40 40 40 50 30 70 70 70 GA 16 16 16 16 51 61 109 159 KA NA 2 2 2 2 2 4 4 4 Refer to "Dimensions" of MXS 16 on p.3.11-19 for one with shock absorber as symmetric.
x MM depth ML L 2 x Counterbore diameter OB, depth OL WA Z XAH9 XB Section XX Section XX XA XL XC HA: T-slot for hexagon bolt Section XX details X 0.02 R T X 0.02 DB DA H VA VB U X PW b a e d c T-slot dimensions 2 x P XAH9 depth XL 2 x P (Plug) XAH9 depth XL S Q G J K PB GB GA [mm] FA PA + Stroke Bore size [mm] a b c d e FB A + Stroke B + Stroke C + Stroke 32 6.5 10.2 5.5 3.5 9.5 40 6.5 10.5
Pi n assi gn of bus adapt or si de connect or I t em Pi n assi gn I t em Socket assi gn SLD SLD 4 4 3 D B D B CCLi nk I N CCLi nk O U T 3 2 5 D G D G D A 1 2 D A N . C.
VAC ERR ERR ERR ERR Note) Stations are counted starting from the D side. 50 56 D side U side 1 2 . stations 50 9 3 (8) 6.5 6.5 Dimensions in inch are noted in parentheses. 1 1 82 89.5 SUP, VAC z port 3 3 (6, 1/4") 40 40 EXH, ATM c port 25 25 (6, 1/4") 2 2 2 5 5 OUT x port (4, 5/32") Breathing hole Note) 3.7 (M3 x 0.5) Note) For dimensions of the cable connector, refer to single unit on page
(Double rod type: 2 pcs.) Snap ring Type C 8 for axis Type C 10 for axis Type C 10 for axis Type C 14 for axis m 1.5 1.25 1.25 1.75 t 0.9 1.15 1.15 1.15 Part no.
(Double rod type: 2 pcs.) Snap ring Type C 8 for axis Type C 10 for axis Type C 10 for axis Type C 14 for axis m 1.5 1.25 1.25 1.75 t 0.9 1.15 1.15 1.15 Part no.
, #2 (#1+#2+#11) MUL63SMU63, #2 (#1+#2+#11) CU CQS CQ2 MU (mm) ZZ 99 106 114 139 145 FZ 24 28 32 39 50 FY 66 82 102 126 148 FX 14 16 18 22 30 FV 76 94 118 144 168 FT 8 8 9 12 14 FD 5.5 7 9 11 13 Model MUF25, MUG25 MUF32, MUG32 MUF40, MUG40 MUF50, MUG50 MUF63, MUG63 Rear flange MUG25SMU25, #4 (#1+#4+#11) MUG32SMU32, #4 (#1+#4+#11) MUG40SMU40, #4 (#1+#4+#11) MUG50SMU50, #4 (#1+#4+#11) MUG63SMU63
acting/Single acting Basic Type Scale: 100% 12 10 0.05 (14) 5 2-M2 x 0.4 thread depth 4 (mounting thread) 2-M3 x 0.5 through (mounting thread) Prepared hole dia. 2.6 through (mounting hole) 0 -0.1 4 13.6 (28) 12 20 +0.022 0 4 7H8 depth 1.5 When open 12 1 When closed 8 0 -0.4 16.5 2-M2 x 0.4 thread depth 4.5 (mounting thread) 11 19.7 44 M3 x 0.5 (finger closing port) M3 x 0.5 (finger opening
2 Fingers closed Normally closed !4 !3 Component Parts Component Parts Note Material Material Note No. q w e t y u No. i o !0 !1 !2 !3 !4 !
This can be prevented by inserting a noise filter such as a line noise filter and a ferrite element between the switch-mode power supply and the pressure switch, or by using a linear power supply instead of a switch-mode power supply. 3 1 DC polar indication 4 2 2 OUT2 3 DC (-) 1 Connector on the body Connector pin numbers 4 OUT1 3 1 DC (): Brown 4 2 2 OUT2: White 3 DC (): Blue 1 4 OUT1:
. 3-7 Chapter 4 Operation/ Shutdown . 4-1 4.1 CHECK POINTS BEFORE OPERATION . 4-1 4.2 OPERATION . 4-1 4.3 STOP . 4-2 4.4 CAUTIONS FOR RE-START . 4-2 4.5 CHECK POINTS BEFORE RESTART. 4-2 4.6 CAUTIONS WHEN THE PRODUCT IS SHUT DOWN FOR AN EXTENDED PERIOD OF TIME . 4-2 Chapter 5 Checks and Maintenance . 5-1 5.1 DAILY INSPECTION . 5-1 5.2 REGULAR MAINTENANCE . 5-2 5.2.1 Clean the dustproof filter
7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I
) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) N.O N.O 2 Note) S kit is only available for 24 VDC. 2 position double (rubber) 4 position dual 3 port valve (C) (A) 4 (B) 2 (A) 4 (B) 2 C: Locking type (Manual) C Note) 5 (R1) 3 (R2) 1 (P) Function 5 (R1) 3 (R2) 1 (P) N.C N.O Standard type (1 W) High pressure type (1.0 MPa) Negative COM External pilot Low wattage type (0.5 W) Nil K N R Y Seal type
0 (A, B, C common view) 44 MHZ 29 6 x M3 x 0.5 thread depth 6 (A, B, C common view) 9h9 0 0.036 MHF 15 4.7 9.7 1 2 MHL 5.8 3 4.7 2 x 3 MHR MHR (36.5) 33.5 MHK 19.5 2 x 4.2 MHS 2 3e8 0.014 0.028 MHC 10 Auto switch mounting groove Open: 11 Closed: 8 MHT MHY 8 0 0.05 MHW -X 12 4 4 Dimensional Differences between MHR and MDHR MRHQ The following dimensions are different between the MHR and MDHR
(3-3) LECPLECA .59 (3-3-1) LECPLECA . 61 (3-3-2) LECPLECA . 62 (3-3-3) LECPLECA . 64 2 - (4) .68 (4-1) .68 (4-2) .68 (4-3) .69 (4-3-1) . 69 (5) .70 (5-1) .70 (5-2) .70 (5-3) .70 (5-3-1) . 70 (5-3-2) . 72 (5-3-3) . 73 (5-3-4) . 76 (6) .79 (6-1) .79 (6-2) .79 (6-3) .79 (6-3-1) . 79 (6-3-2) . 80 (6-3-3) . 82 (6-3-4) . 83 (6-3-5) . 83 (7) .84 (7-1) .84 (7-2) .84 (7-3) .85 (7-3-1) . 85 (7-3-