MGP

Spring washer (nominal size 3) 85 77 68 60 51 43 34 26 17 85 IN 201 181 161 141 121 101 80 60 40 201 OUT 40, 50, 63, 80, 100 8 16 BMG1-040 151 136 121 106 91 76 60 45 30 151 IN 314 283 251 220 188 157 126 94 63 314 OUT 10 20 236 212 189 165 142 118 94 71 47 236 IN 491 442 393 344 295 246 196 147 98 491 OUT 12 25 378 340 302 265 227 189 151 113 76 378 IN 804 724 643 563 482 402 322 241 161

Air Slide Table

Extension stroke end adjuster Retraction stroke end adjuster 121 Air Slide Table/Height Interchangeable Type MXQ Series Dimensions: MXQ 25 [Functional Option] MXQ 25-mm8 Buffer, Centralized adjuster (25) Double-ported type MXQA *1 The extension stroke end adjuster (shock absorber) uses long adjustment nut and bolt specifications (-X28).

MGP

101 80 60 40 201 OUT 8 16 151 136 121 106 91 76 60 45 30 151 IN MGG 314 283 251 220 188 157 126 94 63 314 OUT 10 20 MGC 236 212 189 165 142 118 94 71 47 236 IN 491 442 393 344 295 246 196 147 98 491 OUT 12 25 MGF 378 340 302 265 227 189 151 113 76 378 IN 804 724 643 563 482 402 322 241 161 804 OUT CY1 16 32 603 543 482 422 362 302 241 181 121 603 IN 1257 1131 1006 880 754 629 503 377 251

LX

Stroke + 124 Stroke + 141 Motor unit 4.5 4H9 4H9 3 6 38 34 Section C detail (Scale: 5/1) Stroke + 104 Stroke + 121 12 7.5 4-M6 x 1 4H9 E 1 5.4 8.4 4-9.5 4-5.6 50 4.5 Section C 4-M6 x 1 9 43 5.5 D 30 Cross section BB Refer to page 300 for mounting.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

4PCA-1557688 (Socket) 3 4 EX260 EX123/124/126 EX500 EX600 EX245 EX250 EX120/121/122 EX140 EX180 EX510 M8/M12 ATEX 7.8 7.8 Marker tag Marker tag Socket connector pin assignment B-coded (Reverse key) M12 SPEEDCON Type 1 Type 2 Type 3 Type 1 Type 2 50 5000 47.3 22.5 2 1 5 !

2 Phase Stepper Motor/Without Motor Brake Series LXP

Stroke + 124 Stroke + 141 Motor unit 4.5 4H9 4H9 3 6 38 34 Section C detail (Scale: 5/1) Stroke + 104 Stroke + 121 12 7.5 4-M6 x 1 4H9 E 1 5.4 8.4 4-9.5 4-5.6 50 4.5 Section C 4-M6 x 1 9 43 5.5 D 30 Cross section BB Refer to page 300 for mounting.

Made to Order

[mm] Bore size Stroke range Without magnet for auto switch Built-in magnet for auto switch CD CT CU CW CX CY CZ D E F J A B A B XC26A XC26B XC26C 32 50 or less 111 23 121 33 10 5 14 20 12.5 52.5 36 16 45 7.5 4.5 75, 100 121 33 40 50 or less 119.5 29.5 129.5 39.5 10 6 14 22 16.5 19.5 12.5 52.5 36 16 52 7.5 5 75, 100 129.5 39.5 50 50 or less 147.5 30.5 157.5 40.5 14 7 20 28 16.5 19.5 12.5

1

The standard grease supply port has a hexagon socket head set screw. 25 39 86 (94) 64 29 46 96 (105) 77 31 57 109 (121) 92 34 56 112 (124) 100 46 68 137 (151) 115 47 68 138 (152) 140 8-31-121 104 Made to Order Individual Specifications: Guide Cylinder Series MGG Please contact SMC for detailed dimensions, specifications, and lead times.

MG

101 80 60 40 201 OUT 16 8 151 136 121 106 91 76 60 45 30 151 IN Bore size (mm) Mounting bracket part no.

24

Auto Switch Mounting [N] MGZ Bore size [mm] Rod size [mm] Operating direction Piston area [mm2] Operating pressure [MPa] 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 MGT 16 8 OUT 201 40 60 80 101 121 141 161 181 201 IN 151 30 45 60 75 90 106 121 136 151 20 10 OUT 314 63 94 126 157 188 220 251 283 314 IN 236 47 71 94 118 141 165 188 212 236 25 10 OUT 491 98 147 196 245 295 344 393 442 491 IN 412 82

Stations: 12 Stations, Piping: 1 (P Common, R Common, A Side)

Stations: 12 Stations, Piping: P Common, R Common, A Side, Thread: -, Option: -, CE/UKCA Compliant: -

ISO Cylinder

10 22 16 16 M16 x 1.5 6 M5 x 0.8 17 8 38 14.2 5 M6 x 1 24 8 18.3 16 10 22 20 20 M22 x 1.5 8 G1/8 20 8 44 17 6 M8 x 1.25 32 11 24 22 13 24 25 20 M22 x 1.5 10 G1/8 22 8 50 20 8 M10 x 1.25 32 11 30 22 17 28 Bore size S Z 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 8 64.5 (70.5) 92.5 (98.5) 10 64.5 (68.5) 92.5 (96.5) 12 70 (73.5) 108 (111.5) 16 69 (72.5) 95 (98.5) 121

High Vacuum Angle Valve

G G Heater A A [mm] Series Valve size A B C D E Fn G H J K 25 50 121 48 27 12 40 26 44 21 40 65 171 66 39 11 55 41 67 29 50 70 185 79 31 11 75 52 76 29 9 XLC XLG 19 Heat-resistant 2-Color Indicator Solid State Auto Switch: Direct Mounting Type D-M9NJ/D-M9PJ RoHS Refer to the SMC website for details on products that are compliant with international standards.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NA 2 2 2 2 2 2 4 4 4 NN 2 2 2 2 3 4 5 6 7 KA 169 223 275 H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70 76 88 G 15 15 15 15 15 19 37 41 19 GA 25 25 25 35 50 54 107 155 195

SMC

121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NA 2 2 2 2 2 2 4 4 4 NN 2 2 2 2 3 4 5 6 7 KA 169 223 275 H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70 76 88 G 15 15 15 15 15 19 37 41 19 GA 25 25 25 35 50 54 107 155 195

ZSM1-115/121

ZSM1-121 Connection example with PLC In the case of common terminal is negative LED Brown ( + ) Brown Resistance Reed switch Main circuit of switch Black ( ) ZSE ISE PLC Input terminal Zener diode ZSP () Blue Blue PS COM ISA PSE + IS ISG Dimensions ZSM 23 10 15 ZSM1-115 ZSM1-121 Pressure adjusting screw 52.5 500 Indicator light Indicator light R 1/8 871 Series ZSM1-115/121 Specific Product

CXS

0.6 0.7 33.6 22.4 28.0 8.4 39.2 11.2 16.8 OUT 4 CXSJ6 21.7 18.6 12.4 15.5 4.6 6.2 9.3 IN 31 110 94.2 62.8 78.5 OUT 31.4 47.1 15.7 157 6 CXSJ10 70.0 IN 60.0 40.0 50.0 20.0 30.0 10.0 100 Note) Theoretical output (N) = Pressure (MPa) x Piston area (mm) Weights (g) Standard stroke (mm) Model 75 10 20 67 50 30 40 57 47 77 CXSJM6 87 68 58 48 78 CXSJL6 88 129 114 99 144 198 CXSJM10 159 136 121

Dual Rod Cylinder Series CXSJ/CXS

50.0 40.0 30.0 IN 20.0 100 10.0 247 212 177 141 106 OUT 70.6 353 35.3 CXSJ15 8 176 151 126 101 75.6 IN 50.4 252 25.2 Deflection X (mm) 440 377 314 251 188 OUT 126 628 62.8 CXSJ20 10 330 283 236 188 141 IN 94.2 471 47.1 687 589 491 393 295 OUT 196 982 98.2 CXSJ25 12 529 454 378 302 227 IN 151 756 75.6 1126 965 804 643 482 OUT 322 1608 161 CXSJ32 16 844 724 603 482 362 IN 241 1206 121

High Vacuum Angle Valve

G G Heater A A [mm] Series Valve size A B C D E Fn G H J K 25 50 121 48 27 12 40 26 44 21 40 65 171 66 39 11 55 41 67 29 50 70 185 79 31 11 75 52 76 29 9 XLC XLG 19 Heat-resistant 2-Color Indicator Solid State Auto Switch: Direct Mounting Type D-M9NJ/D-M9PJ RoHS Refer to the SMC website for details on products that are compliant with international standards.