and removal of the HRS filter to be done easily and without tools.Compact type thermal-chiller , Single phase, 100/115VAC, Cooling method: air-cooled or water-cooled , Self diagnosis and check display for easy maintenance , Functions: timer operation, low tank level detecting, power failure auto-restart, anti-freezing, Thermo-chiller, water cooled, HRS090 AND LARGER CAPACITIES, O88, 151

and removal of the HRS filter to be done easily and without tools.Compact type thermal-chiller , Single phase, 100/115VAC, Cooling method: air-cooled or water-cooled , Self diagnosis and check display for easy maintenance , Functions: timer operation, low tank level detecting, power failure auto-restart, anti-freezing, Thermo-chiller, water cooled, HRS090 AND LARGER CAPACITIES, O88, 151

and removal of the HRS filter to be done easily and without tools.Compact type thermal-chiller , Single phase, 100/115VAC, Cooling method: air-cooled or water-cooled , Self diagnosis and check display for easy maintenance , Functions: timer operation, low tank level detecting, power failure auto-restart, anti-freezing, Thermo-chiller, water cooled, HRS090 AND LARGER CAPACITIES, O88, 151

PVC piping type , Applicable fluid:  deionized water, chemical, etc. , Flow rate range:  10 to 100 L/min , Remote type, DIGITAL FLOW SWITCH FOR WATER (IO-LINK), DIGITAL FLOW SWITCH, WATER, PF3W, F19, 151 lb

PVC piping type, Applicable fluid:  deionized water, chemical, etc., Flow rate range:  10 to 100 L/min, Integrated type, 3-Color Digital Flow Siwtch for Water, DIGITAL FLOW SWITCH, WATER, PF3W, F19, 151 lb

PVC piping type, Applicable fluid:  deionized water, chemical, etc., Flow rate range:  10 to 100 L/min, Integrated type, 3-Color Digital Flow Siwtch for Water, DIGITAL FLOW SWITCH, WATER, PF3W, F19, 151 lb

The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Actuator replacements for VM100, VM200, VM400 and VM800, Roller levers, plungers, toggle levers, rod levers, push buttons and twist selectors, 2/3 PORT MECHANICAL VAVLE, MECHANICAL VALVE, I98, 151 lb

Environment

89.5 13 20 44 45.5 57.6 57.7 94.7 M8 x 1.25 24 17 14.5 101 to 400 275 325 114.5 32 20 to 100 265.5 315.5 96 13 25 51 56.5 69.6 79.6 116.6 M8 x 1.25 31 22 18.5 101 to 500 295.5 345.5 126 Size Stroke range [mm] M O1 R OA OB PA PB Q U PC W Y Without lock With lock 25 15 to 100 34 M5 x 0.8 8 37 38 15.4 8.2 28 0.9 15.9 146 196 24.5 101 to 400 32 20 to 100 40 M6 x 1.0 10 37 38 15.4 8.2 28 1 15.9 151

LG1H

20 25 30 1000 1000 930 740 600 500 Model Note LG1H202PC-500-F LG1H202PC-600-F LG1H202PC-700-F LG1H202PC-800-F LG1H202PC-900-F LG1H202PC-1000-F 700 700 600 600 500 500 500 500 500 500 500 500 500 500 500 500 500 500 Power supply: 100/110(V)AC 10% Compatible controller: LC1-12HC1Power supply: 200/220(V)AC 10% Compatible controller: LC1-12HC2Consult SMC if outside of the above conditions. 151

02-cxs-e

:GR-S-010 (10 g) 151

JA/JAH/JB/JS

Standard: Heavy Load Type Hydraulic: Up to 7 MPa JAHL40-16-150 JAHL50-20-150 JAHL63-24-150 JAHL80-30-150 JAHL100-39-150 JAHL100-48-150 40 50 63 80 100 100 70 80 88 96 116 116 16 20 24 30 39 48 98.5 123 155 187 213 220 53 65 56 67.5 78 78 18 24 24 38 42 49 1.09 2.03 4.1 6.4 10 10.5 28 35 38 45 55 55 1.5 1.5 1.5 1.5 1.5 1.5 50 59.5 66 79 96 96 42 48 54 60 74 74 36 44 48 48 86 107 102 125 144 151

Compact Cylinder

rod end [N] 80 Mass of Cylinder Moving Parts: Without Magnet for Auto Switch [g] 63 50 10.0 Bore size [mm] Cylinder stroke [mm] 40 32 5 10 15 20 25 30 35 40 45 50 12 5 6 7 8 9 10 25 16 5 6 7 9 10 11 20 9 11 13 15 17 19 21 23 25 27 20 16 1.0 25 15 18 21 24 27 30 33 37 40 43 32 27 32 36 41 45 50 54 59 63 67 12 0.4 40 42 48 54 60 66 73 79 85 91 97 0 10 20 30 40 50 50 91 101 111 121 131 141 151

Manifold Regulator ARM1000/2000 Series

IR IRV VEX SRH (Pitch) IN (Individual IN) IN (Common IN) SRP SRF Symbol Model Dimensions ITV C 34 43 D 21 28 E 18 27 F 56 70 G 16 20 H 9 11.5 J 18 24 K 19 28 M 52 66 P 9 11.5 Q 11.5 16.5 R 4.8 4.8 A 4.5 4.5 B 25 34.5 ARM1000 ARM2000 IC ITVH Dimensions by the Number of Stations Manifold stations (n) ITVX Model Symbol 1 36 27 48 39 2 55 46 76 67 3 74 65 104 95 4 93 84 132 123 5 112 103 160 151

CHKD/CHKG

6.6 9.5 depth 5.4 43 12 70 10 18 10 M8 x 1.25 6 5.5 23 15 58 78 6.6 9.5 depth 5.4 45 76 14 12 18 M10 x 1.5 12 6 5.5 26 15 64 11 depth 6.5 86 9 51 18 94 14 19 15 M12 x 1.75 7 6.6 33 16 79 14 depth 8.6 98 55 11 22.4 108 23 19 20 M16 x 2 7 9 37 20 90 111 14 17.5 depth 10.8 60 28 126 24 27 24 M20 x 2.5 8 11 43 24 104 130 16 20 depth 13 67 146 35.5 30 33 M27 x 3 33 9 13 52 30 121 23 depth 15.2 151

ISO Standard Hydraulic Cylinder

20 16 19 3/8 58 17 25 11 59 +0.043 0 63 25 to 800 77 93 M8 x 1 M27 x 2 46 33 20 19 36 36 30 58 50 31 115 30 18 32 1/2 66 29 32 13 74 80 25 to 800 96 93 M33 x 2 57 32 M10 x 1.25 20 13 45 45 41 75 60 42 133 30 17 32 1/2 74 29 41 17 80 113 +0.052 0 100 25 to 1000 115 M42 x 2 58 42 M14 x 1.5 28 16 56 56 50 90 72 38 146 40 22 39 3/4 86 34 52 19 97 Bore size (mm) V Y ZZ W SS 40 6.5 11.5 58 190 151

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

MM Bore size 5 30 40 50 5 10 15 20 25 30 40 50 10 15 20 25 20 16 12 11 5.5 4.5 9 4 4.5 2 16 12 26 20 40 32 8 6 30 27 M6 x 1.0 M5 x 0.8 14 12.5 21.5 19 22 19 19 16 16 14 6 5 7.6 depth 6.5 81 72.5 86 77.5 91 82.5 96 87.5 101 92.5 106 97.5 116 126 100 88.5 93.5 103.5 108.5 135 145 40 36.5 110 98.5 113.5 9.5 depth 8 105 115 120 125 83 88 93 98 103 108 118 128 106 111 116 121 126 131 141 151

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

CE2 IN 84.8 59 42 25 CQSY16-PS 12 6 OUT 113 79 57 34 CQSY20-PS ML2B IN 151 106 75 45 CQSY25-PS 16 8 OUT 201 141 101 60 When only grease for maintenance is necessary, please order by the following part numbers.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

CRBU2W20 CRBU2W30 90 CRBU2W40 90 Vane type Model (size) 180 180 270 180 270 270 90 270 90 180 270 90 180 Rotating angle Single vane Double vane 469 47.1 47.5 258 255 491 480 47 73 72 72 143 142 140 263 Body of rotary actuator Auto switch unit + 2 switches 30 60 46.5 50 30 Angle adjuster 30 150 203 47 90 90 90 100 90 100 100 100 90 100 90 Rotating angle 158 308 550 62.2 289 504 63.2 77 81 151

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CRBU2W15 CRBU2W20 CRBU2W30 90 CRBU2W40 90 Model (size) Vane type 180 270 90 180 270 90 180 270 180 270 180 270 90 Rotating angle Single vane Double vane D469 47.1 47.5 47 73 72 72 143 142 263 258 491 480 140 255 Body of rotary actuator Auto switch unit + 2 switches 30 30 50 60 46.5 Angle adjuster 30 47 90 150 203 90 100 90 100 90 100 90 100 90 100 Rotating angle 158 308 550 62.2 63.2 77 81 151

Slide Unit Series CX2/CXWM/CXWL

hexagon socket head plug) 2 x M5 x 0.8 plug (M-5P) (Housing side port) Max. 8 2 x 2 x 4H7 depth 5 +0.012 0 4 x 3.2 through 4 x 6.5 counterbore depth 3.3 28 CX2 2 x 2 x M4 x 0.7 thread depth 8 2 x RB0805-X552 Shock absorber CXW CXT CXSJ (mm) F L P Q S SS Z ZZ Model CXWL10-25 CXWL10-50 CXWL10-75 CXWL10-100 CXS 35.5 45 30 138 27 101 128 165.5 38 70 50 188 52 126 178 215.5 40.5 95 70 238 77 151