Rotary Actuator

&Q2 Q3 R S T V1 V2 W X Y CRB2B=10-=S CRB2B=10-=SE CRB2B=15-== CRB2B=15-==E CRB2B=20-== CRB2B=20-==E CRB2B=30-== CRB2B=30-==E CRB2B=40-== CRB2B=40-==E M3 0.004 0.016 0 29 15 8 14 3 1 5 9 0.5 9.5 9.5 24 6 M3 14 3.6 30 37 19.8 8.5 14.5 4 9 (6) 0.036 M3 M3 0.004 0.016 0 0.043 34 20 9 18 4 1.5 6 10 0.5 14 10 29 M3 19 7.6 39.5 47 21 11 17 6 5 12 (10) (5) M4 M4 0.004 0.016 0 0.043 42 29 10 20

EX120/121/122

1 10 Connector for unit (Plug) o !

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Tubing O.D.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

37 97 6.3 24 110 6 7 10 50 20 60 20 13.5 30 30 42 * Supplied with 4 mounting screws, clevis pin, and clevis pin bracket.

C95

200 10 125 15 15 + 55(n-2)/2 n = 2, 4, 6, 8 20 20 + 55(n-2)/2 n = 2, 4, 6, 8 20 20 20 + 55(n-2)/2 n = 2, 4, 6, 8 25 25 + 55(n-2)/2 n = 2, 4, 6, 8 10 100 35 100 + 100(n-2) n = 2, 3, 4, 5 35 + 30(n-2) n = 2, 3, 4, 5 10 55 35 55 + 55(n-2) n = 2, 3, 4, 5 35 + 30(n-2) n = 2, 3, 4, 5 10 10 + 40(n-2)/2 n = 2, 4, 6, 8 10 10 + 40(n-2)/2 n = 2, 4, 6, 8 10 10 + 30(n-2)/2 n = 2, 4, 6, 8 15 10 + 45(n

LEC-OM02904

(10V/10pulse) CCW CCW 10[V] 10[V] 10[pulse] 10[pulse] 0 0 10[pulse] 10[pulse] 10[V] 10[V] CW CW A (124) (10V/1Mpulse) B (124) (10V/10Mpulse) CCW CCW 10[V] 10[V] 1M[pulse] 10M[pulse] 0 0 1M[pulse] 10M[pulse] 10[V] 10[V] CW CW 5 25 5 C (124) (10V/100Mpulse) D (3) CCW 10[V] 8[V] 100M[pulse] 0 100M[pulse] 400[V] 0 10[V] CW E 2(45) CCW 8[V] 0 8[V] CW 1. 2. () 3. 400V8V/800V 4. 5.

MLGP

MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking ID IE IF IG IH J K L 79.5 10 10 12 32.5 8.5 9 9 83 M5 M5 M6 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 9.5 10 9 24 30 34 6 7.5 9 18 21 24 32 3 20 25 32 20, 30, 40, 50, 75, 100, 125 150, 175, 200, 250, 300, 350 84 36.5

MLGP

MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking ID IE IF IG IH J K L 79.5 10 10 12 32.5 8.5 9 9 83 M5 M5 M6 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 9.5 10 9 24 30 34 6 7.5 9 18 21 24 32 3 20 25 32 20, 30, 40, 50, 75, 100, 125 150, 175, 200, 250, 300, 350 84 36.5

Programless controller Step motor (servo 24 VDC)

LEP6 LEP10L LEP10 J K J K J K Low 7 14 12 24 12.5 25 Pushing force [N] Middle 8.5 17 16 32 19 37.5 High 10 20 20 40 25 50 Pushing speed [mm/s] 20 10 20 10 20 10 Pushing force accuracy is 30%F.S. for the LEP6 and 25%F.S. for the LEP10. Refer to the operation manual of the electric actuator for details.

Rotary Actuated Air Gripper MHR2, MDHR2/MHR3, MDHR3

-15 -20 -30 -10 -15 -10 -15 -20 -30 -10 -15 -10 -15 -20 -30 -10 -15 1 9h9 M3 x 0.5 0.88 M3 x 0.5 0.88 M3 x 0.5 0.88 6 6 6 6 6 3 3 12h9 2 2 2 1.5 4 4 M4 x 0.7 2.1 M4 x 0.7 2.1 M4 x 0.7 2.1 8 8 8 8 8 14h9 5 5 M5 x 0.8 4.3 M5 x 0.8 4.3 M5 x 0.8 4.3 10 2 10 10 10 10 16h9 1 9h9 3 3 3 M3 x 0.5 0.88 1.5 6 M3 x 0.5 0.88 M3 x 0.5 0.88 6 6 6 6 3 3 12h9 How to Locate Finger and Attachment How to Mount

MLGP

A + Stroke 20Data Common Dimensions: MVGPM/MVGPL B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) ID IE IF IG IH J K L 20 25 32 9.5 10 9 79.5 10 10 12 32.5 8.5 9 9 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 83 93 112 6 7.5 9 24 30 34 M5 M5 M6 32 18 21 24 3 20, 30, 40, 50, 75, 100, 125 150, 175, 200,

MLGP

A + Stroke 20Data Common Dimensions: MVGPM/MVGPL B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) ID IE IF IG IH J K L 20 25 32 9.5 10 9 79.5 10 10 12 32.5 8.5 9 9 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 83 93 112 6 7.5 9 24 30 34 M5 M5 M6 32 18 21 24 3 20, 30, 40, 50, 75, 100, 125 150, 175, 200,

Auto Switch Guide

Contact protection box CD-P11 C76 LED Brown OUT Brown Choke coil Resistor C85 Reed switch Zener diode Surge absorber C95 OUT Blue Blue Weight CP95 (g) D-A73 NCM D-A72 D-A73 D-A80 Auto switch model 10 10 10 0.5 NCA Lead wire length (m) 47 47 47 3 LED Brown OUT (+) Brown Contact protection box CD-P11 CD-P12 77 5 Resistor DReed switch Zener diode Dimensions -X OUT () Blue Blue 20Indicator

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

MHR2-10/MDHR2-10 MHR2-10/MDHR2-10 20 20 Pressure 0.6 MPa Pressure Gripping force (N) Gripping force (N) 15 15 0.6 MPa 0.5 MPa MHZ 0.5 MPa 10 10 0.4 MPa 0.4 MPa MHF External grip 0.3 MPa 0.3 MPa 5 5 MHL 0.2 MPa 0.2 MPa MHR 0 10 20 30 40 50 0 10 20 30 40 50 Gripping point L (mm) Gripping point L (mm) MHK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

Internal hold External hold MHR2-10/MDHR2-10 MHR2-10/MDHR2-10 20 20 Pressure 0.6MPa Pressure 15 15 Holding force (N) 0.6MPa Holding force (N) 0.5MPa 0.5MPa External hold 10 10 0.4MPa 0.4MPa 0.3MPa 0.3MPa 5 5 0.2MPa 0.2MPa 0 10 20 30 40 50 0 10 20 30 40 50 L L Holding point L (mm) Holding point L (mm) MHR2-15/MDHR2-15 MHR2-15/MDHR2-15 Pressure 0.6MPa 30 30 Internal hold Pressure 0.6MPa 0.5MPa

1.63

MGPWM Common Dimensions (mm) A E Standard stroke (mm) Bore size (mm) B C DA DB FA FB G GA GB H J K L 50 st or less Over 50 stroke 50 st or less Over 50 stroke 20 25 32 40 50 63 44.5 47 52 56 60.5 67.5 34 35 37 41 42 49 10 10 14 14 18 18 10 12 16 16 20 20 7.5 9 10 10 12.5 12.5 3 3 5 5 6 6 36 42 48 54 64 78 9.9 10.3 11.4 13.5 14 15.5 7.5 8.7 9 10.5 11.1 13.5 137 157 190 206 258 286 18 21 24

Air Slide Table Series MXJ

Lr=40 mm MXJ4 MXJ4 MXJ4 0.03 0.20 0.10 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXJ4-10 MXJ4-10 MXJ4-5 MXJ4-5 MXJ4-5 MXJ4-5 -10 0.08 -10 0.15 MXJ4-10 MXJ4-10 0.02 0.06 MXJ4-5 MXJ4-5 0.10 0.04 0.01 0.05 0.02 20 40 60 0 10 30 50 20 40 60 0 10 30 50 0 10 5 15 Load (N) Load (N) Load (N) MXJ6 MXJ6 MXJ6 0.04 0.10 0.20 Table displacement amount

CV/MVGQ

15-10 RS Q G RS H A RZQ Series CVM5/CVM5K 20 25 32 40 Standard MI W S 10-15-16 10-15-26 Double acting Nonrotating rod CEP1 CE1 Series CVM3/CVM3K Single acting (Spring return) (Spring extend) CE2 20 25 32 40 Standard 10-15-31 10-15-44 ML2B Nonrotating rod C J G5-S CV Series CV3/CV3K 40, 50 63, 80 100 Standard 10-15-50 MVGQ Double acting Nonrotating rod 40, 50 63 CC 10-15-63 RB Series CVS1/

CV/MVGQ

28 32 14 24 1.6 4.5 8 4 14 84 12 M8 x 1 72 15 M4 x 0.7 9.5 60 34.5 12.5 52.5 28 42 20 33 2.3 5.5 8 5 20 85 18 M10 x 1 73 15 M5 x 0.8 9.5 61 40.5 12.5 52.5 10-15-15

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate