for filtration of compressed air requiring high cleanliness for coating lines, compressed air for clean rooms and compressed air for equipment necessary to avoid oils.Super mist separator, Modular connection is possible , Filter replacement time can be judged visually , Port size: 1/8, 1/4, 3/8, 1/2, 3/4, 1, 1 1/2, 2 , Threads: Rc, G, NPT, SUPER MIST SEPARATOR, SUPER MIST SEPARATOR, 123

01-mxp-e

GR-S-010 (10 g) GR-S-020 (20 g) GR-L-005 (5 g) GR-L-010 (10 g) Guide unit Cylinder unit 123

INFORMATION Step Motor Controller 5 types of communication protocols New New

Dimensions JXCL1 35 4.5 For body mounting (Screw mounting) (11.5) 67 32.5 1.2 84.2 64.2 35 193.2 (When removing DIN rail) 187.3 (When locking DIN rail) 152.5 161 170 Mountable on DIN rail (35 mm) 77 17.5 4.5 For body mounting (Screw mounting) L 5.25 12.5 (Pitch) 7.5 5.5 (25) (35) 1.25 L Dimensions [mm] No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L 23 35.5 48 60.5 73 85.5 98 110.5 123

Multi-Axis Step Motor Controller

Refer to the dimension drawings on pages 7 and 10 for the mounting dimensions. (35) (25) 5.5 8 (1.5) L Dimension No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L 23 35.5 48 60.5 73 85.5 98 110.5 123 135.5 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 L 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 398 410.5 423

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

: 10 mm/s2 1.0 Cycle time [s] Cycle time [s] LEL 1.0 LEM 0.5 0.5 LEY Acceleration/Deceleration: 20 mm/s2 Acceleration/Deceleration: 20 mm/s2 LES 0.0 0.0 Stroke [mm] 0 3000 500 1000 1500 2000 2500 Stroke [mm] 0 2000 500 1000 1500 LEPY LEPS Maximum speed/acceleration/deceleration values graph for each stroke LER LEH LEY -X5 11LEFS 11LEJS 25ALEC LEC S LEC SS-T LEC Y Motorless LAT LZ LC3F2 123

Exhaust Cleaner for Vacuum Pump AMV Series

AMV15 SP ZCUK 0.015 Inlet pressure (MPa) AMJ AFJ 0.01 AMV AMV AMV15 AMV160 AMV75 AMV37 AMV6 AMV3 ZH -X185 0.005 Related Products 0 100 200 500 1,000 2,000 5,000 10,000 20,000 Flow rate (L/min [ANR]) Dimensions AMV3, 6, 15, 37 AMV 75, 160 B Exhaust Exhaust A A B Port size IN IN C E 8 x d Flange part Model Port size A 231 305 410 710 562 860 B 123 153 210 210 500 500 C 80.7 105.3 d 19 19 E

Series AP3100

Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Dimensions inch (mm) AP3260 2.12 (53.8) 0.44 (11.2) 3.0 (76.2) A B B 45 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 1.0 (25.4) Connections inch inch A B Material (mm) (mm) FV4 MV4 TW4 FV6 MV6 TW6 1.39 (35.3) 1.06 (26.9) (l28.4) S 1.12 sq. 1.93 (49.0) 1.325 (33.7) 123

Manifold Regulator ARM1000/2000 Series

Common IN, with plug) IR IRV VEX SRH (Pitch) IN (Individual IN) IN (Common IN) SRP SRF Symbol Model Dimensions ITV C 34 43 D 21 28 E 18 27 F 56 70 G 16 20 H 9 11.5 J 18 24 K 19 28 M 52 66 P 9 11.5 Q 11.5 16.5 R 4.8 4.8 A 4.5 4.5 B 25 34.5 ARM1000 ARM2000 IC ITVH Dimensions by the Number of Stations Manifold stations (n) ITVX Model Symbol 1 36 27 48 39 2 55 46 76 67 3 74 65 104 95 4 93 84 132 123

COQ2BP

Max 1.25 9 80 92 108 8 M1 OX 1.S 15 18 M1 Oxl .5 9 63 103.5 MIOx l .S 11 99 116 13' 10 M1 6X2.0 21 22 M12xl .7S 11 123 Ml 2x 1.75 80 Clevis Mount: C0020P 0 -0 OM-DO Special cap bolt (mm) eo.. _ N CD CL ew ev A 0 R CU ex cz RR Ll H H Thread e I (mm) C Depth M8xl .2S M8x l .25 14 117 I .

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

13 Series CY1F Theoretical Output Weight Unit: kg Unit: N Piston area (mm2) Operating pressure [MPa] Standard adjustment bolt weight Weight of adjustment bolt for 25 mm adjustment Basic weight Model Bore size (mm) Additional weight per each 50 mm of stroke 0.2 0.3 0.4 0.5 0.6 0.7 CY1F10 78 23 31 39 46 54 0.520 0.095 0.004 0.012 10 15 CY1F15 176 0.815 0.133 0.004 0.012 15 35 52 70 88 105 123

XM, XY

viscous flow) Shows flow rate when P= 0.1 MPa 20 18 XMD/XYD-63 XMD/XYD-80 16 14 XMD/XYD-50 12 10 XMD/XYD-40 8 6 XMD/XYD-25 4 2 0 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.4 4.0 4.5 5.0 5.5 6.0 Adjustment nut rotations (n) 490 Stainless steel High Vacuum Angle/In-line Valve XMD, XYD Series Dimensions XMD/Angle type D C L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) A B K S M J H G A (mm) Model A 123

RB/RBL/RBQ

-X 123 147 172 270 295 368 614 Taking into consideration the corresponding weight of the impacting object Me, calculated using Data D and collision speed , check provisional model compatibility with the condition of application. If this is satisfactory, then the said provisional model will be the applicable one. 177 212 247 389 424 530 884 7.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

13 Series CY1F Theoretical Output Weight Unit: kg Unit: N Piston area (mm2) Operating pressure [MPa] Standard adjustment bolt weight Weight of adjustment bolt for 25 mm adjustment Basic weight Model Bore size (mm) Additional weight per each 50 mm of stroke 0.2 0.3 0.4 0.5 0.6 0.7 CY1F10 78 23 31 39 46 54 0.520 0.095 0.004 0.012 10 15 CY1F15 176 0.815 0.133 0.004 0.012 15 35 52 70 88 105 123

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Hexagon socket head taper plug) 2-P 2-P (Hexagon socket head taper plug) 1 1 NE PP QQ XXSS RR SS H TT UU PH RW VV UU G A N T-slot for body mounting Z + stroke (mm) P M5 x 0.8 1/8 1/4 MM M4 x 0.7 M5 x 0.8 M6 x 1 L 80 110.8 180 LD 3.4 5.5 9 LB 50.4 71.7 80.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5 G 8.5 10.7 15.5 N 20 25 40 C 3.3 5.4 32.5 M 7 9 13 B 6.5 9.5 14 LW 83 123

Type: Rail, Type: DIN Rail for SV1000 / 2000, Number of Inputs/Outputs: -, Connector: -, Mounting Method: -, Port pipe connection port diameter: -, Rated Voltage: -, Specification: -, Thread standard: -, Dimension: Length: 123 mm, Applicable valve: -, Pressure reduction port: -, Option: -

Type: Rail, Type: DIN Rail for SV3000 / 4000, Number of Inputs/Outputs: -, Connector: -, Mounting Method: -, Port pipe connection port diameter: -, Rated Voltage: -, Specification: -, Thread standard: -, Dimension: Length: 123 mm, Applicable valve: -, Pressure reduction port: -, Option: -

・While it is possible to mount a G36-10-01 or G46-10-01 pressure gauge on a VEX113□/123□ series regulator, it will be larger than the width of the product body.
・It is also possible to mount a G46-10-01 pressure gauge on a VEX133 □ series regulator so long as it does not interfere with the piping.

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 123, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Without magnet, Port thread type: Rc, Auto Switches: Without auto switch

Load Mass (Horizontal Mounting)(kg): 20~39.9, Table Size Length L(mm): 110.8, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide 1 axis, Table Size Width W(mm): 123, Table Size Height H(mm): 37, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General Purpose, Maximum Load(kg): 32, Piping Format: Centralized

Load Mass (Horizontal Mounting)(kg): 20~39.9, Table Size Length L(mm): 110.8, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide 1 axis, Table Size Width W(mm): 123, Table Size Height H(mm): 37, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General Purpose, Maximum Load(kg): 32, Piping Format: Centralized