Possible to transfer a workpiece at low-speed.

67h9 32H9 12 22H9 10 4.5 3 6.5 17 8.6 14 8.5 85.4 80 10 38 22 19 6 15.5 63 37.5 100 50 10 37.5 75h9 77h9 35H9 13 26H9 12 5 3 7.5 20 10.5 18 10.5 (mm) JC JD JJ JU P Q S SD SE SF SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 10 20 30 50 M 8 x 1.25 12 M5 x 0.8 M 8 x 1 M5 x 0.8 34 92 9 13 45 17.7 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M10 x 1 M5 x 0.8 37 117 10

Vacuum Pad: Ball Joint Type

Vacuum Pad: Ball Joint Type ZPT/ZPR Series Pad Diameter: 10, 13, 16, 20, 25, 32, 40, 50 on n io on n a io a pt pt s s or la or la ds nt ds nt ed ed a a or or w w l f l f or or ea ea k k id su id su pe rfa pe rfa ty ty ce ce nt nt s s oi oi ac ac l j l j ac ac al al e e B B s s ZP3 ZP3E ZP2 ZP2V ZP ZPT ZPR ZPT ZPR XT661 ZPT Series: Vertical Vacuum Entry Type ZPR Series: Lateral Vacuum Entry

NCA1

/8 3 5/8 6 1 3/4 1 1/4-12 2 2.375 3/8 1 1/8 2 9/16 3 1/16 5 3/4 3 1/8 3 5/8 6 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 2 11/16 3 3/16 5 3/4 3 1/8 3 5/8 BORE E EE(NPT) F G J K 1 1/2 2 3/8 3/8 2 1 1/4 2 2 1/2 3/8 3/8 2 1 5/16 2 1/2 3 3/8 3/8 2 1 1/8 5/16 3 1/4 3 3/4 1/2 5/8 2 1/4 1 1/4 3/8 4 4 1/2 1/2 5/8 2 1/4 1 1/4 3/8 5 5 1/2 1/2 5/8 2 1/4 1 1/2 7/16 6 6 1/2 3/4 3/4 2 3/4 1 5/8 7/16 BORE SB ST SU

NCA1

2.48 4.88 325 (3.25) 1 3/4-16 1 1/8 3.9 1 1/2 1/2 1 1/4 3/4 5/8 7/8 3/8-24 3.75 0 1/2 5/8 1.57 1.18 1.05 1.25 0.87 1 3/8 7 1/2 2.34 4 1/4 2.72 5.83 400 (4) 1 3/4-16 1 1/8 4.7 1 1/2 1/2 1 1/4 3/4 5/8 7/8 3/8-24 4.5 0 1/2 5/8 1.57 1.18 1.05 1 0.87 1 3/8 7 1/2 2.34 4 1/4 2.72 5.83 Side Lug Mounting Type NC A1S (MS2 Mounting Style) (in) Bore (in) MM KK A B C D DD E EA EE G J LF P R SB SS ST SU

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) Keyway dimensions b l AU Model Port size Rc D (g6) DD (h9) W BA BB SA SC SU SB SD BU SE CU F DU H EU J K MU S U A B C M8 x 1.25 depth 8 156 (189) 0 0.030 62 98 17 17 8.5 13.5 45 M16 x 1.5 48 33 12 15 25 5 25 46 14 11 34 9 15 2.5 14 36 12 5 1/8 CDRA1BSU50 175 (213.5) 199 (243) 259 (325) M10 x 1.5 depth 12 0 0.030 6 76 117 19.5 20 10 14.5 54.5 M20 x 1.5 60 33 12 19 30 30 57 21 13 34 11

Stations: 12 Stations, Port Size: C8 (ø8 One-touch Fitting), Cable Length: 2 (3.0m Cable 25 Pin)

Stations: 12 Stations, Port Size: C8 (ø8 One-touch Fitting), Thread Type: Rc, Kit Name: FD2 (D-sub Connector 25 Pin 3.0m)

Stations: 12 Stations, Port Size: ø8 One-touch Fitting, Cable Length: 3.0m Cable 25 Pin, Option 1: -, Option 2: -

Stations: 12 Stations, Port Size: ø8 One-touch Fitting, Thread Type: Rc, Kit Name: D-sub Connector 25 Pin 3.0m

Stations: 12 Stations, Port Size: C8 (ø8 One-touch Fitting), Cable Length: 2 (3.0m Cable 25 Pin), Option 1: D (DIN Rail Mounting)

Stations: 12 Stations, Port Size: C8 (ø8 One-touch Fitting), Cable Length: 2 (3.0m Cable 25 Pin), Option 1: None, Option 2: S (Built-in Silencer, Direct Exhaust)

Stations: 12 Stations, Port Size: ø8 One-touch Fitting, Cable Length: 3.0m Cable 25 Pin, Option 1: DIN Rail Mounting, Option 2: -

Stations: 12 Stations, Port Size: ø8 One-touch Fitting, Cable Length: 3.0m Cable 25 Pin, Option 1: None, Option 2: Built-in Silencer, Direct Exhaust

EXW1-NT1_eng

La operacin de este equipo est sujeta a las siguientes dos condiciones: (1) es posible que este equipo o dispositivo no cause interferencia perjudicial y (2) este equipo o dispositivo debe aceptar cualquier interferencia, incluyendo la que pueda causar su operacin no deseada.

HEC-OM-S019

Jul U QU RU SU . ZU AU BU . Month Q R S . Z A B . Oct X QX RX SX . ZX AX BX . T With stand for vertical installation 8 1 15 9 D-sub 15 pin (Socket type) Fixed screw: M2.6 Description No.

High Vacuum L Type Valve

TY 1st printing: SU 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015 SMC Corporation All Rights Reserved 19 XL-OMS0001-B

AMX-OM-L024_e

SU PER M I ST SEPARATO R Seri es AM E W ARN I N G Chem i cal s Corrosi ve gas + At m osphere Cont ai ni ng organi c sol vent Keep f ol l ow i ng t o operat e Super m i st separat or properl y. O PERATI O N M AN U AL M i n. 0. 05 M Pa M ax. 1. 0 M Pa Fol l ow i ng envi ronm ent s l ead t o cause breakage. Envi ronm ent Low er t han 5 D o not use under f ol l ow i ng envi ronm ent .

A

(3.25) 1 1/8 3.9 1 1/2 1/2 3/8-24 3 3/4 0 1.57 1 1.18 4 1/4 2.72 2.34 1.25 5.83 5/8 1 1/4 3/4 6 7/8 0.87 1.05 5/8 3/4-16 7/8 1/2 1 3/8 400 (4) 1 1/8 4.7 1 1/2 1/2 3/8-24 4 1/2 0 1.57 1 1.18 4 1/4 2.72 2.34 1.25 5.83 5/8 1 1/4 3/4 6 7/8 0.87 1.05 5/8 3/4-16 7/8 1/2 D I M E N S I O N S S I D E L U G M O U N T I N G T Y P E NC A1S E BORE (INCH) KK A B C DD EA G SS ST MM D EE J SB LF SW SY SU

SX

Crimping connector for division 1-6-114 115 Base Mounted Series SX3000/5000 Type SV Mitsubishi Electric Corporation CC-LINK System Type SH NKE Corporation Uni-wire H System Type SU JEMANET (JPCN-1) DIP.SW B RATE STATION NO.

Stations: 3 Stations, Port Size: 04 (Rc1/2), Electrical Entry Direction: D (Plug-in F Kit D Side), Cable Length: 1 (1.5m Cable 25 Pin), Option: SU (Built-in Silencer, Direct Exhaust from U Side)