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Z Dimensions (mm) Model A B C E H I X Y Z J K L S 250 250 250 30 30 30 VXF25B< VXF26B< VXF27B< VXF28B< 182 206 206 206 18.3 34 34 34 90 100 110 120 78.4 78.4 78.4 78.4 118 121 121 121 59.8 59.8 59.8 59.8 47 50 50 50 24 24 24 24 18.6 18.6 18.6 18.6 30 30 30 30 17 17 17 17 Grommet Grommet (with surge voltage suppressor) DIN terminal Model Q R U Q R U 27 27 27 27 R U T 64.5 64.5 64.5 64.5

ZSM1-115/121

Vacuum Switch Diaphragm Style Series ZSM1-115/121 Specifications ZSE ISE PSE ZSM1-115 ZSM1-121 Model Solid state Contact (Reed switch) Switch specifications Z I SE3 Air/Inert gas Fluid 0.5 MPa Max. operating pressure PS 27 to 80 kPa Regulating pressure range Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

ZPT/ZPX

EPR 40 50 63 80 100 125 40 161 1 0 +1 +10 39 160 2 0 +1 +19 89 158 3 0 +2 +37 56 156 6 0 +2 +61 55 396 12 1 +4 +121 155 347 22 3 +7 +228 121 345 120 580 118 531 116 529 How to Order A14 HB N 40 ZPX Vacuum entry/Mounting thread diameter Pad diameter (mm) 40 40 40, 50 63, 80 100, 125 50 50 A14 M14 x 1 63 63 A16 M16 x 1.5 80 80 B8 M 8 x 1.25 100 100 B10 M10 x 1.5 125 125 B12 M12

Rotary Actuator/Vane Style Series CRB1

Vane type Shaft pattern sequencing symbol Rotating angle Shaft type Auto switch J Refer to page 121.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

70.0 10.0 IN -XC22 Fluoro rubber seals 353 212 177 141 106 70.6 247 35.3 OUT CXS15 8 -X593 Without plate 252 151 126 101 75.6 50.4 176 25.2 IN 628 377 314 251 188 126 440 62.8 OUT CXS20 10 471 283 236 188 141 94.2 330 47.1 IN 982 589 491 393 295 196 687 98.2 OUT CXS25 12 756 454 378 302 227 151 529 75.6 IN 1608 965 804 643 482 322 1126 161 OUT CXS32 16 1206 724 603 482 362 241 844 121

VQC

For each additional input block, add 21mm.) n: Stations (maximum 24 stations) n L L1 L2 L3 L4 1 73 192 212.5 223 2 89 208 237.5 248 3 105 224 250 260.5 4 121 240 262.5 273 5 137 256 275 285.5 6 153 272 287.5 298 7 169 288 312.5 323 8 185 304 325 335.5 9 201 320 337.5 348 10 217 336 362.5 373 11 233 352 375 385.5 12 249 368 387.5 398 13 265 384 400 410.5 14 281 400 425 435.5 15 297 416 437.5

SI unit for DeviceNet ®

Bus off detection Check the terminating resistor (121 ) is installed at both ends of the trunk line. Install the terminating resistor (121 ) properly. Keep noise sources away from DeviceNet cables and power cables. Check that there is no noise source or high voltage line around the DeviceNet cables and power cables.

5 Port Solenoid Valve, Series VQC

For each additional input block, add 21mm.) n: Stations (maximum 24 stations) n L L1 L2 L3 L4 1 73 192 212.5 223 2 89 208 237.5 248 3 105 224 250 260.5 4 121 240 262.5 273 5 137 256 275 285.5 6 153 272 287.5 298 7 169 288 312.5 323 8 185 304 325 335.5 9 201 320 337.5 348 10 217 336 362.5 373 11 233 352 375 385.5 12 249 368 387.5 398 13 265 384 400 410.5 14 281 400 425 435.5 15 297 416 437.5

Water-cooledThermo-chiller

Page 121 Page 121 Page 122 Page 122 Page 122 Page 123 to 125 103 Series HRW Model Selection Guide to Model Selection 1.

Manifold Specifications

Valve Metal Seal, Plug-in/Non Plug-in Series VZS2000 Plug-in type Manifold With D-sub connector: VV5ZS2-51FStation 1Port size Manual override Indicator light 4-4.5 mounting hole U side VK (n) VZ VF (2) VFR (1) Stations VP4 D side VZS VFS 2-C4, C6 1 VS4 A D-sub connector B VQ7 9.5 EVS 27.3 (Port size: One-touch fitting type) VFN n: Stations L Stations 2 53 62 3 70 79 4 87 96 5 104 113 6 121

Manifold Specifications

Plug-in/Non Plug-in Series VZS3000 Plug-in type Manifold With D-sub connector: VV5ZS2-51FStation 1Port size Manual override Indicator light 2-4.5 mounting hole U side VK (n) VZ VF (2) VFR (1) Stations VP4 D side VZS 2-C6, C8 VFS A 2 VS4 B D-sub connector VQ7 10.7 31.5 EVS (Port size: One-touch fitting type) VFN n: Stations L Stations Formula 20n + 21 20n + 30 2 61 70 3 81 90 4 101 110 5 121

SMC's VP300/500/700 series solenoid valve, offers high flow capacity and reduced power consumption (1.55W standard, 0.55W with power saving circuit). The VP series may be used as either a selector valve, or a divider valve. It is available in a normally closed or a normally open style. The series is vacuum applicable up to 101.2kPa., MANIFOLD BLOCK, VALVE, VP3/5/7 SOL VALVE 3-PORT, GJ

EXxx-OMC0002

EX120/121/122/124U/124D-SCS1 EX120/121/122/124U/124D-SCS2 Applicable system CompoBus/S Communication specifications Node address setting range 0 to 14 0 to 15 Communication speed 750 kbps Cable length Cable type Main cable length Branch cable length Total branch cable length When using VCTF cables 100 m or less 3 m or less 50 m or less When using special flat ribbon cable 30 m or less 3

VQ7-6/7-8

230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B SMC A PA A B B A (A, B port) 4n-1/4, 3/8 PA A L side R side L side R side (2n-1/8) 38 D side D side 68.5 68.5 3 120.5 (Single) 16 120.5 (Single) 145 (Double) 44 145 (Double) 155 (3 position) 55 155 (3 position) 77.5 Bottom ported drawing 165.5 153.5 121

Electronic Pressure Switch Series (Separate Type)

collector (ZSM1-115) Contacts 1a1b 1a 1ab 1a (ZSM1-121) Possible with ISG2 (Equivalent to IP44) Enclosure Set pressure range 0.1 to 0.6 MPa (-X202) Micro-load type available Available indicator light Compliant with ZM ejector 2ab contact type (Option) With light (Refer to Series IS2761.)

SMC Electronic Switch Series Variations

) 3% F.S. 3% F.S. 3% F.S. 10% F.S. 15kPa or less (ZSM1-115) 0.02 to 0.35MPa (Without pointer scale) 0.03 to 0.4MPa (Without pointer scale) 7 to 53kPa 0.02 to 0.45MPa (With pointer scale) 0.03 to 0.6MPa (With pointer scale) 20kPa or less (ZSM1-121) NPN open collector (ZSM1-115) 1a1b 1a (ZSM1-121) Available ISG2ll only 2ab contact type (option) With light (Refer to Series IS2761.)

Heavy Duty Stopper Cylinder

Easy replacement of shock absorbers MIW MIS Shock absorber Install/removal Adjustment dial Set screw(M4) D-X 589 Heavy Duty Stopper Cylinder Weight reduced by up to 22% Shorter cylinder tube RS1H RS2H 6.33 kg 22% 22% 4.96 kg 4.96 kg Dimensions Bore size (mm) Shortened by RS2H series 22% 22% 3.56 kg 50 63 80 2.78 kg 2.78 kg 84.5 90 121 16% 16% 2.03 kg Cylinder tube 1.70 kg 1.70 kg Compared

EX120/121/122

Integrated Type/For Output Series EX120/121/122 Series EX120 Series EX121 Series EX122 SV1000/2000/3000/4000 SY3000/5000 SY3000/5000 D D D D D D VQ1000/2000 How to Order SI Unit DN1 EX12 S 0 Valve interface Dustproof 0 1 2 Nil -XP Plug-in Non-dustproof Flat ribbon cable DIN rail mounting Dustproof Plug-in DIN rail mounting Note) XP is not available for DN1 and DN1-X26.

How to Order MGQ M Cylinder stroke (mm) Refer to “ Standard Stroke ” on page 339. Slide bearing Ball bushing bearing Bearing type M L 12 mm 16 mm 20 mm 25 mm 32 mm Bore size 12 16 20 25 32 40 mm 50 mm 63 mm 80 mm 100 mm 40 50 63 80 100 M9BW 2 pcs. 1 pc. n

101 80 0UT 60 40 201 Symbol Specifications 16 8 XA MGZ 151 136 121 106 91 76 60 IN 45 30 151 Change of rod end shape Heat resistant cylinder (10 to 150C) XB6 314 283 251 220 188 157 126 0UT 94 63 314 20 10 MGT XB9 Low speed cylinder (10 to 50 mm/s) 236 212 189 165 142 118 94 IN 71 47 236 XB10 Intermediate stroke (Using exclusive body) 491 442 393 344 295 246 196 0UT 147 98 491 25 12 XC22