RLQ

ML1C Rear flange style: RLQG63 D-X 60 80 204-9 41 55 + Stroke 9 8 113 + Stroke 92 108 Data Rod end nut 43.5 4-M8 x 1.25 Cap bolt 8 Double clevis style: RLQD63 Hole: 14 H10 Shaft d9 20 41 55 + Stroke 22 44 +0.4 +0.2 14 30 8 134 + Stroke 148 + Stroke -0.1 -0.3 Rod end nut 33.5 9-12-17 18 Series RLQ Dimensions: Cylinder with Bypass Piping RLQB32-B RLQB32-F Extension locking, Right-hand piping

Digital Flow Switch ( compatible)

Setting of switch operation 1_P/1_N (page 37) (Selection of display colour) Setting of Add dEC1 dEC2 (page 41) 3. Input of set values Setting of Setting of P1L/n1L Setting of P_1/n_1 P1H/n1H P1/n1 H_1 WH1 (page 40) (page 37) (page 39) 4. Delay time Setting of dtH1(ON) dtL1(OFF) (page 38) 5. Selection of display colour rED/Grn/1SoG/1Sor/2SoG/2Sor (page 41) 6.

Voltage Monitor for PFMV5

(page 41) Perform the standard value offset under no flow conditions.

PF-OMN0011_C

[F20] 45 [F22] 46 OFF [F30] 48 OFF [F80] 49 () [F81] 50 OFF [F82] 51 [*] [F90] 52 OFF [F96] 53 () [F97] 54 OFF [F98] 57 OFF [F99] 58 OFF 30 [F10](41 ) (4 L/min ) OUT1 OUT1 OFF OUT2 -24No.PF-OMN0011CN-C [F 0] 2 [F 0] [RANGE] [F 0] -25No.PF-OMN0011CN-C [F 1] OUT1 OUT1 1.

Digital Flow Switch (Integrated display type) ( compatible)

Width across flats of attachment 3/8 24 mm 1/2 27 mm 3/4 32 mm 1 41 mm 11/4 54 mm 11/2 54 mm Tighten to the specified torque for piping. The tightening torque for connection threads is shown in the table below.

LFE-OMZ0011

Apply a tool Width across flats of attachment Port size Width across flats 3/8 24 mm 1/2 28 mm 3/4 35 mm Turn the pipe 1 41 mm Ensure that the piping is tightened to the required torque. The tightening torque for connection threads is shown in the table below.

IZx-OMX0087

Product number for single unit (to order separately) Table for combination High voltage power supply module / IZTP Controller / IZTC Ion generator (nozzle) / IZTN43 43 43-L 41 41-L IZT43 IZT43-L Transistor input/output type controller and high voltage power supply module and IO-Link type controller and high voltage power supply voltage cannot be mixed.

HRX-OM-S004

SV 41. Set the product operation when "Pump maintenance" alarm is generated with [] key or [] key, and press [SEL]key to enter. Table 5.20-28 Operation setting when "Pump maintenance" alarm is generated Set value Explanation Initial value (Default setting) This alarm is not detected.

HRX-OM-Q026

PV SV HRSH Series 5.17 Pump Operation Mode Setting 5-41 HRX-OM-Q026 Chapter 5 Display and Setting of Various Functions 5.18 Warming Up Function 5.18.1 Warming up function Keep the power supply ON for this function. This function does not operate when the power is OFF.

HRX-OM-X010

HRZ Series 5.4 Examples of System Operation 5-41 5-41 HRX-OM-X010 Chapter 6 Error Message and Troubleshooting Chapter 6 Error Message and Troubleshooting 6.1 Error Message The following are to be performed in the event of an error in this system. The ALARM lamp comes on. Alarm buzzer comes on. The Alarm Display screen is displayed on the LCD screen.

JXCx-OMU0004

CNI/O . 20 6.1 . 20 6.2 (NPNPNP ) . 20 1 No.JXC-OMU0004-A (1) I/O (NPNPNP ) . 20 (2) I/O . 20 6.3 . 21 6.4 I/O . 23 7. . 24 7.1 . 25 7.2 . 32 7.3 . 35 A . 36 B . 37 C . 38 7.4 . 39 8. . 40 8.1 . 40 8.2 . 41 8.3 . 41 1 . 41 2 . 42 3 . 42 8.4 . 43 8.5 ON . 44 8.6 . 44 8.7 LED . 45 9. () . 46 9.1 . 46 9.2 . 47 9.3 . 48 9.4 . 49 10. . 50 10.1 LEF . 50 10.2 LEH . 53 10.3

Compact Vacuum Unit Ejector/ Vacuum Pump System

Note 2) Refer to the General Specifications on P.41 for the specifications not shown in this table. 44 - Doc. no.

Filter Regulator

Disassembly Drawing 41-44 13. Dimensions 45-47 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Air Combination

PC/PA bowl Metal bowl Metal bowl with level gauge model barb fitting With drain guide With drain guide With auto drain Drain cock with With drain guide AC20B-D AC30B-D to AC60B-D Standard specifications G Model P1 P2 A B Bracket mount C E J K F M Q1 Q2 R S U V1 V2 AC20B-D 1/8 83.2 87.6 26.5 41.6 25 21 2 30 24 33 5.5 11.5 3.5 29 38 1/8, 1/4 AC30B-D 1/8 110.2 115.4 30.5 30 55.1 35 26.5 3.5 41

MHK2

562 MHKL2-12S 90 12 9 11 9 20 105 Normally open Normally closed MHKL2-16S 16 17 14 14.6 28.6 165 MHKL2-20S 20 32 18 16 34 314 MHKL2-25S 25 53 22 19 41 565 MHKL2-12C 12 11 11 9 20 105 L1 MHKL2-16C 16 22 14 14.6 28.6 166 L2 MHKL2-20C 20 40 18 16 34 314 MHKL2-25C 25 63 22 19 41 565 Note) At the pressure of 0.5 MPa, when gripping point L is 20 mm.

CG1

Bore size (mm) C d B1 D H1 (15) (19.6) (21.9) (31.2) (37.0) (47.3) 5 6 8 11 13 16 13 17 19 27 32 41 12.5 20 25, 32 40 50, 63 80 100 M8 X 1.25 M10 X 1.25 M14 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 NT-02 NT-03 NT-G04 NT-05 NT-08 NT-10 16.5 18 26 31 39 AccessorySCG1 Bore size #11 1.6-11 Series CDG1 Auto Switch Specifications Refer to p.5.3-2 for details of the auto switch.

CQS

Long stroke Standard stroke Without auto switch With auto switch A Long stroke (mm) Standard stroke (mm) Bore (mm) C D E OA OB Q RA RB T H I K M N With/Without auto switch A L F 7.5 7.5 9 11 B 32 32 41 44 A L 3.5 3.5 4.5 5 B 22 22 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 B 17 17 F 5 5 5.5 5.5 12 16 20 25 45.5 13.5 25.5 5 to 30 5 to 30 5 to 50 5 to 50 35 to 100 35 to 100 75 to 200 75 to 300 6 8 7 12

LJ1H

Refer to page 204 regarding brake wiring. 600 a = 2000 a = 1000 400 a = 3000 a 200 L3 Mey 0 5 10 20 15 Transfer load m (kg) Refer to page 145 for deflection data. 40 41 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Standard Motor/Vertical Mount Specification Series

MHK2

562 MHKL2-12S 90 12 9 11 9 20 105 Normally open Normally closed MHKL2-16S 16 17 14 14.6 28.6 165 MHKL2-20S 20 32 18 16 34 314 MHKL2-25S 25 53 22 19 41 565 MHKL2-12C 12 11 11 9 20 105 L1 MHKL2-16C 16 22 14 14.6 28.6 166 L2 MHKL2-20C 20 40 18 16 34 314 MHKL2-25C 25 63 22 19 41 565 Note) At the pressure of 0.5 MPa, when gripping point L is 20 mm.

Wedge Cam Operation Provides

562 MHKL2-12S 90 105 20 9 11 12 9 Normally open Normally closed MHKL2-16S 165 28.6 14.6 14 16 17 MHKL2-20S 314 34 16 18 20 32 MHKL2-25S 565 41 19 22 25 53 L1 Single acting MHKL2-12C 105 20 9 11 12 11 L2 MHKL2-16C 166 28.6 14.6 14 16 22 MHKL2-20C 314 34 16 18 20 40 MHKL2-25C 565 41 19 22 25 63 Note) At the pressure of 0.5MPa , when holding point L is 20mm.