Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

97 92 87 82 196 186 176 171 166 156 146 141 136 131 126 121 116 111 106 60 40 30 182 172 162 157 152 142 132 127 122 117 112 107 102 97 92 212 202 192 187 182 172 162 157 152 147 142 137 132 127 122 70 50 40 8-29-9 10 Series CXS Proper Auto Switch Mounting Position (Detection at stroke end) Electrical entry direction: Inward Electrical entry direction: Outward D B A C Operating Range D B

MY1

Table (1) 50 63 Bore size (mm) 6 to 26 14 to 54 87 60 A to A MAX B to B MAX C 6 to 31 14 to 74 102 85 Max. adjustment range Disassembly and Assembly Procedure Disassembly step 1. Remove the hexagon socket head cap screws 1, and remove the upper plates. 2. Remove the top cover. 3. Remove the hexagon socket head cap screws 2, and remove the end covers and couplers. 4.

Table of Contents

B 5.7 7 9 12 C 2 2.5 4 5 MM M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 A 3 4 5 6 B 5.7 7 9 12 A 3 4 5 6 Model MHZL2-101 MHZL2-161 MHZL2-201 MHZL2-251 Model MHZL2-102 MHZL2-162 MHZL2-202 MHZL2-252 MHY MHW MRHQ Flat Type Fingers [3] Misc.

MXS

(Unit: N) Operating pressure (MPa) Bore size (mm) Rod diameter (mm) Piston area (mm2) Operating direction MXP 0.2 0.3 0.4 0.5 0.6 0.7 11 17 23 29 34 40 OUT 57 6 MG 3 8 13 17 21 25 29 42 OUT IN 20 30 40 51 61 71 101 8 4 MGP Standard Stroke 15 23 30 38 45 53 75 OUT IN 45 68 90 226 113 136 158 Model Standard stroke (mm) 12 6 MGQ 34 51 68 85 IN 170 102 119 MXS 6 10, 20, 30, 40, 50 80 121 161

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

(mm) Female rod end (mm) With air cushion ZZ Bore size H Bore size S A1 GA RA ZZ WH WB WA MM Rubber Air 8 8 12 13 18 18 21 25 87 (96) 102 (114) 102 (114) 13 14 14 15 16 16 19 22 22 26 26 8 9 9 15 (17) 16 (18) 17 (18) 26 30 30 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.5 M10 x 1.5 M14 x 1.5 M16 x 1.5 139 (148) 162 (174) 162 (174) 1.5 3 3 40 50 63 92 (100) 93 (101) 95 (103) 95 (104) 108 (

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

x M5 x 0.8 thread depth 8 N 35 1 x F 2 4 x M4 x 0.7 thread depth 6 4H9 ( ) depth 3.5 +0.030 0 27 M 0.5 30 32 Z ZZ (NN 1) x H G 8.5 18.5 8.5 18.5 H B A 4.2 8.5 9 9 20 1 4H9 ( ) depth 3.5 +0.030 0 5 B A NN x M5 x 0.8 thread depth 10 4H9 ( ) depth 3.5 +0.030 0 HA GA Section AA Section BB (mm) Model F 35 35 35 50 35 55 65 ZZ 99 99 99 111 131 177 231 M 71 71 71 83 103 149 203 Z 70 70 70 82 102

Refrigerated Air Dryer

Note 3) Refer to pages 101 and 102 for further details on optional specifications.

MXS Series Air Slide Table

Model F 50 50 50 60 35 60 70 75 80 FF 40 40 40 50 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 KA NA 2 2 2 2 2 2 4 4 4 M 92 92 92 102 115 156 197 255 295 HA 45 45 45 55 35 70 70 76 80 ZZ 108 108 108 118 131 172 213 271 311 N 4 4 4 4 6 6 6 8 8 G 22 22 22 22 20 26 32 40 30 H 45 45 45 55 35 35 35 38 40 NN 2 2 2 2 3 4 5 6 7 I 12 12 12 12 12 33 50 67 82 J 47 47 47 57 70 90 114 155 180 K 35

CJ2

Bore size (mm) 6 10 16 Basic style Axial foot style Rod side flange style Double Mounting 15 stroke 11 28 63 clevis style 30 stroke 16 35 80 Mounting nut Standard equipment Option 45 stroke 18 44 102 Rod end nut 60 stroke 23 53 124 Basic weight Clevis pin 75 stroke 145 Single knuckle joint 100 stroke 188 Double knuckle joint 125 stroke 224 T-bracket 150 stroke 250 Pin and snap

3

moment of inertia [kgm2] Allowable moment of inertia [kgm2] 102 102 MK 103 103 50, 63 Standard arm single unit 32, 40 Standard arm single unit 104 50 100 200 104 50 100 200 Maximum piston speed [mm/s] Maximum piston speed [mm/s] 386 Model Selection MK Series Note) Maximum piston speed is equivalent to approximately 1.6x the average piston speed.

CJ2

(g) 6 10 16 Bore size (mm) Mounting Basic Axial foot Front flange Double clevis 15 Stroke 11 28 63 30 Stroke 16 35 80 Mounting nut Standard Option 45 Stroke 18 44 102 Rod end nut 60 Stroke 23 53 124 Basic weight Clevis pin 75 Stroke 145 Single knuckle joint 100 Stroke 188 Double knuckle joint 125 Stroke 224 T bracket 150 Stroke 250 Double clevis or double knuckle joint are packaged with

e-Rodless Actuator

(A clearance of 40 or more is required.) (60) (74.7) 101.7 60 (40) 80 40 74.7 27 27 4H7 depth 5 Motor 72 43.5 50 42 60 102 102 50.4 40 5 5.1 40 3.5 40 Long hole depth 5 Controller 4 15.5 6 7.2 5.6 (Max. 8.6) 14.4 6.5 4H7 2-6.5 counterbore depth 3.3 28 (60.3) 87.3 2 x 2-3.3 through hole 4 152 + Stroke 4-M4 x 0.7 depth 7 FG terminal M3 T-slot section for mounting I/O cable (9 wires) 5.8 3.5

ZP

Lateral Lateral ZPT VAC p. 33 p. 34 p. 51 p. 52 p. 69 p. 70 p. 87 p. 96 p. 105 p. 106 With adapter ZPR p. 35 p. 37 p. 53 p. 54 p. 71 p. 73 p. 88 p. 89 p. 97 p. 98 p. 107 p. 108 VAC VAC With adapter ZPY p. 39 p. 41 p. 55 p. 56 p. 75 p. 77 p. 90 p. 91 p. 99 p. 100 p. 109 p. 110 With adapter VAC VAC VAC VAC VAC ZPT p. 43 p. 57 p. 79 p. 92 p. 101 p. 111 With buffer ZPR p. 46 p. 59 p. 82 p. 93 p. 102

RZQ

39.5 36.5 21.5 21 45 77 16.5 15 M16 x 2.0 103 7 36 28 60 9 M10 x 1.5 14 Rc1/4 18 4.5 10.5 6.5 84 19 10-10-10 11 3 Position Cylinder Series RZQ Foot style: RZQL Foot Style (mm) B + Full stroke L Bore size (mm) A LH LS B L LD LG 32 30 107.7 82.5 18 6.6 4 66.5 Special cap bolt 40 33 92 76 117.2 18 6.6 4 50 39 96.5 73.5 126.7 22 9 5 LY RE A B 63 46 102 76 138.2 28 11 5 LH REC Bore size (mm)

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Input: CLR, TL Output: TLOUT Reconnect Reconnection of axis Reconnect Dimensions 34.5 w 102 4 No. Description Function 1 LCD A screen of liquid crystal display (with backlight) q r 2 Ring A ring for hanging the teaching box 3 Stop switch When switch is pushed in, the switch locks and stops.

SFOD-OMT0009CN

. / . 96 13.1 . 96 13.2 . 97 13.3 . 97 13.4 . 98 13.5 . 99 13.6 . 100 14. . 100 14.1 / . 100 14.2 . 101 14.3 . 102 3 No.SFOD-OMT0009CN-B 14.4 . 102 14.5 . 102 14.6 . 103 14.7 . 103 15. . 104 15.1 . 104 15.2 . 106 1. . 108 1.1 LEY/LEYG . 108 1.2 LEFS . 108 1.3 LES(H) . 109 1.4 LEP . 109 1.5 LEFB . 110 1.6 LER . 110 1.7 LEH . 110 4 No.SFOD-OMT0009CN-B JXC73/83 Series/

SZ3000

L n 2 5 6 7 8 9 10 4 3 Internal Pilot Manifold L Dimension n: Stations (n1 + n2) L n 2 5 6 7 8 9 10 4 3 External Pilot Manifold L Dimension n: Stations (n1 + n2) L1 L2 L3 L4 L1 L2 L3 L4 110.5 100 81 15 123 112.5 91.5 16 135.5 125 102 17 148 137.5 112.5 18 148 137.5 123 12.5 160.5 150 133.5 13.5 173 162.5 144 14.5 185.5 175 154.5 15.5 198 187.5 165 16.5 123 112.5 91.5 16 135.5 125 102 17 148

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

FT FX FY FZ G GA GB J K M MA MM NA NB P D 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 40 23 10 60 60 44 18 45 25 9 10 77 44 95 14 17.5 9.5 M8 x 1.25 18 16 20 M14 x 1.5 30 22 1/4 17 50 25 9 73 73 53 20 50 28 11 10 95 53 115 17 17 13 M10 x 1.5 20 22 22 M16 x 1.5 30 26 3/8 19 63 28 8 80 80 60 22.4 55 30 11 12 102

Air Cylinder CP Series Cylinder Positioner Assembly

) 3.94 (100) r 5 0 (38) (62) 1.38 (35) 0.43 ( 1 1 ) M l 8 i 1 . 5 I 1 8 (30) 1.22 ( 3 1 ) 3.4 (90) 2 2 4 (58) 6 2 6 1159) 2.05 (s2) 11.2) 2.60 166) s T o 6 5 7 (167) 1 3 8 (35) 3.35 (85) 2 5 2 (64) 0.79 l2D) 1.57 (40) 0.39 (10) 3.94 (100) 1.50 (38) 2.44 (62) 1.38 (35) 0.55 (14) M 1 8 x l 5 1.22 ( 3 r ) 1.22 ( 3 1 ) 3.86 (s8) 2.24 (s3) 6.69 (170) 2.O5 (.521 2.da (66) (r78) 1.57 (40) 402 (102

Compact Guide Cylinder End Lock Type SeriesMGP

25st or less Over 175st 25st or less Over 175st 42 4 4.5 3 6 M8 x 1.25 16 21 97 140 20 12.5 55.5 32 32 50 4 4.5 3 6 M8 x 1.25 16 22 97 102 140 20 6 11 49 40 40 66 5 6 4 8 M10 x 1.5 20 24 50 106.5 118 161 25 9.5 21 64 50 80 5 6 4 8 M10 x 1.5 20 24 63 106.5 118 161 25 4.5 16 59 63 End lock mechanism dimensions MGPL (ball bushing)/A, DB, E dimensions (mm) (mm) E A HN (Max.)