Low Differential Pressure Sensor

Sensor -2kPa 0 2kPa 5kPa 10kPa Pressure range For low differential pressure PSE550 0 2kPa -0.2kPa 2kPa Rated differential pressure range of sensor Set differential pressure range of controller 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2003 SMC CORPORATION All Rights Reserved 1st printing July, 2003 D-YGA P-120 (YGA)

ARJ1020F

AV Regulating pressure range AU Ambient and operating temperature range Weight AF Model AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size Model IR IN OUT ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 Rc 1/8 R 1/8, M5 x

Table of Contents - Tubing

I.D. 1 2 3 1 2 3 1 L 210 280 265 D 18 TCU0425B-1 TCU0425B-2 TCU0425B-3 TCU0604B-1 TCU0604B-2 TCU0604B-3 TCU0805B-1 52 35 22 54 27 17 41 1.5 4 2.5 28 1 2 1.5 1 2 24 325 6 4 37 305 330 8 31 5 Burst Pressure Characteristics Chart 725 Burst pressure psi 580 Burst pressure 435 290 145 Max. operating pressure 0 4 32 68 Operating temperature F 104 140 TUB-10 Polyurethane Coil Tubing (Metric) continued

Series VS

OVERRIDE OVERRIDE LIGHT LIGHT OVERRIDE OVERRIDE LIGHT LIGHT E E ALL DIMENSIONS ARE IN MILLIMETERS ALL DIMENSIONS ARE IN MILLIMETERS A B D C E F 188.5 188.5 103 103 38 38 19 19 65 65 150.5 150.5 SIZE 1 SIZE 1 SIZE 2 SIZE 2 SIZE 3 SIZE 3 205 205 228 228 110.5 110.5 25 25 32 32 50 50 64 64 67.5 67.5 175 175 198 198 122 122 71 71 10 Series VS R8 Rubber Seal S ISO SIZE 1 SUB-BASE VS8-1-w 02/03

Fieldbus System

IP67 cannot be guaranteed if the screws are not tightened to the specified torque. 41 Series EX260 Specific Product Precautions 2 Be sure to read before handling. Refer to back cover for Safety Instructions, Handling Precautions for SMC Products (M-E03-3) and Operation Manual for 3/4/5 Port Solenoid Valve Precautions.

Series AMP

Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket Note) The bracket is not attached.

Blow Gun Series VMG

Without nozzle KN-R02-100 KN-R02-150 KN-R02-200 KN-R02-250 VMG1-R02-300 VMG1-R02-350 VMG1-R02-400 KNH-R02-100 KNH-R02-150 KNH-R02-200 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 01 02 03 04 05 06 07 11 12 13 21 22 23 24 1 1.5 2 2.5 3 3.5 4 1 1.5 2 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 Connection size Piping connection method Symbol Size and model no.

Blow Gun Series VMG

Without nozzle KN-R02-100 KN-R02-150 KN-R02-200 KN-R02-250 VMG1-R02-300 VMG1-R02-350 VMG1-R02-400 KNH-R02-100 KNH-R02-150 KNH-R02-200 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 Nozzle size Nil 01 02 03 04 05 06 07 11 12 13 21 22 23 24 1 1.5 2 2.5 3 3.5 4 1 1.5 2 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 Connection size Piping connection method Symbol Size and model no.

Electric Slide Tables

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2013 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing NZ printing RP 8150SZ Printed in Japan. D-SZ

Rotary Actuator

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2012 SMC Corporation All Rights Reserved 1st printing QT printing QT 8100SZ Printed in Japan. D-DN Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

Exhaust Cleaner for Clean Rooms AMP Series

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

Exhaust Cleaner for Clean Rooms AMP Series

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

Miniature Regulator Series ARJ310

One-touch fitting ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 Note) M5 x 0.8 female thread is cut inside the pipe.

AR20-B to AR60-B

AR 30 q 03 t y K r BE B Option/Semi-standard: Select one each for a to g. Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order.

Miniature Regulator

pressure: 0.7 MPa 0.6 IR-A Outlet pressure (MPa) 0.5 ARJ310-01 IR 0.4 IRV 0.3 ARJ210-M5 0.2 VEX 0.1 SRH 0.0 0 100 200 300 400 500 SRP Flow rate (L/min (ANR)) SRF ITV IC ITVH ITVX PVQ VY1 Allows smaller mounting pitch Compact and lightweight (Main body 65 g) VBA VBAT Accommodates two types of threads 18.8 mm 18.3 AP100 Inside: Female thread (M5 x 0.8) Outside: Male thread (1/8) 82.5 ARJ310-01G 41

Cylinder

Tel :03-3502-2740 Fax:03-5251-7240 August 1996, 14(RP)

JXCx-OMY0006

(When operation is commanded through PLC, this alarm will be generated depending on the signal interval and the holding time of signals) Alarm _Comment _061 (01-061) (1) Make sure that the Movement MOD in the step data is not 3D B RESET "Blank (Disabled)" and that numbers [1(ABS)] or [2(INC)] are input in the numerical instruction operation. (2) Set the interval time between

ATX-OM-F004E

Electric circuit diagram 5Electric circuit diagram HAA7-061 HAA7-062 HAA15-101 HAA15-103 HAA22-143 HAA37-143 HAA Series 8 5. Electric circuit diagram ATX-OM-F004E Air-Cooled Aftercooler 6. Installation 6.

This is a legacy product, and replaced byVV5FR4-01T-061-04T, MFLD,NVFR4*00 SERIES,SIDE PORT, VALVE, VV*FR* MANIFOLD VFR SERIES, RM, VV*FR* BASE MT 1/2, .00000 lb

lVFl 10

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32